公开(公告)号：DE4408523C2

公开(公告)日：2002-11-28

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：DE4408523A1

公开(公告)日：1994-09-29

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027 ,  H01J37/30 ,  G01N27/62

Abstract: A device with a charged beam has the following features: a vacuum chamber with a motion mechanism on the inside and a sample chamber (compartment). The sample chamber used is placed in an ultrahigh vacuum atmosphere or a gas atmosphere, a flat surface being formed on that surface of the motion mechanism which points towards the sample chamber and a flange having a flat open surface being arranged between the vacuum chamber and the sample chamber such that the open surface is opposite the flat surface, and is specifically formed with a small slot between the open surface and the flat surface to permit vacuum ventilation without any restrictions being placed on the motion mechanism, as a result of which the device operates without restricting the effect of the motion mechanism.

公开(公告)号：NL194745C

公开(公告)日：2003-01-07

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

公开(公告)号：NL194745B

公开(公告)日：2002-09-02

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：JPH11125309A

公开(公告)日：1999-05-11

申请号：JP29307197

申请日：1997-10-27

Applicant: AGENCY IND SCIENCE TECHN

Inventor： HIROSHIMA HIROSHI

IPC: F16F15/04 ,  F16L27/11 ,  F16L51/02

Abstract: PROBLEM TO BE SOLVED: To provide high vibration control effect by utilizing a bellows having low stiffness even through it has a large aperture. SOLUTION: This vibration control joint is so arranged that a vacuum pump being a vibration generating source and a vacuum chamber that exhaust is executed are connected to each other under a condition that evacuation can be executed. In this case, this vibration control joint is provided with a bellows 11 whose one end side is connected to the vacuum pump, other end side is connected to the vacuum chamber and inside is made to serve as an exhaust passage 14, and a supporting device 20 which, when this bellows 11 is compressed in an extending/shrinking direction by a predetermined amount, acts against the compression in the extending/shrinking direction of this bellows 11 and also transmits to the bellows 11 vibration in a direction except for the extending/shrinking direction.

公开(公告)号：JPH11109906A

公开(公告)日：1999-04-23

申请号：JP27541497

申请日：1997-10-08

Applicant: AGENCY IND SCIENCE TECHN

Inventor： HIROSHIMA HIROSHI

IPC: G09G1/12

Abstract: PROBLEM TO BE SOLVED: To generate a precise complete roundness pattern without being limited by a used transformation element by correcting out-of-roundness errors provided in a cosine function transformation element and a sine function transformation element outputting a cosine functional value and a sine functional value outputted answering to an inputted angular signal. SOLUTION: The angular signal θ is inputted to an out-of-roundness correction circuit 26, and reads out the out-of-roundness correction value data to be converted into an analog value by a D/A converter 27. The out-of-roundness correction value data are multiplied by a radial signal corrected with radial linearity outputted from the D/A converter 29 for radial signal by an out-of- roundness correcting multiplier 30 to become an out-of-roundness correction signal. One of the out-of-roundness correction signal is outputted to an X out-of- roundness correcting adder 34, and is added to an uncorrected X coordinate value outputted by an X coordinate multiplier 31, and corrects an error to be outputted, and another one is outputted to a Y one-of-roundness correcting adder 35, and is added to an uncorrected Y coordinate value outputted by a Y coordinate multiplier 32, and corrects the error to be outputted.

公开(公告)号：JPH06283124A

公开(公告)日：1994-10-07

申请号：JP9079293

申请日：1993-03-25

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSURO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: PURPOSE:To keep chambers having different degrees of vacuum at the desired degrees of vacuum and drive a structure having a high function by forming a gap made of a concentric plane between a sample chamber and a vacuum chamber. CONSTITUTION:When the diameter of the sample moving shaft of an actuator 45 is set to 20mm and the driving range of a sample moving mechanism 51 is set to + or -1 inch in the X, Y-axis directions, the fine gap between an opening flange 43 and a moving mechanism flange 56 can be adjusted by about 0.15mm. When the width of the gap is set to 10mm, the exhaust conductance of this portion becomes about C=0.33 1/sec. A sample chamber 4 can be used within the range from the ultrahigh vacuum of 10 Pa or below to the gas introduction of about 10 Pa while the degree of vacuum of a stage chamber 5 including the mechanism 51 is kept at about 4X10 Pa. A sample stage and a laser interference mirror section are heat-insulated, and they can be driven with high precision.