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公开(公告)号：KR1020130125433A
公开(公告)日：2013-11-19
申请号：KR1020120048922
申请日：2012-05-09
Applicant: 한국기계연구원 , 이화여자대학교 산학협력단
CPC classification number: B81B3/0086 , B81B2201/0257 , B81C1/00698 , C25D1/08 , C25D3/04 , C25D3/12 , C25D3/38 , C25D3/44 , C25D3/46 , C25D3/54 , C25D3/56 , C25D5/02 , C25D5/34 , C25D7/12 , H04R19/005 , H04R19/04
Abstract: Disclosed are a micro electro mechanical system (MEMS) microphone having dual backplates and a method for manufacturing the same. An MEMS microphone according to the embodiment of the present invention comprises a substrate having a first backplate in the central part thereof; a membrane plate, arranged on the top of a first supporting unit formed in both sides on the top of the substrate, vibrating according to external sound pressure; and a second backplate arranged on the top of a second supporting unit formed in both sides on the top of the membrane plate.
Abstract translation: 公开了具有双背板的微机电系统（MEMS）麦克风及其制造方法。 根据本发明的实施例的MEMS麦克风包括在其中心部分具有第一背板的基板; 膜片，布置在基板顶部的两侧形成的第一支撑单元的顶部上，根据外部声压振动; 以及第二背板，其布置在形成在所述膜板的顶部上的两侧的第二支撑单元的顶部上。
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公开(公告)号：KR1020130092318A
公开(公告)日：2013-08-20
申请号：KR1020120013980
申请日：2012-02-10
Applicant: 한국기계연구원 , 서울대학교산학협력단 , 전북대학교산학협력단
CPC classification number: A61N1/36032 , A61N1/0541 , A61N1/36036 , H04R1/083 , H04R17/02 , H04R31/006 , H04R2430/03
Abstract: PURPOSE: An artificial cochlea device for the active feedback controlling and a method thereof are provided to copy the mechanism of an outer hair cell of the cochlea through an actuator which is driven by the sound pressure, thereby classifying and recognizing various sizes of sound by the pressure deviation. CONSTITUTION: A sensor unit senses the vibration by sound, and generates an electric signal corresponding to the size of the vibration. The sensor unit comprises a plurality of operator (230) which moves a frequency dividing unit in response to the electric signal. The operator operates the sensitivity by the size of sound or the selectivity of sound which is sensed by each frequency band. A plurality of operator is arranged separately to a plurality of base unit (216). The plurality of operator is consecutively connected along a first substrate (210) or a second substrate (212). The operator moves up and down by the electric signal which is generated in the base unit and a nanopillar (214).
Abstract translation: 目的：提供一种用于主动反馈控制的人造耳蜗装置及其方法，用于通过由声压驱动的致动器来复制耳蜗外毛细胞的机构，由此分类并识别各种尺寸的声音 压力偏差。 构成：传感器单元通过声音感知振动，并产生与振动大小相对应的电信号。 传感器单元包括响应于电信号移动分频单元的多个操作器（230）。 操作员通过声音的大小或由每个频带感测到的声音的选择性来操作灵敏度。 多个操作者分离地布置到多个基座单元（216）。 多个操作者沿着第一基板（210）或第二基板（212）连续地连接。 操作者通过在基本单元中产生的电信号和纳米柱（214）来上下移动。
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公开(公告)号：KR101118624B1
公开(公告)日：2012-03-06
申请号：KR1020110044376
申请日：2011-05-12
Applicant: 한국기계연구원
CPC classification number: H04R19/005 , H01L29/84 , H04R19/04 , H04R31/006 , H04R2201/003
Abstract: PURPOSE: An MEMS(Micro Electro Mechanical System) microphone package and a manufacturing method thereof are provided to simplify a packaging process by bonding a signal processing unit with a partial region of an upper side of a back plate substrate or a membrane substrate. CONSTITUTION: A membrane substrate(110) vibrates according to outside sound pressure. A back plate substrate(120) is combined with a part of an upper part of a membrane substrate while being separated from the membrane substrate at a constant interval. A signal processing unit(130) is combined with the other part of the upper part of the membrane substrate. A first solder part(121) bonded with the back plate substrate and a second solder part(122) welded with the signal processing unit are formed on a top part of the membrane substrate. The first solder part includes a first wet layer(121a) and a first solder(121b) which is formed on the top of the first wet layer. The second solder part includes a second wet layer(122a) and a second solder(122b) which is formed on the top of the second wet layer.
Abstract translation: 目的：提供一种MEMS（微机电系统）麦克风封装及其制造方法，以通过将信号处理单元与背板基板或膜基板的上侧的部分区域接合来简化封装处理。 构成：膜基板（110）根据外部声压振动。 背板基板（120）与膜基板的上部的一部分以一定的间隔与膜基板分离。 信号处理单元（130）与膜基板的上部的另一部分组合。 在膜基板的顶部形成有与背板基板接合的第一焊接部件（121）和与信号处理部件焊接的第二焊接部件（122）。 第一焊料部分包括形成在第一湿层的顶部上的第一湿层（121a）和第一焊料（121b）。 第二焊料部分包括第二湿层（122a）和形成在第二湿层的顶部上的第二焊料（122b）。
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Patent Agency Ranking
公开(公告)号：KR101688186B1
公开(公告)日：2016-12-20
申请号：KR1020150171114
申请日：2015-12-03
Applicant: 한국기계연구원
Abstract: 본발명은파장선택적투과및 반사기능을갖는광학필터에관한것으로, 일실시예에따르면, 투명기판; 적외선에대해반사표면을제공하기위해, 상기투명기판의상부면에형성된복수개의십자형금속패턴; 및가시광선에대해무반사또는저반사표면을제공하기위해, 상기투명기판의하부면에형성된복수개의원추형미세구조물;을포함하는파장선택적투과및 반사기능을갖는광학필터를제공한다.
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公开(公告)号：KR101658987B1
公开(公告)日：2016-09-23
申请号：KR1020140192903
申请日：2014-12-30
Applicant: 한국기계연구원
Abstract: 본발명은압전소자폴링장치에관한것으로, 진공챔버를이용한압전소자폴링장치와순환팬을이용한압전소자폴링장치로이루어진다. 먼저, 진공챔버를이용한압전소자폴링장치는챔버(100); 챔버(100)의내부에구비되어, 압전소자(A)가상단에위치되는받침부(200); 상기받침부(200)의상측에일정거리이격되어형성되고, 탐침(310)이상기압전소자(A) 방향으로돌출형성되는탐침부(300); 상기챔버(100)와연결되어, 상기챔버(100) 내부의압력을조절하는진공부(400); 및상기탐침부(300) 및받침부(200)와연결되어, 전원을인가하는전원부(500);를포함하여이루어진다. 한편, 순환팬을이용한압전소자폴링장치는챔버(100); 챔버(100)의내부에구비되어, 압전소자(A)가상단에위치되는받침부(200); 상기받침부(200)의상측에일정거리이격되어형성되고, 탐침(310)이상기압전소자(A) 방향으로돌출형성되는탐침부(300); 상기챔버(100)의상단에구비되는순환팬(600); 상기챔버(100)의하단에천공되어형성되는적어도하나이상의제1 순환공(610); 및상기탐침부(300) 및받침부(200)와연결되어, 전원을인가하는전원부(500); 를포함하여이루어진다.
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公开(公告)号：KR101622778B1
公开(公告)日：2016-05-19
申请号：KR1020140149367
申请日：2014-10-30
Applicant: 한국기계연구원
Abstract: 넓은주파수대역의소리를감지할수 있도록구조가개선된인공와우패키지에관한것이다. 인공와우패키지는하우징과, 가진막과, 인공기저막, 및파이프를포함한다. 하우징은내부에유체를저장한다. 가진막은하우징외부의소리에의해진동가능하게설치된다. 인공기저막은하우징내부에서가진막의진동에의한유체의진동을감지하여주파수대역별로구별하고, 구별된주파수를전기신호로변환하여출력한다. 파이프는하우징의외부에배치되며, 하우징의내부와연통된다.
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公开(公告)号：KR101472297B1
公开(公告)日：2014-12-12
申请号：KR1020130057711
申请日：2013-05-22
Applicant: 한국기계연구원
Abstract: 본발명은 1칩형 MEMS 마이크로폰및 그제작방법에관한것으로, 본발명의목적은종래의 1칩형 MEMS 마이크로폰의구조를개선하여부품수 및공정수 저감, 부품재질교체를통한강성강화및 비용절감, 감도및 성능향상을얻을수 있도록하는, 1칩형 MEMS 마이크로폰및 그제작방법을제공함에있다.
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公开(公告)号：KR1020140071731A
公开(公告)日：2014-06-12
申请号：KR1020120139648
申请日：2012-12-04
Applicant: 한국기계연구원
Abstract: A sensing platform using a meta-material comprises: multiple metallic patch elements; multiple metallic wire elements; and a dielectric substrate which is positioned between the multiple metallic patch elements and the multiple metallic wire elements. Therefore, the sensing platform using a meta-material according to the present invention is desirably designed such that the change in a resonant frequency is large and the bandwidth is narrow when a material on the sensing platform is changed. In addition, a label-free sensor including the sensing platform has an excellent inspecting performance.
Abstract translation: 使用超常材料的感测平台包括：多个金属贴片元件; 多种金属丝元件; 以及位于多个金属贴片元件和多个金属线元件之间的电介质基板。 因此，根据本发明的使用超常材料的传感平台最好设计成当感测平台上的材料改变时谐振频率的变化大，带宽窄。 另外，包括传感平台的无标签传感器具有出色的检测性能。
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