Abstract:
PURPOSE: A method for a vertically penetrated silicon electrode with an insulating glass part is provided to fill insulating glass around a silicon pillar to manufacture a penetration electrode, thereby simplifying manufacturing processes by eliminating a process which fills metal materials in a via hole. CONSTITUTION: A protective pattern is formed on one side of a silicon wafer to form a silicon electrode(S100). The silicon wafer is etched to form a silicon electrode(S200). The silicon wafer is bonded with a glass wafer(S300). The bonded glass wafer is dissolved(S400). Both sides of the silicon wafer and the glass wafer are processed so that the thicknesses of the silicon wafer and the glass wafer become a fixed thickness(S500).
Abstract:
The present invention relates to an energy conversion device using a change of the contact surface with liquid and more specifically, to a device and a method of converting mechanical energy to electrical energy by applying the opposite phenomenon of electrowetting phenomenon. Provided is the energy conversion device which changes the contact surface with liquid between a pair of electrodes and applies the change of the contact surface therewith to generate electrical energy so that the present invention simplifies the device, reduces manufacturing costs and has less failure because the device does not require patterned electrodes on a clogging phenomenon, a lubricating layer or complex channels.