公开(公告)号：KR101641147B1

公开(公告)日：2016-08-03

申请号：KR1020100007108

申请日：2010-01-26

Applicant: 삼성전자주식회사 ,  한양대학교 산학협력단 ,  숭실대학교산학협력단

Inventor： 이기준 ,  공준진 ,  손홍락 ,  김형준 ,  신동준 ,  정성한 ,  김성래 ,  이재진

IPC: H03M13/11

CPC classification number: H03M13/47 ,  H03M13/235 ,  H03M13/6362 ,  H03M13/6368 ,  H03M13/6375

Abstract: 인코딩장치는인코더및 천공부를포함한다. 인코더는정보비트들에기초하여패리티비트들을생성한다. 천공부는정보비트들이잔여패리티비트들의생성에관여하는지여부에관한제1 기준및 잔여패리티비트들의위치에관한제2 기준을만족하는천공패턴에기초하여패리티비트들을천공한다. 인코딩장치는높은부호율을가지며에러정정이가능한부호를생성할수 있다.

公开(公告)号：KR1020080070100A

公开(公告)日：2008-07-30

申请号：KR1020070007700

申请日：2007-01-25

Applicant: 삼성전자주식회사

Inventor： 임병기 ,  김성래 ,  윤기영 ,  이병근 ,  조경옥 ,  한성건 ,  김덕겸

IPC: H01L21/66

CPC classification number: H01L21/67271 ,  H01L21/67288

Abstract: A wafer checking device for a semiconductor manufacturing device and a checking method thereof are provided to minimize the generation of badness by forming a controller for displaying a normal or abnormal condition and separating a defect wafer. A wafer checking device for a semiconductor manufacturing device comprises a wafer handler part(16) transferring a loaded wafer, a wafer handler control part(14) controlling the wafer handler part, a wafer reading section(18), a controller(20), and a display part(22). The wafer reading section reads the badness of the wafer transferred from the wafer handler part. The controller controls to display a normal or abnormal condition by receiving a wafer reading signal from the wafer reading section, and to separate a defect wafer. The display part displays the normal or abnormal condition of the wafer by control of the controller.

Abstract translation: 提供一种用于半导体制造装置的晶片检查装置及其检查方法，用于通过形成用于显示正常或异常状况的控制器和分离缺陷晶片来最小化不良的产生。 一种用于半导体制造装置的晶片检查装置包括：转印加载的晶片的晶片处理器部分（16），控制晶片处理器部分的晶片处理器控制部分（14），晶片读取部分（18），控制器（20） 和显示部（22）。 晶片读取部读取从晶片处理器部件传送的晶片的不良情况。 控制器通过从晶片读取部接收晶片读取信号并且分离缺陷晶片来控制显示正常或异常状态。 显示部通过控制器的控制来显示晶片的正常或异常状态。

公开(公告)号：KR1020080022378A

公开(公告)日：2008-03-11

申请号：KR1020060085734

申请日：2006-09-06

Applicant: 삼성전자주식회사

Inventor： 이인호 ,  박영길 ,  이강혁 ,  김호진 ,  김성래

IPC: B65G49/06 ,  B65G49/00 ,  B65G47/74 ,  G02F1/13

Abstract: A substrate transfer unit is provided to reduce substrate transfer time by forming fork entrance space so as to allow the fork of a transfer robot to be entered through a link unit. A substrate transfer unit comprises a frame(10), a transfer unit(20), a transfer robot(22) and a link unit(40). The frame is laid in a bottom surface. The transfer unit includes a plurality of transfer shafts(21) installed in an upper side of the frame, a transfer motor connected the transfer shafts and rotating the transfer shafts and a plurality of transfer rollers(23) installed in the respective transfer shaft and transferring substrates by being rotated when the respective transfer shaft is rotated. The transfer robot enters to the transfer unit and transfers the substrates to a position for a following process. The link unit includes a link roller disposed between the transfer rollers and a link member forming fork entrance space by rotating the link roller.

Abstract translation: 提供基板转印单元以通过形成叉入口空间来减少基板传送时间，以便允许传送机器人的叉通过连接单元进入。 基板转印单元包括框架（10），转印单元（20），转印机器人（22）和链接单元（40）。 框架放置在底面。 传送单元包括安装在框架的上侧的多个传送轴（21），连接传送轴并转动传送轴的传送马达和安装在各个传送轴中的多个传送辊（23），并传送 当相应的转印轴旋转时通过旋转基板。 传送机器人进入传送单元并将基板传送到用于后续处理的位置。 连杆单元包括设置在转印辊之间的连杆辊和通过旋转连杆辊而形成叉入口空间的连杆部件。