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公开(公告)号：JP2007115691A
公开(公告)日：2007-05-10
申请号：JP2006284968
申请日：2006-10-19
Inventor： BEERLING TIMOTHY
CPC classification number: H01H29/06 , H01H29/28 , H01H2029/008
Abstract: PROBLEM TO BE SOLVED: To improve disadvantages in switching technology, and inhibit oxide formation to limit switching performance.
SOLUTION: As a replacement for mercury, a liquid metal switch (300) utilizing a droplet (310) of conductive liquid composed of a material containing gallium is provided. By a secondary fluid (313) surrounding the material containing gallium, oxide formation on the surface of the droplet (310) of the conductive liquid is inhibited.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：为了改善开关技术的缺点，并且抑制氧化物形成以限制开关性能。 解决方案：作为汞的替代物，提供了利用由包含镓的材料组成的导电液体的液滴（310）的液态金属开关（300）。 通过围绕含有镓的材料的二次流体（313），导电液体的液滴（310）的表面上的氧化物形成被抑制。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007142405A
公开(公告)日：2007-06-07
申请号：JP2006305268
申请日：2006-11-10
Inventor： BEERLING TIMOTHY
CPC classification number: H01F17/0006 , H01F21/005 , H01F21/04 , H01F41/041 , H01L23/5227 , H01L27/08 , H01L28/10 , H01L2924/0002 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To provide a planar inductor which can be used with various micro switches including a liquid metal micro switch.
SOLUTION: The planar inductor of the present invention comprises a device substrate (150, 160), an inductor channel (105) which: is at least partially demarcated by a part of the device substrate; has at least one substantially spiral shape; and includes a plurality of channel segments substantially parallel to one another, and a liquid conductor (110) disposed in the inductor channel.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种平面电感器，其可以与包括液态金属微动开关的各种微动开关一起使用。 本发明的平面电感器包括器件衬底（150,160），电感器通道（105），其被器件衬底的一部分至少部分划分; 具有至少一个基本上螺旋形的形状; 并且包括彼此大致平行的多个通道段，以及设置在电感通道中的液体导体（110）。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007103363A
公开(公告)日：2007-04-19
申请号：JP2006264291
申请日：2006-09-28
Inventor： BEERLING TIMOTHY , ROSENAU STEVEN A
CPC classification number: H01H29/00 , H01H47/004 , H01H59/0009 , H01H2029/008
Abstract: PROBLEM TO BE SOLVED: To provide a three-step liquid metal switch with high reliability with respect to a liquid metal switch. SOLUTION: The three-step liquid metal switch of one embodiment of this device using an electrowetting (EWOD) on a dielectric is provided with a common EWOD switch 1310 having an input port 1302, a first common switch output 1336, and a second common EWOD switch output 1338, a first EWOD switch 1340 having a first EWOD switch input 1343, a first output port 1304, and a first EWOD switch output 1368, and a second EWOD switch 1370 having a second EWOD switch input 1373, a second output port 1306, and a second EWOD switch output 1398. The first common EWOD switch output 1336 is connected to the first EWOD switch input 1343 capable of operation and the second common EWOD switch output 1338 is connected to the second EWOD switch input 1373 capable of operation. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供一种相对于液态金属开关具有高可靠性的三步液态金属开关。 解决方案：使用在电介质上的电润湿（EWOD）的该装置的一个实施例的三步液态金属开关设置有共同的EWOD开关1310，其具有输入端口1302，第一公共开关输出1336和 第二公共EWOD开关输出1338，具有第一EWOD开关输入1343，第一输出端口1304和第一EWOD开关输出1368的第一EWOD开关1340和具有第二EWOD开关输入1373的第二EWOD开关1370， 输出端口1306和第二EWOD开关输出1398.第一公共EWOD开关输出1336连接到能够操作的第一EWOD开关输入1343，第二公共EWOD开关输出1338连接到能够 操作。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：GB2446254A
公开(公告)日：2008-08-06
申请号：GB0800269
申请日：2008-01-08
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY , KRAICZEK KARSTEN G , BRENNAN REID A
Abstract: The apparatus. e.g. a chromatograph, has a buried silicon oxide layer 104, e.g. between two silicon layers 102, 106, with at least one fluid channel, particularly a nanochannel. The channel can be made in the buried layer 104 by an etching method that selectively removes silicon oxide but not silicon. Thus, one dimension of the resulting fluid channel is limited by the thickness of the buried oxide layer 104. It is possible to manufacture a very thin buried oxide layer 104 with great precision, thus a nanochannel can be fabricated in a controlled manner. Moreover, in addition to buried oxide, any pairs of substances with a high etch ratio with respect to each other can be used in the same way.
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公开(公告)号：GB2446254B
公开(公告)日：2011-09-07
申请号：GB0800269
申请日：2008-01-08
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY , KRAICZEK KARSTEN G , BRENNEN REID A
Abstract: In some embodiments of the present invention, the buried silicon oxide technology is employed in the fabrication of fluid channels, particularly nanochannels. For example, a fluid channel can be made in a buried silicon oxide layer by etching the buried oxide layer with a method that selectively removes silicon oxide but not silicon. Thus, one dimension of the resulting fluid channel is limited by the thickness of the buried oxide layer. It is possible to manufacture a very thin buried oxide layer with great precision, thus a nanochannel can be fabricated in a controlled manner. Moreover, in addition to buried oxide, any pairs of substances with a high etch ratio with respect to each other can be used in the same way. Further provided are the fluid channels, apparatuses, devices and systems comprising the fluid channels, and uses thereof.
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Patent Agency Ranking
公开(公告)号：DE102007050873A1
公开(公告)日：2008-05-08
申请号：DE102007050873
申请日：2007-10-24
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY , YIN HONGFENG
Abstract: The method involves precipitating a hard mask on a titanium substrate, masking the hard mask with a photoresist layer, and structuring the photo resist layer. A reactive ion etching (RIE) is implemented on the masked hard layer to structure a micro fluidic structure on the hard mask. The structured photo resist layer is removed, and the micro fluidic structure is etched in the hard masked titanium substrate under utilization of a deep reactive ion etching (DRIE) e.g. chlorine-based DRIE etching and a chlorine-boron-trichloride-mixture-based DRIE etching.
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7.发明申请LIQUID METAL SWITCH EMPLOYING MICRO-ELECTROMECHANICAL SYSTEM (MEMS) STRUCTURES FOR ACTUATION 审中-公开液化金属开关采用微机电系统（MEMS）结构来实现
公开(公告)号：WO2006068744A2
公开(公告)日：2006-06-29
申请号：PCT/US2005041929
申请日：2005-11-18
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY
IPC: H01H29/00
CPC classification number: H01H29/00 , H01H1/0036 , H01H2029/008
Abstract: An electronic switch (300) comprises a droplet (310) of conductive liquid located in contact with a surface (312) having an alterable surface configuration, an input contact (324) located on the alterable surface and configured such that the input contact (324) is in constant electrical contact with the droplet (310), and a micro-electronic mechanical system (MEMS) (304) for altering the surface configuration to change the contact angle of the droplet (310) with respect to the surface (312).
Abstract translation: 电子开关（300）包括位于与具有可变表面构造的表面（312）接触的导电液体的液滴（310），位于可变表面上的输入触点（324），并且构造成使得输入触点 ）与微滴（310）恒定电接触，以及用于改变表面构型以改变液滴（310）相对于表面（312）的接触角的微电子机械系统（MEMS）（304） 。
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公开(公告)号：DE102008005350B4
公开(公告)日：2012-03-08
申请号：DE102008005350
申请日：2008-01-21
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY , KRAICZEK KARSTEN G , BRENNEN REID A
Abstract: Verfahren zum Herstellen einer mikrofluidischen Vorrichtung mit einem Kanal, der eine Dickenabmessung aufweist, wobei das Verfahren folgende Schritte umfasst: – Bereitstellen einer Halbleiterstruktur mit einem unter einer Siliziumschicht (102) angeordneten vergrabenen Siliziumoxidabschnitt (10schnitts die Dickenabmessung des zu erzeugenden Kanals festlegt; – Erzeugen einer Mehrzahl von Durchgangsöffnungen (108) durch die Siliziumschicht (102), wobei die Durchgangsöffnungen (108) in Richtung der Längserstreckung des zu erzeugenden Kanals beabstandet sind; und – Ätzen des Siliziumoxids des vergrabenen Siliziumoxidabschnittes, wobei die Siliziumschicht (102) als ein Ätzstopp dient, wodurch sich von den Durchgangsöffnungen (108) ausbreitende Ätzfronten zu dem Kanal vereinigen.
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公开(公告)号：DE102008005350A1
公开(公告)日：2008-08-07
申请号：DE102008005350
申请日：2008-01-21
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY , KRAICZEK KARSTEN G , BRENNEN REID A
Abstract: In some embodiments of the present invention, the buried silicon oxide technology is employed in the fabrication of fluid channels, particularly nanochannels. For example, a fluid channel can be made in a buried silicon oxide layer by etching the buried oxide layer with a method that selectively removes silicon oxide but not silicon. Thus, one dimension of the resulting fluid channel is limited by the thickness of the buried oxide layer. It is possible to manufacture a very thin buried oxide layer with great precision, thus a nanochannel can be fabricated in a controlled manner. Moreover, in addition to buried oxide, any pairs of substances with a high etch ratio with respect to each other can be used in the same way. Further provided are the fluid channels, apparatuses, devices and systems comprising the fluid channels, and uses thereof.
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10.发明申请LIQUID METAL SWITCH EMPLOYING ELECTROWETTING FOR ACTUATION AND ARCHITECTURES FOR IMPLEMENTING SAME 审中-公开液体金属开关，使用电动执行机构和结构实现相同
公开(公告)号：WO2006057780A2
公开(公告)日：2006-06-01
申请号：PCT/US2005039511
申请日：2005-10-31
Applicant: AGILENT TECHNOLOGIES INC
Inventor： BEERLING TIMOTHY
IPC: H01H29/00
CPC classification number: H01H59/0009 , H01H29/00 , H01H2001/0042 , H01H2029/008
Abstract: An electronic switch (400) comprises a substrate (402) having a surface (416) and an embedded electrode (404), a droplet (410) of conductive liquid located over the embedded electrode (404), and a power source (414) configured to create an electric circuit including the droplet (410) of conductive liquid. The surface (416) comprises a feature (482) that determines a contact angle between the surface (416) and the droplet (410).
Abstract translation: 电子开关（400）包括具有表面（416）和嵌入式电极（404）的基板（402），位于嵌入式电极（404）上的导电液滴（410）和电源（414） 被配置为产生包括导电液体的液滴（410）的电路。 表面（416）包括确定表面（416）和液滴（410）之间的接触角的特征（482）。
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