公开(公告)号：US20230033741A1

公开(公告)日：2023-02-02

申请号：US17963983

申请日：2022-10-11

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Rutger MEYER TIMMERMAN THIJSSEN ,  Ludovic GODET ,  Jinxin FU

IPC: C23C16/02 ,  C23C16/40 ,  C23C16/04

Abstract: A method and apparatus for creating a flat optical structure is disclosed. The method includes etching at least one trench in a substrate, placing a dielectric material in at least one trench in the substrate and encapsulating the top of the substrate with a film.

公开(公告)号：US20220392053A1

公开(公告)日：2022-12-08

申请号：US17753555

申请日：2020-09-14

Applicant: Applied Materials, Inc.

Inventor： Yongan XU ,  Chan Juan XING ,  Jinxin FU ,  Yifei WANG ,  Wayne MCMILLAN ,  Ludovic GODET

IPC: G06T7/00 ,  G06T7/33

Abstract: Embodiments of the present disclosure include a die system and a method of comparing alignment vectors. The die system includes a plurality of dies arranged in a desired pattern. An alignment vector, such as a die vector, can be determined from edge features of the die. The alignment vectors can be compared to other dies or die patterns in the same system. A method of comparing dies and die patterns includes comparing die vectors and/or pattern vectors. The comparison between alignment vectors allows for fixing the die patterns for the next round of processing. The methods provided allow accurate comparisons between as-deposited edge features, such that accurate stitching of dies can be achieved.

公开(公告)号：US20220291082A1

公开(公告)日：2022-09-15

申请号：US17653785

申请日：2022-03-07

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Yangyang SUN ,  Kazuya DAITO ,  Ludovic GODET

IPC: G01M11/02 ,  G01S17/89 ,  G01S7/481

Abstract: Embodiments of the present disclosure relate to measurement systems and methods of measuring efficiency of optical devices. In one example, the measurement systems include a light source, a mirror, an illumination source, and a sensor. The light source provides a light beam to the optical device to be diffracted into diffraction beams having diffraction orders. The diffractions beams form a diffraction pattern. The method includes positioning the optical device in the measurement system and directing the diffraction beams to the sensor. The sensor is operable to measure the efficiency of the optical device by measuring the diffraction pattern.

公开(公告)号：US20250102398A1

公开(公告)日：2025-03-27

申请号：US18828801

申请日：2024-09-09

Applicant: Applied Materials, Inc.

Inventor： Yongan XU ,  Chan Juan XING ,  Jinxin FU ,  Ludovic GODET

IPC: G01M11/00

Abstract: A method and apparatus for determining a line angle and a line angle rotation of a grating or line feature is disclosed. An aspect of the present disclosure involves, measuring coordinate points of a first line feature using a measurement tool, determining a first slope of the first line feature from the coordinate points, and determining a first line angle from the slope of the first line feature. This process can be repeated to find a second slope of a second line feature that is adjacent to the first line feature. The slope of the first and second line features can be compared to find a line angle rotation. The line angle rotation is compared to a design specification and a stitch quality is determined.

公开(公告)号：US20250078424A1

公开(公告)日：2025-03-06

申请号：US18812051

申请日：2024-08-22

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Sihui HE

IPC: G06T19/00 ,  G02B6/10

Abstract: Embodiments of the present disclosure generally relate to augmented reality (AR) systems. More specifically, embodiments described herein provide for an AR projection system and AR devices having the projection system. In one or more embodiments, an augmented reality device includes a projection system. The projection system includes a light engine. The light engine includes a pixel. The pixel includes an emission surface. A microlens is coupled to the emission surface of the pixel. The projection system further includes a projection lens configured to refract a first light emitted by the pixel. The first light has a first pupil length defined by a distance between a first end and a second end of the first light. The augmented reality device further includes a waveguide including an input coupler configured to incouple the first light at a first bounce length that is equivalent to the first pupil length.

公开(公告)号：US20250054171A1

公开(公告)日：2025-02-13

申请号：US18930188

申请日：2024-10-29

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Yangyang SUN ,  Ludovic GODET

IPC: G06T7/521 ,  G06T1/00

Abstract: Embodiments herein provide for a method of determining an optical device modulation transfer function (MTF). The method described herein includes projecting a first instance of an image from a light engine to a detector. The first instance of the image is analyzed to determine a first function. A first fast Fourier transform (FFT) or a first MTF of the first function is obtained. The method further includes projecting a second instance of the image from the light engine to detector via one or more optical devices. The second instance of the image is analyzed to determine a second function. A second FFT or a second MTF is obtained of the second function. An optical device MTF of the one or more optical devices is determined by comparing the first FFT and the second FFT or by comparing the first MTF and the second MTF.

公开(公告)号：US20240329322A1

公开(公告)日：2024-10-03

申请号：US18625979

申请日：2024-04-03

Applicant: Applied Materials, Inc.

Inventor： Jinyu LU ,  Ludovic Godet ,  Jinxin FU ,  Kenichi OHNO ,  Shangyi Chen ,  Takashi KURATOMI ,  Erica CHEN ,  Rami HURARNI ,  Yangyang SUN

IPC: G02B6/34 ,  C23C16/40 ,  C23C16/455

CPC classification number: G02B6/34 ,  C23C16/403 ,  C23C16/45553

Abstract: Embodiments described herein relate to improved waveguides with materials layers improving the optical properties of one or more surface regions of waveguides and methods of forming the same. In one embodiment, a waveguide is provided. The waveguide including a substrate, a grating disposed in or on the substrate, the grating comprising a plurality of structures defined by a plurality of trenches, a layer of silicon oxide or aluminum oxide disposed over the structures on the substrate. The layer is disposed over sidewalls and top surfaces of the structures, and a bottom surface of the trenches. The waveguide further includes a high index layer disposed over the layer. The high index layer is disposed over the sidewalls and the top surfaces of the structures, and the bottom surface of the trenches with the layer disposed in between the structures and the high index layer.

公开(公告)号：US20240124969A1

公开(公告)日：2024-04-18

申请号：US18537504

申请日：2023-12-12

Applicant: Applied Materials, Inc.

Inventor： Nai-Wen PI ,  Jinxin FU ,  Kang LUO ,  Ludovic GODET

IPC: C23C14/48 ,  C03C23/00 ,  C23C14/00 ,  C23C14/02 ,  C23C14/58

CPC classification number: C23C14/48 ,  C03C23/0095 ,  C23C14/0031 ,  C23C14/021 ,  C23C14/5873 ,  G02B6/10

Abstract: Embodiments described herein provide for optical devices with methods of forming optical device substrates having at least one area of increased refractive index or scratch resistance. One method includes disposing an etch material on a discrete area of an optical device substrate or an optical device layer, disposing a diffusion material in the discrete area, and removing excess diffusion material to form an optical material in the optical device substrate or the optical device layer having a refractive index greater than or equal to 2.0 or a hardness greater than or equal to 5.5 Mohs.

公开(公告)号：US20230118998A1

公开(公告)日：2023-04-20

申请号：US18045663

申请日：2022-10-11

Applicant: Applied Materials, Inc.

Inventor： Ravi KOMANDURI ,  Jinxin FU

IPC: G02B27/00 ,  G02B6/293 ,  F21V8/00 ,  G02B6/42 ,  G02B6/35

Abstract: Embodiments described herein relate to waveguide combiners having arrangements for image uniformity. The waveguide combiners includes an input coupling grating (ICG) defined by a plurality of input structures, a pupil expansion grating (PEG) defined by a plurality of expansion structures, an output coupling grating (OCG) defined by a plurality of output structures The waveguide combiners includes at least one of a pixelated phase modulator is aligned with the PEG of the first side of the waveguide combiners, at least one of a Y expander and an X expander disposed on a second side of the waveguide combiners opposing the first side, or a pupil shifting mechanism operable to shift incident beams of light between a first position and a second position of the ICG.

公开(公告)号：US20220291083A1

公开(公告)日：2022-09-15

申请号：US17692573

申请日：2022-03-11

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Kang LUO ,  Fariah HAYEE ,  Ludovic GODET

IPC: G01M11/02

Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.