公开(公告)号：DE4408523C2

公开(公告)日：2002-11-28

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：DE4408523A1

公开(公告)日：1994-09-29

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027 ,  H01J37/30 ,  G01N27/62

Abstract: A device with a charged beam has the following features: a vacuum chamber with a motion mechanism on the inside and a sample chamber (compartment). The sample chamber used is placed in an ultrahigh vacuum atmosphere or a gas atmosphere, a flat surface being formed on that surface of the motion mechanism which points towards the sample chamber and a flange having a flat open surface being arranged between the vacuum chamber and the sample chamber such that the open surface is opposite the flat surface, and is specifically formed with a small slot between the open surface and the flat surface to permit vacuum ventilation without any restrictions being placed on the motion mechanism, as a result of which the device operates without restricting the effect of the motion mechanism.

公开(公告)号：NL194745C

公开(公告)日：2003-01-07

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

公开(公告)号：NL194745B

公开(公告)日：2002-09-02

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：JPH01233303A

公开(公告)日：1989-09-19

申请号：JP6128288

申请日：1988-03-15

Applicant: AGENCY IND SCIENCE TECHN ,  SEIKO INSTR & ELECTRONICS

Inventor： BANDO HIROSHI ,  OKAYAMA SHIGEO ,  KAJIMURA KOJI ,  WATANABE KAZUTOSHI

IPC: G01B7/34 ,  G01N23/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/10 ,  G05D3/00 ,  H01J37/28

Abstract: PURPOSE:To maximize a control range of a probe position control loop for a projection and a recession on the surface of a sample in both directions of the projection and the recession, by controlling an output voltage of another control loop so that a control voltage of the control loop be about 1/2 of a control voltage range thereof. CONSTITUTION:A rough motion mechanism 5 is operated to approach a probe 1 to a sample 3 at a distance whereat a tunnel current flows between the probe 1 and the sample 3. At this time, a control loop A outputs a voltage VA for displacing a fine motion element 2 to a distance whereat a set tunnel current flows between the probe 1 and the sample 3. For controlling the fine motion element 2 so that the tunnel current flowing between the probe 1 and the sample 3 be fixed when the sample 3 is moved in the direction of (x) or (y), a control range effective for a projection and a recession of the unknown sample 3 is easy to obtain if the initial value of the voltage VA is about 1/2 of the control range of the control loop A. Therefore, a voltage VB of a control loop B is controlled so that VA be about 1/2 of an output voltage of the control loop A.

公开(公告)号：JPH05234550A

公开(公告)日：1993-09-10

申请号：JP6923192

申请日：1992-02-18

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO

IPC: H01J37/10 ,  H01J37/12 ,  H01J37/14 ,  H01J37/153

Abstract: PURPOSE:To optionally control four aberration coefficients, which control the opening aberration with a relatively weak intensity of lens excitation, by providing a means for exciting a tetrode lens and a means for applying the voltage, which controls the opening aberration for correction. CONSTITUTION:A first, a second, a third and a fourth tetrode lenses 11, 12, 1, 14, and a first, a second, a third, a fourth and a fifth opening electrodes 21, 22, 23, 24, 25 are provided. The electrode 21 is arranged in front of the lens 11, and the electrode 22 is arranged between the lens 11 and the lens 12, and the electrode 23 is arranged between the lens 12 and the lens 13, and the electrode 24 is arranged between the lens 13 and the lens 14, and the electrode 25 is arranged behind the lens 14. A means for exciting each lens so that the charging beams are collected linearly near the electrode 23 and a means for applying the voltage, which controls the opening aberration for correction with the work of an octrode lens induced by the excitation of the electrodes 21-25 are provided. The aberration coefficient can be thereby controlled freely with a relatively weak intensity of lens excitation, and especially, a lens system of 1 magnification at zero of opening aberration can be realized.

公开(公告)号：JPH02170003A

公开(公告)日：1990-06-29

申请号：JP32363688

申请日：1988-12-23

Applicant: AGENCY IND SCIENCE TECHN ,  SEIKO INSTR INC ,  KOSAKA LAB

Inventor： OKAYAMA SHIGEO ,  HONMA AKIHIKO ,  ISHIHARA KENICHIRO ,  NAKAGAWA HARUKI ,  SHIMURA MASAYUKI

IPC: G01B7/34 ,  G01N23/00 ,  H01J37/20 ,  H01J37/28

Abstract: PURPOSE:To making the direction of a voltage applied to each piezoelectric element coincident with a polarizing direction at all times and to display performance which is stable for a long period by connecting a couple of piezoelectric elements of the same kind after polarization in series with each other and applying the connection part with a driving voltage which is opposite in phase from both piezoelectric elements. CONSTITUTION:The couple of piezoelectric elements 3a and 3b are coincident in electrode direction, the polarity of driving voltage applied to the piezoelectric elements 3a and 3b is coincident with the electrode direction, and bias voltages VB of the same level are applied in a normal state to cause displacement of LB as compared with when no voltage is applied to the piezoelectric elements 3a and 3b. When a probe 1 is displaced in an X direction, voltages +DELTAV and -DELTAV which are made opposite in phase by a couple of amplifiers 6a and 6b provided in front of the connection point of the piezoelectric elements 3a and 3b are added to the bias voltages VB respectively. Consequently, the length of one piezoelectric element 3a is LB+DELTALa and the length of the other piezoelectric element 3b is LB-DELTALb, so that the probe 1 supported between both piezoelectric elements 3a and 3b is put in slow motion smoothly in the X direction.

公开(公告)号：JPH024959A

公开(公告)日：1990-01-09

申请号：JP15348688

申请日：1988-06-23

Applicant: AGENCY IND SCIENCE TECHN ,  TOSHIBA CORP

Inventor： TOKUMOTO HIROSHI ,  OKAYAMA SHIGEO ,  KOMURO MASANORI

IPC: C23C14/22 ,  C23C14/54 ,  G01Q60/10 ,  G01Q80/00 ,  H01L21/285 ,  H01L21/3205

Abstract: PURPOSE:To keep the width of the deposited metallic material constant irrespective of the shape of the tip of an electrode by alternately carrying out the control of the distance between the surface of a substrate and the electrode tip and the emission of metal atom to accurately control the distance in the title device wherein the metal atom is emitted from the electrode tip. CONSTITUTION:DC power sources 25 and 26 are connected between an electrode 21 and a substrate 12 through a transfer switch 24, one of the power sources 25 and 26 is selected by the changeover of the switch 24, and a voltage is impressed between the electrode and substrate. The power source 25 is used to emit metal atom from the tip of the electrode 21, and the power source 26 is used to detect the tunnel current between the electrode 21 and the substrate 12. An amperemeter 27 is connected to the power source 26 in series to detect the tunnel current, and the detected tunnel current is supplied to a driving power source 23, a fine adjustment mechanism 22 is adjusted to keep the tunnel current constant, and the distance between the electrode tip and the substrate surface is kept constant.

公开(公告)号：JPS61219549A

公开(公告)日：1986-09-29

申请号：JP6045185

申请日：1985-03-25

Applicant: AGENCY IND SCIENCE TECHN

Inventor： TOKUMOTO HIROSHI ,  BANDO HIROSHI ,  OKAYAMA SHIGEO ,  KAJIMURA KOJI

IPC: G01N37/00 ,  B23Q1/34 ,  B23Q5/28 ,  G01B7/34 ,  G01B21/00 ,  G01N1/32 ,  G01N23/00 ,  G01Q10/04 ,  G02B21/32 ,  H01J37/20 ,  H02N2/00

Abstract: PURPOSE:To provide an accurate and high-reliable device, by a method wherein piezo-electric driving parts are located in direction of three axes which cross each other at right angles, the driving parts are individually driven in three directions, and the influence by displacement exercised by the one driving during driving of the other driving part is corrected. CONSTITUTION:Action, by which only deviation in a direction X is produced, is such that, when a driving signal is applied on an input terminal 22 and a driving voltage in a direction X from a driving voltage generating circuit 19 is applied on an electrode 13A, a piezo-electric driving part 13 is stretched and shrunk mainly in the direction X. In which case, in order to erase and correct displacement in directions Y and Z, the output waveshape of the circuit 19 is fed to a correcting circuit 25, and is fed through signal lines 26Y and 26Z to direction Y and direction Z driving voltage generating circuits 20 and 21. Further, a correcting voltage is applied through signal lines 20A and 21A to electrodes 14A and 15A for correction action. In case displacement in the directions Y and Z is produced, driving parts can also be independently driven in a similar manner described above. This constitution produced a vibration removing effect on external vibration.

公开(公告)号：JPH0281487A

公开(公告)日：1990-03-22

申请号：JP23293088

申请日：1988-09-16

Applicant: AGENCY IND SCIENCE TECHN ,  KOSAKA LAB ,  SEIKO INSTR INC

Inventor： OKAYAMA SHIGEO ,  TOKUMOTO HIROSHI ,  NAKAGAWA HARUKI ,  OMURA KENJI ,  WAKIYAMA SHIGERU ,  WATANABE KAZUTOSHI

IPC: G01B7/34 ,  B82B3/00 ,  G01N23/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q60/10 ,  H01J37/28 ,  H01L41/09

Abstract: PURPOSE:To drive a fine adjustment mechanism of a scanning tunneling microscope or the line highly accurately and in a multistage manner by a method wherein operating electrodes of two sets or more per axis are installed at a piezoelectric drive member which has been formed to be hollow-shaped and has a plurality of an operation electrodes at their outside and inside. CONSTITUTION:A hollow cylindrical piezoelectric drive member is composed of a piezoelectric material PZT; electrodes 7a, 7b are installed so as to be operated in a z-axis direction in two stages; electrodes 8a, 8b, 9a, 9b are installed for operations in x and y directions. When a positive or negative voltage is applied to the z-axis operating electrodes 7a and 7b, the electrodes are displaced in a thickness direction and a displacement in two stages are caused in the z-axis direction. For the x- and y-axis directions, a positive voltage is applied to one of the opposite electrodes and a negative voltage is applied to the other. The piezoelectric drive member is tilted as a whole; a displacement is caused in the x- and y-axis directions.