公开(公告)号：JPS6289483A

公开(公告)日：1987-04-23

申请号：JP22637285

申请日：1985-10-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： TOKUMOTO HIROSHI ,  BANDO HIROSHI ,  OKAYAMA SHIGEO ,  KAJIMURA KOJI

IPC: H01L41/09

Abstract: PURPOSE:To control fine movements of two shafts as completely independent systems by providing piezoelectric drivers in two perpendicular axial directions, and correcting the influence of displacement due to other drivers from the drivers independently. CONSTITUTION:Piezoelectric drivers 13, 14 are provided in two perpendicular axial directions of a driving member 10. The individual drivers 13, 14 are driven independently by the outputs of X-direction driving voltage generator 17 and Y-direction driving voltage generator 18 in two directions. The generators 17, 18 are connected by a correcting circuit 21 to correct the influence of the displacement due to other drivers at the time of driving one driver.

公开(公告)号：JPH05334979A

公开(公告)日：1993-12-17

申请号：JP14060092

申请日：1992-06-01

Applicant: AGENCY IND SCIENCE TECHN ,  NIPPON DENSHI TECH KK ,  JEOL LTD

Inventor： OKAYAMA SHIGEO ,  ITO TADASHI

IPC: H01J37/12 ,  H01J37/143 ,  H01J37/15

Abstract: PURPOSE:To provide a charged beam structure which provides an alignment in which electrodes have high accuracy in both their positions along the optical axis direction and their degree of concentricity. CONSTITUTION:Open electrodes 31-35 are disposed inside a housing 50 having a cylindrical inner surface. A through shaft 46 for regulating rotation of each four-pole electrode 51-54 relative to each other and open electrodes 31-35 are provided. First spacers 36-39, each of which is so manufactured to have high accuracy in the parallelism between its upper and lower surfaces, are disposed among the open electrodes 31-35 so that the axial position of each open electrode 31-35 is regulated. A second ball-shaped spacer 44 made of ceramics and positioned in a predetermined position by a third spacer 59 is disposed between the open electrode 35 and the housing 50 and the open electrode 35 has its axis adjusted relative to the housing with high accuracy and independently of its axial position.

公开(公告)号：JPH01233304A

公开(公告)日：1989-09-19

申请号：JP6128388

申请日：1988-03-15

Applicant: AGENCY IND SCIENCE TECHN ,  SEIKO INSTR & ELECTRONICS

Inventor： BANDO HIROSHI ,  MIZUTANI WATARU ,  OKAYAMA SHIGEO ,  ISHIHARA KENICHIRO

IPC: G01B7/34 ,  G01N23/00 ,  H01J37/28 ,  H02N2/00

Abstract: PURPOSE:To shift an in-plane scanning range accurately by a method wherein an in-plane shift signal for shifting the inner-surface scanning range is added to an in-plane scanning signal for driving an in-plane scanning mechanism using a piezoelectric element. CONSTITUTION:When an in-plane scanning range 13 on the surface of a sample 1 is shifted, an in-plane shift signal generating means 9 is operated to generate an in-plane shift signal 11, which is given to an adder 10. An addition signal 12 of the in-plane shift signal 11 and an in-plane scanning signal 7 is outputted from the adder 10. This addition signal 12 is impressed on an in-plane scanning mechanism 3, and thereby a probe 2 fitted to the in-plane scanning mechanism moves in accordance with the inner-surface scanning signal 7 and the in-plane shift signal 11. The in-plane scanning range 13 obtained when the in-plane shift signal 11 is not generated can be shifted to in-plane scanning ranges 14, 15 and 16, for instance, by generating in-plane shift signals 11 of certain voltages corresponding to necessary shift amounts 17, 18 and 19 by the in-plane shift signal generator 9.

公开(公告)号：JPH01169304A

公开(公告)日：1989-07-04

申请号：JP26061287

申请日：1987-10-15

Applicant: AGENCY IND SCIENCE TECHN ,  KOSAKA LAB ,  SEIKO INSTR & ELECTRONICS

Inventor： OKAYAMA SHIGEO ,  TOKUMOTO HIROSHI ,  BANDO HIROSHI ,  MIZUTANI WATARU ,  SHIMURA MASAYUKI ,  NAKAGAWA HARUKI ,  SHIGENO MASAJI ,  WATANABE KAZUTOSHI

IPC: G01B7/34 ,  G01N23/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/06 ,  G01Q60/10 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

Abstract: PURPOSE:To move a detecting probe safely at a high speed, when the detecting probe is moved from a measuring point to the next measuring point, by withdrawing the detecting probe by a distance longer the irregularities of the surface of a material to be measured once. CONSTITUTION:A detecting probe 1 is brought close to a material to be measured 2 at a measured point A2. Measurement is performed in the state a tunnel current flows between the detecting probe 1 and the material to be measured 2. When the detecting probe 1 is moved to a next measuring point B2, at first the detecting probe 1 is once withdrawn by a distance sufficiently longer than the irregularities of the surface of the material to be measured 2. The detecting probe 1 is brought close to the material to be measured 2 on the measuring point B2. Then measurement is performed. This procedure is repeated. In this way, the detecting probe 1 does not hit the material to be measured. The measurement can be performed safely even if the probe is moved at a high speed.

公开(公告)号：JPH06283124A

公开(公告)日：1994-10-07

申请号：JP9079293

申请日：1993-03-25

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSURO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: PURPOSE:To keep chambers having different degrees of vacuum at the desired degrees of vacuum and drive a structure having a high function by forming a gap made of a concentric plane between a sample chamber and a vacuum chamber. CONSTITUTION:When the diameter of the sample moving shaft of an actuator 45 is set to 20mm and the driving range of a sample moving mechanism 51 is set to + or -1 inch in the X, Y-axis directions, the fine gap between an opening flange 43 and a moving mechanism flange 56 can be adjusted by about 0.15mm. When the width of the gap is set to 10mm, the exhaust conductance of this portion becomes about C=0.33 1/sec. A sample chamber 4 can be used within the range from the ultrahigh vacuum of 10 Pa or below to the gas introduction of about 10 Pa while the degree of vacuum of a stage chamber 5 including the mechanism 51 is kept at about 4X10 Pa. A sample stage and a laser interference mirror section are heat-insulated, and they can be driven with high precision.

公开(公告)号：JPS62119847A

公开(公告)日：1987-06-01

申请号：JP25918285

申请日：1985-11-19

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  BANDO HIROSHI ,  TOKUMOTO HIROSHI ,  KAJIMURA KOJI

IPC: H01L21/027 ,  H01J37/20 ,  H01L21/30

Abstract: PURPOSE:To make it possible to perform relative fine motion and scanning between charged beams and a sample, with high accuracy, independent of an accelerating voltage, by assembling two-dimensional or three-dimensional fine adjustment mechanism utilizing piezoelectric material and electrostriction material. CONSTITUTION:A sample holder 37 mounted on a charged beam device is formed with a two-dimensional piezoelectric driving element 43 and a driving mechanisms 45, 46 for positioning. Then, the driving element 43 is formed with a driving body 43A utilizing piezoelectric material and electrostriction material such as ceramics, for example, lead zirconate-lead titanate, or the single crystal of quartz glass. Thus, the sample 36 is held on the apex of said driving body and inserted in the vicinity of the center of an objective lens. Owing to this constitution, as the spherical aberration in an electron optics system is lowered by applying voltage to the driving body 43A, the resolution is improved. Therefore, the sample can be mounted at the optimum position and the respective fine motion and scanning between beams and the sample can be performed, independent of an accelerating voltage.