公开(公告)号：KR1020040009488A

公开(公告)日：2004-01-31

申请号：KR1020020043453

申请日：2002-07-24

Applicant: 한국화학연구원

Inventor： 김윤수 ,  김창균 ,  정택모 ,  오영우

IPC: C07F19/00

CPC classification number: C07F3/003 ,  C07F7/28 ,  C23C16/404 ,  C23C16/405

Abstract: PURPOSE: A metal alkoxide compound and a preparation method are provided. The compound has high solubility to general solvent such as THF, and is thus less sensitive to water, useful as a precursor for preparing an oxide thin layer containing titanium oxide, and useful as raw material of metal organic deposition(MOD). CONSTITUTION: A metal alkoxide compound is represented by the formula 1, wherein M is barium, strontium or titanium; X1 and X2 are independently RO(CH2)nO-, (RO(CH2)n)2N-, RO(CH2)nNH-, R2N- or RO-; R is C1-C4 alkyl; Y is hydrogen or C1-C4 alkyl; l is 2 or 4; m is an integer of 1 to 3; and n is 2 or 3. A method for preparing the metal alkoxide compound of the formula 1 comprises reacting barium, strontium or titanium metal precursor with an alcohol ligand compound of the formula: X¬1-(CH2)mCH(OH)(CH2)m-X¬2, wherein the titanium metal precursor is tetrachlorotitanium(IV).

Abstract translation: 目的：提供金属醇盐化合物及其制备方法。 该化合物对于一般溶剂如THF具有高溶解性，因此对水较不敏感，可用作制备含氧化钛的氧化物薄层的前体，并且可用作金属有机沉积（MOD）的原料。 构成：金属醇盐化合物由式1表示，其中M是钡，锶或钛; X1和X2独立地为RO（CH2）nO-，（RO（CH2）n）2N-，RO（CH2）nNH-，R2N-或RO-; R是C 1 -C 4烷基; Y是氢或C 1 -C 4烷基; l是2或4; m为1〜3的整数。 制备式1的金属醇盐化合物的方法包括使钡，锶或钛金属前体与下式的醇配体化合物反应：X1-1-（CH2）mCH（OH）（CH2 ）mX-2，其中钛金属前体是四氯化钛（IV）。