公开(公告)号：DE102007050873B4

公开(公告)日：2012-03-01

申请号：DE102007050873

申请日：2007-10-24

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY ,  YIN HONGFENG

IPC: B81C1/00 ,  B01L99/00

Abstract: Verfahren zum Erzeugen einer integrierten HPLC-Säule oder gaschromatographischen Kapillarsäule in einem Titansubstrat (120), das folgende Schritte aufweist: Abscheiden einer Hartmaskenschicht (415) auf dem Titansubstrat (120); Aufbringen einer Fotoresistschicht (420) auf die Hartmaskenschicht (415); Strukturieren der Fotoresistschicht (420); Durchführen einer RIE-Ätzung auf der maskierten Hartmaskenschicht (415), um eine in Form der integrierten HPLC-Säule oder gaschromatographischen Kapillarsäule strukturierte Hartmaske zu bilden, wobei die Form gebogene Abschnitte umfasst; Entfernen der strukturierten Fotoresistschicht (420); Ätzen der integrierten HPLC-Säule oder gaschromatographischen Kapillarsäule durch die Hartmaske und in, aber nicht durch das Titansubstrat (120) unter Verwendung einer DRIE-Ätzung; Bereitstellen einer Titanlage (110); und Anbringen der Titanlage (110) an dem Titansubstrat (120) unter Verwendung einer Diffusionsverbindung.

公开(公告)号：GB2446254B8

公开(公告)日：2011-11-23

申请号：GB0800269

申请日：2008-01-08

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY ,  KRAICZEK KARSTEN G ,  BRENNEN REID A

IPC: B81C1/00 ,  B82B3/00 ,  G01N30/60

Abstract: In some embodiments of the present invention, the buried silicon oxide technology is employed in the fabrication of fluid channels, particularly nanochannels. For example, a fluid channel can be made in a buried silicon oxide layer by etching the buried oxide layer with a method that selectively removes silicon oxide but not silicon. Thus, one dimension of the resulting fluid channel is limited by the thickness of the buried oxide layer. It is possible to manufacture a very thin buried oxide layer with great precision, thus a nanochannel can be fabricated in a controlled manner. Moreover, in addition to buried oxide, any pairs of substances with a high etch ratio with respect to each other can be used in the same way. Further provided are the fluid channels, apparatuses, devices and systems comprising the fluid channels, and uses thereof.

公开(公告)号：DE602006004814D1

公开(公告)日：2009-03-05

申请号：DE602006004814

申请日：2006-07-13

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY

IPC: H01H29/06

Abstract: A liquid metal switch (300) uses a conductive liquid droplet (310) of a material containi

公开(公告)号：WO2006093587A2

公开(公告)日：2006-09-08

申请号：PCT/US2006002268

申请日：2006-01-19

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY

CPC classification number: H01H1/0036 ,  H01H29/28 ,  H01H61/00 ,  H01H2029/008 ,  H01H2061/006

Abstract: A switch (100) comprises an input contact (121) and at least one output contact (122), a single droplet (130) of conductive liquid located in a channel (120), the droplet (130) being in constant contact with the input contact (121), and a heater (104) configured to heat a gas (135). The heated gas expands to cause the droplet (130) to translate through the channel (120).

Abstract translation: 开关（100）包括输入触点（121）和至少一个输出触点（122），位于通道（120）中的导电液体的单个液滴（130），液滴（130）与 输入触点（121）和被配置为加热气体（135）的加热器（104）。 加热的气体膨胀以使液滴（130）通过通道（120）平移。

公开(公告)号：EP1829074A4

公开(公告)日：2009-05-06

申请号：EP05851853

申请日：2005-11-18

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY

IPC: H01H29/00

CPC classification number: H01H29/00 ,  H01H1/0036 ,  H01H2029/008

Abstract: An electronic switch (300) comprises a droplet (310) of conductive liquid located in contact with a surface (312) having an alterable surface configuration, an input contact (324) located on the alterable surface and configured such that the input contact (324) is in constant electrical contact with the droplet (310), and a micro-electronic mechanical system (MEMS) (304) for altering the surface configuration to change the contact angle of the droplet (310) with respect to the surface (312).

公开(公告)号：EP1827834A4

公开(公告)日：2008-09-24

申请号：EP05825105

申请日：2005-11-18

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY ,  AIMI MARCO

IPC: B41J2/14

CPC classification number: B01L3/0262 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2400/0487 ,  B81B1/004 ,  B81B2201/057 ,  B81B2201/058 ,  B81B2203/0353 ,  H01H11/02 ,  H01H2029/008 ,  Y10T428/24273 ,  Y10T428/2902