Abstract:
반도체장치에적용되는세정조성물이제공된다. 상기세정조성물은반도체실리콘기판상에건식식각공정을통하여물질막으로부터형성되는물질패턴에서, 물질패턴에적용되는습식식각공정의에천트(etchant)로써, 총 100 중량% 내에 10 내지 20 중량% 의하이드록실아민(hydroxylamine), 5 내지 20 중량% 의하이드라진하이드레이트(hydrazine hydrate), 10 내지 30 중량% 의유기용매와, 물을포함한다.
Abstract:
Provided are an angiopoietin-2 (Ang2) derived peptide, a composition for inhibiting binding between Ang 2 including the peptide and integrin, and a composition for preventing and/or treating diseases caused by activation of Ang2 including the peptide or binding between Ang2 and integrin.
Abstract:
슬러리 조성물, 이를 이용한 연마 방법 및 반도체 메모리 소자의 제조 방법에서, 슬러리 조성물은 세리아 연마제 0.05 내지 0.3중량%와 음이온성 계면활성제 0.005 내지 0.04중량%와, 폴리옥시에틸렌계 비이온성 계면활성제 0.0005 내지 0.003 중량%와 상기 음이온성 계면활성제 보다 높은 분자량을 갖는 고분자 폴리아크릴산염 0.2 내지 1.0중량%와 여분의 물을 포함한다. 상기 슬러리 조성물은 낮은 함량의 세리아 연마제를 포함하에도 불구하고 실리콘 산화막 대하여 높은 연마 속도를 보이며 실리콘 질화막에 대하여는 현저히 낮은 연마 속도를 보인다.
Abstract:
A slurry composition for chemical mechanical polishing is provided to show a high polishing rate to silicon oxide layer but a low polishing rate to a silicon nitride layer even though a low content of ceria abrasive is contained. A slurry composition for chemical mechanical polishing includes 0.05-0.3wt% of a ceria abrasive, 0.005-0.04wt% of an anionic surfactant, 0.0005-0.003wt% of a polyoxyethylene-based nonionic surfactant, 0.2-1.0wt% of a polyacrylic acid salt having higher molecular weight than the anionic surfactant, and an excess of water. The ceria abrasive has a particle size of 120-200 nm. The polyacrylic acid salt is a polyacrylic acid ammonium salt having a molecular weight of 100,000-400,000.
Abstract:
In the present invention, provided are an anti-Ang2 antibody or an antigen binding piece thereof, which is specifically bound to an Angiopoietin-2 (Ang2) as an inducing factor to form angiogenesis and is bound to a Tie2 receptor with the Ang2, a pharmaceutical composition which is taken to patients with medicines and an anticancer supplement including the same.
Abstract:
Provided is an use for preventing and/or treating diseases accompanying vascular leakage and/or vascular inflammation comprising an anti-Ang2 antibody or an antigen binding fragment, which is specifically bound to Angiopoietin-2 (Ang2) which is a neovascularization inducing factor, and bound to a Tie2 acceptor with Ang2.