公开(公告)号：US20240142339A1

公开(公告)日：2024-05-02

申请号：US18384126

申请日：2023-10-26

Applicant: Applied Materials, Inc.

Inventor： Yangyang SUN ,  Jinxin FU ,  Ravi KOMANDURI ,  Chi-Yuan YANG

IPC: G01M11/02

CPC classification number: G01M11/0257

Abstract: The present disclosure relates to metrology measurement systems, and related methods. In one or more embodiments a system, includes a substrate support, and an optical arm. The optical arm includes a light source operable to project a first beam on a first light path. The optical arm also includes a first lens, a first beam splitter, a second lens, a first detector, and an aperture. The first lens is disposed on the first light path and between the substrate support and the light source. The first beam splitter is disposed on the first light path. The first beam splitter is positioned between the substrate support and the light source. The first detector is disposed on the second light path. The second lens focuses the second beam to a second beam diameter. The aperture is disposed between the second lens and the first detector.

公开(公告)号：US20230118998A1

公开(公告)日：2023-04-20

申请号：US18045663

申请日：2022-10-11

Applicant: Applied Materials, Inc.

Inventor： Ravi KOMANDURI ,  Jinxin FU

IPC: G02B27/00 ,  G02B6/293 ,  F21V8/00 ,  G02B6/42 ,  G02B6/35

Abstract: Embodiments described herein relate to waveguide combiners having arrangements for image uniformity. The waveguide combiners includes an input coupling grating (ICG) defined by a plurality of input structures, a pupil expansion grating (PEG) defined by a plurality of expansion structures, an output coupling grating (OCG) defined by a plurality of output structures The waveguide combiners includes at least one of a pixelated phase modulator is aligned with the PEG of the first side of the waveguide combiners, at least one of a Y expander and an X expander disposed on a second side of the waveguide combiners opposing the first side, or a pupil shifting mechanism operable to shift incident beams of light between a first position and a second position of the ICG.

公开(公告)号：US20230251161A1

公开(公告)日：2023-08-10

申请号：US18163766

申请日：2023-02-02

Applicant: Applied Materials, Inc.

Inventor： Baochen WU ,  Yangyang SUN ,  Ravi KOMANDURI ,  Jinxin FU ,  Ludovic GODET

IPC: G01M11/02

CPC classification number: G01M11/0207

Abstract: Embodiments described herein relate to an optical device metrology system including a light source to emit a light and a non-polarizing beam splitter to split the light into a first photodetector light path and an optical light path. A first photodetector is disposed in the first photodetector light path and measures a total power of the light. The optical device substrate is disposed in the optical light path and splits the light into a second and a third photodetector light path. A second photodetector is disposed in the second photodetector light path from the optical device substrate. The second photodetector measures a reflected power of the light. A third photodetector is disposed in the third photodetector light path. The third photodetector measures a transmitted power of the light. The controller receives measurements from the first, second, and third photodetectors to calculate a percentage light loss within the optical device substrate.