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1.发明公开
公开(公告)号：KR1020050019400A
公开(公告)日：2005-03-03
申请号：KR1020030057134
申请日：2003-08-19
Applicant: 한국화학연구원
IPC: C23C16/00
CPC classification number: C23C16/409 , C07F3/003 , C07F7/28 , C23C16/4485 , C23C16/56 , Y10S261/65
Abstract: PURPOSE: To provide a method for preparing stoichiometric barium strontium titanate thin films of high quality by direct liquid injection metal organic chemical vapor deposition under the milder conditions using organic complexes of Ba, Sr and Ti that are capable of being vaporized together as raw materials for mixing since they have similar thermal stability, decomposition characteristics and solubility. CONSTITUTION: In a method for preparing barium strontium titanate(BaxSr1-xTiO3) thin films by direct liquid injection metal organic chemical vapor deposition, the method is characterized in that a mixture of Ba(th)2(tmeea), Sr(thd)2(tmeea) and Ti(thd)2(O¬i Pr)2 $ûthd=2,2,6,6-tetramethylheptanedionate, tmeea=tris£2-(2-methoxyethoxy)ethyl|amine, O¬i Pr=isoproxy$ý is used as raw materials of barium, strontium and titanium, wherein the method comprises the steps of: dissolving the raw materials of barium, strontium and titanium into an organic solvent; transferring the solution to an instantaneous vaporizer heated to a temperature of 200 to 250 deg.C so that the solution is vaporized; and injecting the vaporized solution into a deposition container having pressure of 0.5 to 2.0 torr so that the vaporized solution is deposited on a matrix heated to a temperature of 300 to 500 deg.C, wherein the method further comprises a step of heat treating the deposited matrix in a temperature range of 600 to 800 deg.C, and wherein the raw materials of barium, strontium and titanium are mixed in a ratio of 1 ¢¦ 2:1:5 ¢¦ 10.
Abstract translation: 目的：提供一种通过直接液体注入金属有机化学气相沉积在较温和的条件下制备化学计量的钛酸锶钛酸盐薄膜的方法，使用能够作为原料蒸发的Ba，Sr和Ti的有机络合物 因为它们具有相似的热稳定性，分解特性和溶解度。 构成：在通过直接液体注入金属有机化学气相沉积制备钛酸锶钡（BaxSr1-xTiO3）薄膜的方法中，该方法的特征在于Ba（th）2（tmeea），Sr（thd）2 （tmeea）和Ti（thd）2（OiI Pr）2 $ûth= 2,2,6,6-四甲基庚二酮，tmeea =三（2-甲氧基乙氧基）乙基|胺，O-Pr =异丙氧基 ý用作钡，锶和钛的原料，其中所述方法包括以下步骤：将钡，锶和钛的原料溶解在有机溶剂中; 将溶液转移到加热至200〜250℃的瞬时蒸发器，使溶液蒸发; 并将蒸发的溶液注入具有0.5至2.0托的压力的沉积容器中，使得蒸发的溶液沉积在加热至300至500℃的基质上，其中该方法还包括热沉处理沉积 基质在600〜800℃的温度范围内，其中钡，锶和钛的原料以1¢| 2：1：5¢| 10的比例混合。
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2.发明公开
公开(公告)号：KR1020030002015A
公开(公告)日：2003-01-08
申请号：KR1020010038745
申请日：2001-06-30
Applicant: 한국화학연구원
IPC: C07F15/00
CPC classification number: C07F15/0046
Abstract: PURPOSE: Provided is a preparation method of a ruthenium complex with enhanced yield using a small amount of zinc catalyst, thereby mass-producing the ruthenium complex. CONSTITUTION: The preparation process characteristically comprises the steps of: reaction of ruthenium trichloride with 3-25 equivalents of 1,3-cyclohexadiene and 5-20 equivalents of zinc powder base on the chloride at room temperature for 10-15 hours; and extracting the reaction product with an organic solvent, then removing the organic acid therefrom.
Abstract translation: 目的：提供使用少量锌催化剂的钌络合物的制备方法，其具有提高的产率，从而大量生产钌络合物。 构成：制备方法特征在于包括以下步骤：在室温下将三氯化钌与3-25当量的1,3-环己二烯和5-20当量的锌粉底物在氯化物上反应10-15小时; 并用有机溶剂萃取反应产物，然后从其中除去有机酸。
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公开(公告)号：KR100532030B1
公开(公告)日：2005-12-01
申请号：KR1020030067950
申请日：2003-09-30
Applicant: 한국화학연구원
Abstract: 본 발명은 하기 화학식 1로 표시한 신규의 팔라듐 아미노알콕사이드 화합물에 관한 것으로, 본 발명에 따른 팔라듐 선구 물질은 상온에서 고체 상태로 존재하며 외부 환원제 없이 나노 크기의 팔라듐 촉매를 제조하는 데 유용하게 사용할 수 있다.
상기 식에서,
m은 1 내지 3의 정수이고,
R 및 R'은 각각 독립적으로 플루오르를 포함하거나 포함하지 않는 C
1 -C
4 의
선형 또는 분지형 알킬 기이다.-
公开(公告)号：KR100523987B1
公开(公告)日：2005-10-26
申请号：KR1020030057134
申请日：2003-08-19
Applicant: 한국화학연구원
IPC: C23C16/00
Abstract: 본 발명은 직접 액체 주입 금속 유기물 화학 증착법에 의해 티탄산바륨스트론튬 박막을 제조하는 방법에 관한 것으로서, 바륨, 스트론튬 및 티타늄의 원료로서 Ba(thd)
2 (tmeea), Sr(thd)
2 (tmeea) 및 Ti(thd)
2 (O
i Pr)
2 {thd = 2,2,6,6-테트라메틸헵탄디오네이트, tmeea = 트리스[2-(2-메톡시에톡시)에틸]아민, O
i Pr = 이소프로폭시} 각각을 혼합하여 사용하는 것을 특징으로 하는 본 발명의 방법에 의하면, 고품위의 화학량론적 티탄산바륨스트론튬 박막을 보다 온화한 조건에서 제조할 수 있다.-
公开(公告)号：KR1020050031706A
公开(公告)日：2005-04-06
申请号：KR1020030067950
申请日：2003-09-30
Applicant: 한국화학연구원
CPC classification number: B01J37/088 , B01J23/44 , B82Y30/00
Abstract: Provided are a palladium aminoalkoxide compound in a solid state at room temperature and a process for preparation of palladium nano-catalyst using the same without external reduction agent to exhibit extremely high volatility and thermal stability and high catalytic activity in organic synthesis applications. The palladium(II) aminoalkoxide compound or hydrate thereof represented by following formula 1, wherein m is an integer of 1 to 3; R and R' include fluorine or not and are linear or branched alkyl groups having C1-C4. The compound is prepared reacting any one of bis(acetonitril)dihalogenated palladium(II) compound and alkali metal salt of aminoalkoxide, or halogenated palladium(II) compound and alkali metal salt of aminoalkoxide. The process for preparing palladium nano-particles comprises thermally decomposing the palladim(II) aminoalkoxide compound or hydrate thereof at 100 to 300 deg.C under an organic compound containing an electron donor element.
Abstract translation: 提供在室温下为固态的钯氨基烷氧化物化合物和使用其而没有外部还原剂的钯纳米催化剂的制备方法，在有机合成应用中表现出非常高的挥发性和热稳定性以及高催化活性。 由下式1表示的其中m为1至3的整数的氨基醇化合物（II）或其水合物; R和R'包括不是氟，并且是具有C 1 -C 4的直链或支链烷基。 制备化合物，使二（乙腈）二卤化钯（II）化合物和氨基烷氧化物的碱金属盐或卤化钯（II）化合物和氨基烷氧化物的碱金属盐中的任何一种反应制备。 制备钯纳米颗粒的方法包括在含有电子给体元素的有机化合物下在100至300℃下热分解帕拉米德（II）氨基烷氧基化合物或其水合物。
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Patent Agency Ranking
公开(公告)号：KR1020040074754A
公开(公告)日：2004-08-26
申请号：KR1020030010148
申请日：2003-02-18
Applicant: 한국화학연구원
IPC: C07F7/00
CPC classification number: C07F7/006 , C23C16/405 , C23C16/409 , C23C16/45525
Abstract: PURPOSE: A precursor of zirconium dioxide, a preparation method thereof and a method for forming thin film using the same are provided, which zirconium dioxide precursor has thermal stability and improved volatility, so that high quality of zirconium thin film can be formed. CONSTITUTION: The precursor of zirconium dioxide represented by formula (1) is provided, wherein R is C1-4 alkyl optionally containing fluor; and R' is C1-4 alkyl optionally containing fluor or SiR'3. The method for preparing the precursor of zirconium dioxide of formula (1) comprises reacting zirconium complex of formula (2) with alkali metal salt of alcohol of formula (3), wherein X is chlorine, bromine or iodine; and M is Li, Na or K. The method for preparing the precursor of zirconium dioxide of formula (1) comprises reacting zirconium complex of formula (2) with alcohol of formula (4) in the presence of tertiary amine. The method for forming thin film comprises carrying out MOCVD system(Metal-Organic Chemical Vapor Deposition Systems) or ALD(atomic layer deposition) using the precursor of zirconium dioxide of formula (1).
Abstract translation: 目的：提供二氧化锆的前体，其制备方法和使用其制备薄膜的方法，其中二氧化锆前体具有热稳定性和改善的挥发性，从而可以形成高质量的锆薄膜。 构成：提供由式（1）表示的二氧化锆的前体，其中R是任选含氟的C 1-4烷基; 并且R'是任选地含有氟或SiR'3的C 1-4烷基。 制备式（1）二氧化锆前体的方法包括使式（2）的锆络合物与式（3）的醇的碱金属盐反应，其中X是氯，溴或碘; M是Li，Na或K.制备式（1）二氧化锆前体的方法包括在叔胺存在下使式（2）的锆络合物与式（4）的醇反应。 形成薄膜的方法包括使用式（1）的二氧化锆前体进行MOCVD系统（金属有机化学气相沉积系统）或ALD（原子层沉积）。
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公开(公告)号：KR1020030002011A
公开(公告)日：2003-01-08
申请号：KR1020010038740
申请日：2001-06-30
Applicant: 한국화학연구원
IPC: C07F3/00
CPC classification number: C07F3/00 , C23C16/404
Abstract: PURPOSE: Provided is an organic alkali earth metal complex with thermal stability and good vaporization for formation of metal oxide composite films. The resultant complex is adapted to the production of semiconductors, photoelectrics and piezoelectrics. CONSTITUTION: The complex of organic alkali earth metals, L-M-L', is prepared by adding alcohol to organic solution containing alkali earth metal, expressed by the formula MX + xs HOR -->£M(OR)2|n, followed by mixing with chelate ligands L and L', expressed by the formula £M(OR)2|n + L + L' -->L-M-L', where M is Ba, Sr or Ca, L is R(CH3)CH(OH) (CH2)nCH(OH)(CH3)R'(R and R' are C1-C10 alkyl group, and n is an integer of 1-5), L' is N(CH2CH2XCH2CH2YZ)3(X and Y are O or NH, and Z is C1-C10 alkyl group).
Abstract translation: 目的：提供一种有机碱土金属络合物，具有热稳定性和良好的蒸发性，用于形成金属氧化物复合膜。 所得的复合物适用于制造半导体，光电和压电体。 构成：通过向含有碱土金属的有机溶液中加入醇制备有机碱土金属的混合物，由式MX + xs HOR→M（OR）2 | n表示，然后加入 与螯合配体L和L'混合，由式M M（OR）2 | n + L + L'→LM-L'表示，其中M是Ba，Sr或Ca，L是R（CH 3）CH （OH）（CH2）nCH（OH）（CH3）R'（R和R'是C1-C10烷基，n是1-5的整数），L'是N（CH2CH2XCH2CH2YZ）3（X和Y 是O或NH，Z是C 1 -C 10烷基）。
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公开(公告)号：KR100497314B1
公开(公告)日：2005-06-23
申请号：KR1020020043453
申请日：2002-07-24
Applicant: 한국화학연구원
IPC: C07F19/00
Abstract: 본 발명은 하기 화학식 1로 표시되는 신규한 금속 알콕사이드 화합물과 그 제조 방법에 관한 것이다.
상기 식중, M은 바륨, 스트론튬 또는 티타늄이고 X
1 및 X
2 는 각각 RO(CH
2 )
n O-, (RO(CH
2 )
n )
2 N-, RO(CH
2 )
n NH-, R
2 N- 또는 RO- 이며, R은 C
1 -C
4 알킬, Y는 수소 또는 C
1 -C
4 알킬이며,
l 은 2 또는 4, m은 1 내지 3의 정수, n은 2 또는 3이다.-
公开(公告)号：KR100544353B1
公开(公告)日：2006-01-23
申请号：KR1020030010148
申请日：2003-02-18
Applicant: 한국화학연구원
IPC: C07F7/00
Abstract: 본 발명은 하기 화학식 1로 표시되는 지르코늄 산화물 전구체에 관한 것으로, 상기 지르코늄 산화물 전구체는 열적으로 안정되고 휘발성이 향상되어 양질의 지르코늄 산화막을 형성할 수 있다:
상기 식에서,
R은 플루오르를 포함하거나 포함하지 않는 C
1-4 의 알킬기이고, R'은 플루오르를 포함하거나 포함하지 않는 C
1-4 의 알킬기 또는 SiR"
3 (여기서, R"은 C
1-4 의 알킬기임)이다.-
公开(公告)号：KR100464810B1
公开(公告)日：2005-01-05
申请号：KR1020010038740
申请日：2001-06-30
Applicant: 한국화학연구원
IPC: C07F3/00
Abstract: PURPOSE: Provided is an organic alkali earth metal complex with thermal stability and good vaporization for formation of metal oxide composite films. The resultant complex is adapted to the production of semiconductors, photoelectrics and piezoelectrics. CONSTITUTION: The complex of organic alkali earth metals, L-M-L', is prepared by adding alcohol to organic solution containing alkali earth metal, expressed by the formula MX + xs HOR -->£M(OR)2|n, followed by mixing with chelate ligands L and L', expressed by the formula £M(OR)2|n + L + L' -->L-M-L', where M is Ba, Sr or Ca, L is R(CH3)CH(OH) (CH2)nCH(OH)(CH3)R'(R and R' are C1-C10 alkyl group, and n is an integer of 1-5), L' is N(CH2CH2XCH2CH2YZ)3(X and Y are O or NH, and Z is C1-C10 alkyl group).
Abstract translation: 用途：提供一种有机碱土金属配合物，具有热稳定性和良好的气化性，用于形成金属氧化物复合膜。 最终的复合体适用于半导体，光电和压电的生产。 构成：有机碱土金属络合物LM-L'通过向含有碱土金属的有机溶液中加入醇制备，由式MX + xs HOR→M（OR）2 n表示， 随后与由式M（OR）2 | n + L + L'→LM-L'表示的螯合配体L和L'混合，其中M是Ba，Sr或Ca，L是R （CH 3）CH（OH）（CH 2）NCH（OH）（CH 3）R '（R和R' 为C1-C10烷基，且n是1-5的整数），L”是N（CH2CH2XCH2CH2YZ）3 （X和Y是O或NH，Z是C 1 -C 10烷基）。
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