公开(公告)号：KR1020090083281A

公开(公告)日：2009-08-03

申请号：KR1020090006153

申请日：2009-01-23

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나카시마쓰네나가 ,  기시타나오후미 ,  기노시타미치오

IPC: H01L21/027

CPC classification number: G03F7/16 ,  G03F7/7085 ,  G03F7/70975 ,  H01L21/67242 ,  H01L21/67276

Abstract: A liquid processing apparatus is provided to accurately adjust the resist state and improve the uniformity of the coated film thickness. The coating liquid nozzle(10) forms the flow path(105) of the coating solutions supplied from the coating solutions feed port and the coating solutions is discharged toward the substrate holding unit. The nozzle transferring unit transfers the coating liquid nozzle. The apparatus includes the light source for illuminating the coating liquid nozzle. The coating liquid nozzle is made of the cylindrical form of the transparent member. A part of the outer periphery of the cylindrical form has the light-in surface(101a).

Abstract translation: 提供液体处理装置以精确地调节抗蚀剂状态并提高涂膜厚度的均匀性。 涂布液喷嘴（10）形成从涂布液供给口供给的涂布溶液的流路（105），涂布液朝向基板保持单元排出。 喷嘴转印单元转移涂布液喷嘴。 该装置包括用于照射涂布液喷嘴的光源。 涂布液喷嘴由透明构件的圆柱形形成。 圆筒形的外周的一部分具有入光面（101a）。

公开(公告)号：KR1020080034759A

公开(公告)日：2008-04-22

申请号：KR1020070082273

申请日：2007-08-16

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나카시마즈네나가 ,  기시타나오후미 ,  하야시신이치

IPC: H01L21/027 ,  H01L21/02

CPC classification number: H01L21/6715 ,  H01L21/0274 ,  G03F7/2041 ,  G03F7/70875 ,  H01L21/02002

Abstract: Compound piping and a coating and developing apparatus having the same are provided to achieve the degree of freedom with respect to a transformation of piping when the piping being moved, as each pipe is integrated with a flexible covering member, and to control temperature of liquid flowing through the piping at a constant temperature by containing temperature control liquid in a space within a pipe for liquid and a liquid supply pipe. Compound piping(60) whose one end is connected to fixed equipment and the other end is connected to a nozzle head of a moving unit, comprises a plurality of pipes having at least a pipe for liquid(61) and a pipe for electricity(62) fixed and arranged in parallel. The pipes are integrated by a flexible covering member(63), wherein the pipe for liquid has a space to have an inserted liquid supply pipe(64) and contain temperature control liquid(65) within the space.

Abstract translation: 提供复合管道和具有该复合管道的涂覆和显影装置，以便当管道被移动时实现相对于管道变形的自由度，因为每个管道与柔性覆盖件一体化，并且控制液体流动的温度 通过在液体管和液体供应管内的空间内容纳温度控制液体，在恒定温度下通过管道。 复合管道（60），其一端连接到固定设备，另一端连接到移动单元的喷嘴头，包括至少具有液体管（61）和电力管（62）的多个管 ）固定并并联布置。 管道由柔性覆盖件（63）整合，其中用于液体的管具有一个具有插入的液体供给管（64）的空间并且在该空间内容纳温度控制液体（65）。