公开(公告)号：KR1020050096469A

公开(公告)日：2005-10-06

申请号：KR1020040021693

申请日：2004-03-30

Applicant: 전자부품연구원

Inventor： 신상훈 ,  이재찬 ,  박준식 ,  박효덕 ,  박광범 ,  신규식

IPC: G01N27/00

CPC classification number: G01N27/87 ,  G01N9/002 ,  G01N27/128 ,  G01N27/283 ,  G01N29/022

Abstract: 본 발명은 압전 마이크로 칸티레버를 이용한 화학 센서 및 그 제작 방법에 관한 것으로, 보다 자세하게는 멤스 공정 기술을 이용한 초소형 화학 센서 시스템에 관한 것이다.
본 발명의 압전 마이크로 칸티레버를 이용한 화학 센서 제조 방법은 실리콘 기판 상부에 형성된 실리콘 질화막 칸티레버; 상기 실리콘 질화막 칸티레버 상부에 형성된 실리콘 산화막; 상기 실리콘 산화막 상부에 소정의 크기로 형성된 하부 전극; 상기 하부 전극 상부에 압전 구동을 위해 형성된 압전 구동층; 상기 하부 전극 상부 및 상기 압전 구동층 일부 영역 상부에 상하부 전극간 절연을 위해 형성된 절연층; 상기 절연층의 상부 및 상기 압전 구동층의 상부에 형성된 상부 전극 및 상기 상부 전극과 하부 전극에 소자의 구동을 위해 전계를 인가하기 위해 형성된 전극 라인으로 구성됨에 기술적 특징이 있다.
따라서, 본 발명의 압전 마이크로 칸티레버를 이용한 화학 센서 및 그 제작 방법은 외부로부터 극소량의 ppb 또는 ppt 수준의 산업 환경유해 물질의 농도에 신속하게 반응하여 공진주파수의 변화를 통해 즉시 감지가 가능하여 빠른 응답 속도와 높은 감도 낮은 전력 손실이 가능한 장점이 있고, 시스템의 소형화로 인한 휴대형화, 실리콘 반도체 가공기술로 대량생산에 따른 제조원가 절감 및 집적의 용이함, 다양한 감지 대상 물질을 감지할 수 있도록 어레이 형태로 제작이 가능하며, 생명공학, 의학 및 환경관련 분야에 활용이 가능한 효과가 있다.

公开(公告)号：KR1020040103055A

公开(公告)日：2004-12-08

申请号：KR1020030034939

申请日：2003-05-30

Applicant: 전자부품연구원

Inventor： 박광범 ,  박효덕 ,  김건년 ,  박준식

IPC: G02B6/32

Abstract: PURPOSE: A manufacturing method of optical fiber having a coupled microball lens is provided to simplify the manufacturing steps and to lower a manufacturing cost by forming a plurality of optical fibers having recessive holes on end portions thereof and then coupling the microball lens with the recessive holes. CONSTITUTION: An etching stopper layer is formed on an end portion except for a region of a terminal of an optical fiber(20). A recessive hole is formed on an end portion of the optical fiber where the etching protection layer is not formed. An adhesion material is injected into the recessive hole formed on the end portion of the optical fiber. A microball lens(24) is coupled with the recessive hole where the adhesion material is injected. The etching stopper layer is either one of a silicon nitride(Si3N4) layer or a gold(Au) layer.

Abstract translation: 目的：提供具有耦合的微球透镜的光纤的制造方法，以简化制造步骤并通过在其端部上形成具有隐性孔的多个光纤，然后将微球透镜与隐性孔耦合来降低制造成本 。 构成：在除了光纤（20）的端子的区域之外的端部上形成蚀刻停止层。 在没有形成蚀刻保护层的光纤的端部上形成凹陷孔。 将粘合材料注入到形成在光纤端部的隐形孔中。 微球透镜（24）与粘附材料注入的隐性孔耦合。 蚀刻停止层是氮化硅（Si 3 N 4）层或金（Au）层中的一种。

公开(公告)号：KR100453971B1

公开(公告)日：2004-10-20

申请号：KR1020020016205

申请日：2002-03-25

Applicant: 전자부품연구원

Inventor： 이대성 ,  박효덕

IPC: G01R27/26

Abstract: PURPOSE: An integrating capacity-voltage converter is provided to convert a variance of non-linear capacity of a pressure sensor to a linear detection voltage without using an additional memory by using a fully differential capacity type pressure sensor. CONSTITUTION: An integrating capacity-voltage converter includes an integrator(300) and a differential amplifier(400). The integrator(300) is used for feeding back output signals and integrating input voltages according to the applied pressure. The differential amplifier(400) is used for feeding back the output voltages of the integrator(300) and amplifying differentially the integrated voltages. The integrator(300) includes an operational amplifier(310), a fully differential capacity type pressure sensor, the first and the second feedback switching portions(320,330), and a charge portion(340). The operational amplifier(310) is used for amplifying the input voltages and the feedback voltages. The fully differential capacity type pressure sensor includes the first and the second capacitors which are varied by the applied pressure. The first and the second feedback switching portions(320,330) feeds back the output voltages of the operational amplifier(310). The charge portion(340) includes a charge portion to supply the feedback voltages to the operational amplifier(310).

Abstract translation: 目的：提供积分容量 - 电压转换器，用于将压力传感器的非线性容量变化转换为线性检测电压，而无需使用全差分容量型压力传感器的额外存储器。 构成：积分电容 - 电压转换器包括积分器（300）和差分放大器（400）。 积分器（300）用于根据施加的压力反馈输出信号并积分输入电压。 差分放大器（400）用于反馈积分器（300）的输出电压并差分放大积分电压。 积分器（300）包括运算放大器（310），全差分电容型压力传感器，第一和第二反馈切换部分（320,330）以及充电部分（340）。 运算放大器（310）用于放大输入电压和反馈电压。 全差动容量型压力传感器包括第一和第二电容器，它们根据所施加的压力而变化。 第一反馈切换部分和第二反馈切换部分（320,330）反馈运算放大器（310）的输出电压。 充电部分（340）包括用于将反馈电压提供给运算放大器（310）的充电部分。

公开(公告)号：KR100429659B1

公开(公告)日：2004-05-03

申请号：KR1020020016207

申请日：2002-03-25

Applicant: 전자부품연구원

Inventor： 박준식 ,  박효덕

IPC: G01L11/00

Abstract: PURPOSE: A device and method for measuring partial pressure of various gases are provided to precisely measure partial pressure of various gases by using a micro-sized cantilever. CONSTITUTION: A partial pressure measuring device for various gases includes a plurality of cantilevers(30a,30b,30c,30d,30e) having a PZT capacitor, respectively. The plurality of cantilevers(30a,30b,30c,30d,30e) is connected to each other on a supporter(20). A plurality of gas detecting layers(51,52,53,54,55) are provided at each ends of the plurality of cantilevers(30a,30b,30c,30d,30e) respectively, in order to absorb various gases. The plurality of gas detecting layers(51,52,53,54,55) detects different gases respectively so that partial pressure of various gas is calculated by calculating variation of mass of the gas detecting layers(51,52,53,54,55).

Abstract translation: 目的：提供测量各种气体分压的装置和方法，通过使用微尺寸悬臂精确测量各种气体的分压。 用于各种气体的分压测量装置包括分别具有PZT电容器的多个悬臂（30a，30b，30c，30d，30e）。 多个悬臂（30a，30b，30c，30d，30e）在支架（20）上相互连接。 多个气体检测层（51,52,53,54,55）分别设置在多个悬臂（30a，30b，30c，30d，30e）的每个端部处，以便吸收各种气体。 多个气体检测层（51,52,53,54,55）分别检测不同的气体，从而通过计算气体检测层（51,52,53,54,55）的质量变化来计算各种气体的分压 ）。

公开(公告)号：KR1020040006746A

公开(公告)日：2004-01-24

申请号：KR1020020041121

申请日：2002-07-15

Applicant: 전자부품연구원

Inventor： 이유진 ,  박효덕 ,  이대성 ,  김건년

IPC: G05F1/52

Abstract: PURPOSE: A trimming device is provided to reduce unnecessary power consumption without using an additional protection circuit by controlling total resistance and capacitance. CONSTITUTION: A trimming device includes a reference resistor(R20), a plurality of trimming resistors(R21,R22), a trimming portion(20), a plurality of registers(21,22), and a demultiplexer(23). The trimming resistors(R21,R22) are connected to the reference resistor(R20). The trimming portion(20) includes a plurality of ferroelectric transistors(TR21,TR22) which are connected in parallel to the trimming resistors(R21,R22). The ferroelectric transistors(TR21,TR22) are used for controlling the sum of values of the trimming resistors(R21,R22) and a value of the reference resistor(R20). The registers(21,22) are used for switching the ferroelectric transistors(TR21,TR22). The demultiplexer(23) is used for outputting selection signals of N bits to select one of high or low level register signals.

Abstract translation: 目的：通过控制总电阻和电容，提供了一种修整装置，以减少不必要的功耗，而不需要使用额外的保护电路。 构成：修整装置包括参考电阻器（R20），多个微调电阻器（R21，R22），修整部分（20），多个寄存器（21,22）和解复用器（23）。 微调电阻（R21，R22）连接到参考电阻（R20）。 修整部分（20）包括并联连接到微调电阻器（R21，R22）的多个铁电晶体管（TR21，TR22）。 铁电晶体管（TR21，TR22）用于控制微调电阻（R21，R22）的值和参考电阻（R20）的值之和。 寄存器（21,22）用于切换铁电晶体管（TR21，TR22）。 解复用器（23）用于输出N位的选择信号以选择高电平或低电平寄存器信号之一。

公开(公告)号：KR1020030077234A

公开(公告)日：2003-10-01

申请号：KR1020020016207

申请日：2002-03-25

Applicant: 전자부품연구원

Inventor： 박준식 ,  박효덕

IPC: G01L11/00

Abstract: PURPOSE: A device and method for measuring partial pressure of various gases are provided to precisely measure partial pressure of various gases by using a micro-sized cantilever. CONSTITUTION: A partial pressure measuring device for various gases includes a plurality of cantilevers(30a,30b,30c,30d,30e) having a PZT capacitor, respectively. The plurality of cantilevers(30a,30b,30c,30d,30e) is connected to each other on a supporter(20). A plurality of gas detecting layers(51,52,53,54,55) are provided at each ends of the plurality of cantilevers(30a,30b,30c,30d,30e) respectively, in order to absorb various gases. The plurality of gas detecting layers(51,52,53,54,55) detects different gases respectively so that partial pressure of various gas is calculated by calculating variation of mass of the gas detecting layers(51,52,53,54,55).

Abstract translation: 目的：提供用于测量各种气体的分压的装置和方法，以通过使用微型悬臂来精确地测量各种气体的分压。 构成：用于各种气体的分压测量装置分别包括具有PZT电容器的多个悬臂（30a，30b，30c，30d，30e）。 多个悬臂（30a，30b，30c，30d，30e）在支撑件（20）上彼此连接。 为了吸收各种气体，分别在多个悬臂（30a，30b，30c，30d，30e）的各端设置多个气体检测层（51,52,53,54,55）。 多个气体检测层（51,52,53,54,55）分别检测不同气体，从而通过计算气体检测层的质量变化来计算各种气体的分压（51,52,53,54,55 ）。

公开(公告)号：KR1020030077233A

公开(公告)日：2003-10-01

申请号：KR1020020016206

申请日：2002-03-25

Applicant: 전자부품연구원

Inventor： 박효덕 ,  박준식

IPC: G01N27/12

Abstract: PURPOSE: A high-precision humidity sensor and a method for manufacturing the same are provided to precisely detect humidity by measuring variation of resonance frequency or detecting displacement of a cantilever using a PZT capacitor. CONSTITUTION: A high-precision humidity sensor includes a cantilever(70) having a PZT capacitor. The cantilever(70) is lifted and supported by a silicon substrate. A humidity detecting layer(60) is provided on the cantilever(70) so as to vary displacement of the cantilever(70) and resonance frequency. The humidity detecting layer(60) absorbs humidity so that mass of the humidity detecting layer(60) is increased, thereby detecting humidity degree. The PZT capacitor includes a lower electrode, a PZT layer, and an upper electrode. The humidity detecting layer(60) includes a porous metal oxide layer.

Abstract translation: 目的：提供高精度湿度传感器及其制造方法，通过测量谐振频率的变化或使用PZT电容器检测悬臂的位移来精确地检测湿度。 构成：高精度湿度传感器包括具有PZT电容器的悬臂（70）。 悬臂（70）由硅衬底提升和支撑。 在悬臂（70）上设置湿度检测层（60），以改变悬臂（70）的位移和共振频率。 湿度检测层（60）吸湿，使湿度检测层（60）的质量增加，从而检测湿度。 PZT电容器包括下电极，PZT层和上电极。 湿度检测层（60）包括多孔金属氧化物层。

公开(公告)号：KR100377454B1

公开(公告)日：2003-03-26

申请号：KR1020010021944

申请日：2001-04-24

Applicant: 전자부품연구원

Inventor： 박준식 ,  박효덕 ,  박광범

IPC: H01L21/30

Abstract: PURPOSE: A method for removing a sacrificial layer of a functional micro device is provided to easily manufacture a micro device having a levitation-shaped functional film by effectively removing the sacrificial layer of a silicon. CONSTITUTION: A functional film is formed on a silicon wafer(20). A protection film for protecting the functional film is formed on the functional film. The silicon wafer(20) is exposed by selectively etching the functional film. A levitation-shaped functional film is then formed by etching the exposed silicon wafer(20) using XeF2 gas. Preferably, the levitation-shaped functional film is used as a micro piezo-electric cantilever comprising a silicon oxide(21), a lower electrode(22), a piezo-electric film(23) and an upper electrode(24).

Abstract translation: 目的：提供一种去除功能微器件的牺牲层的方法，以通过有效地去除硅的牺牲层来容易地制造具有悬浮形功能膜的微器件。 构成：功能膜形成在硅晶片（20）上。 在功能膜上形成用于保护功能膜的保护膜。 通过选择性地蚀刻功能膜来暴露硅晶片（20）。 然后通过使用XeF2气体蚀刻暴露的硅晶片（20）来形成悬浮形功能膜。 优选地，悬浮形功能膜用作包括氧化硅（21），下电极（22），压电膜（23）和上电极（24）的微压电悬臂。

公开(公告)号：KR1020020082259A

公开(公告)日：2002-10-31

申请号：KR1020010021424

申请日：2001-04-20

Applicant: 전자부품연구원

Inventor： 박광범 ,  박효덕

IPC: G02B26/00

Abstract: PURPOSE: A 1xN optical switch is provided to supply selectively an optical signal transmitted through one optical fiber to one of optical fibers of N number by changing a rotating angle of a refractive plate to control an optical path. CONSTITUTION: A 1xN optical switch is formed with one input port, output ports of N number, and an optical refractive plate. The input port is formed with an input optical fiber(4) for receiving light and a parallel light lens(6) for forming incident ray(1) of the input optical fiber(4) as parallel light. The output port is formed with a focusing lens(7) for condensing the light(3) penetrating the optical refractive plate to one focus of an optical fiber core and an output optical fiber(5) for transmitting the light(3) to the outside of the 1xN optical switch. The input optical fiber(4) and the output optical fiber(5) are optical fibers of a sing mode or a multi mode. The optical refractive plate is formed with a transparent medium plate(2) and an anti-reflective layer(8). The transparent medium plate(2) has a refractive index of N.

Abstract translation: 目的：提供1xN光开关，通过改变折射板的旋转角度来控制光路，选择性地将通过一根光纤传输的光信号提供给N号光纤之一。 构成：1xN光开关形成一个输入端口，N个输出端口和一个光学折射板。 输入端口形成有用于接收光的输入光纤（4）和用于将输入光纤（4）的入射光线（1）形成为平行光的平行光透镜（6）。 输出端口形成有用于将穿透光折射板的光（3）聚光到光纤芯的一个焦点的聚焦透镜（7）和用于将光（3）传输到外部的输出光纤（5） 的1xN光开关。 输入光纤（4）和输出光纤（5）是唱模式或多模式的光纤。 光学折射板由透明介质板（2）和抗反射层（8）形成。 透明介质板（2）的折射率为N.

公开(公告)号：KR100261315B1

公开(公告)日：2000-08-01

申请号：KR1019980003077

申请日：1998-02-04

Applicant: 전자부품연구원

Inventor： 이보나 ,  박효덕 ,  김건년

IPC: H01L21/66

Abstract: PURPOSE: A signal processing circuit for a pressure sensor is provided to control an offset voltage and a span, and to compensate for an offset voltage and a temperature of the span, by constituting the signal processing circuit using ion implantation resistors with different temperature coefficients. CONSTITUTION: A pressure sensor(100) comprises resistors(RS1,RS2,RS3,RS4), and a signal processing circuit(200) two operational amplifiers(OP1,OP2) and resistors(R1,Rd,Ra,Rb,Rc,Rg,R16). Output voltages(Vin1,Vin2) of the pressure sensor are connected to non-inverting input terminals of the operational amplifiers respectively. Then, The output voltage(Vin1) indicates a voltage of a contact point between the resistor Rs2 and the resistor Rs4, and the output voltage(Vin2) indicates a voltage of a contact point between the resistor Rs1 and the resistor Rs3. One end of the resistor(R1) is connected to a power supply voltage(Vcc), and another end is connected to one end of the resistor(Rd), and another end of the resistor(Rd) is connected to the ground. A voltage(Vref) between the resistor R1 and Rd corresponds to an offset voltage, and these resistors(R1,Rd) are for controlling the offset voltage. The resistors(Ra,Rb) are for controlling a gain of the operational amplifier(OP1), and the resistors(Rc,R16) are for controlling a gain of the operational amplifier(OP2). And, the resistor(Rg) controls a span and a temperature coefficient of the span.

Abstract translation: 目的：通过使用具有不同温度系数的离子注入电阻器构成信号处理电路，提供用于压力传感器的信号处理电路，以控制偏移电压和跨度，并补偿偏移电压和温度。 构成：压力传感器（100）包括电阻器（RS1，RS2，RS3，RS4）和信号处理电路（200），两个运算放大器（OP1，OP2）和电阻器（R1，Rd，Ra，Rb，Rc，Rg ，R16）。 压力传感器的输出电压（Vin1，Vin2）分别连接到运算放大器的非反相输入端子。 然后，输出电压（Vin1）表示电阻Rs2和电阻Rs4之间的接触点的电压，输出电压（Vin2）表示电阻Rs1和电阻Rs3之间的接触点的电压。 电阻器（R1）的一端连接到电源电压（Vcc），另一端连接到电阻器（Rd）的一端，电阻器（Rd）的另一端连接到地。 电阻器R1和Rd之间的电压（Vref）对应于偏移电压，这些电阻（R1，Rd）用于控制偏移电压。 电阻（Ra，Rb）用于控制运算放大器（OP1）的增益，电阻（Rc，R16）用于控制运算放大器（OP2）的增益。 并且，电阻（Rg）控制跨度的跨度和温度系数。