公开(公告)号：AT343724T

公开(公告)日：2006-11-15

申请号：AT00943235

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：DE60018425T2

公开(公告)日：2006-04-06

申请号：DE60018425

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  SCHERER AXEL ,  QUAKE STEPHEN R ,  CHOU HOU-PU ,  THORSEN TODD A

IPC: F04B43/04 ,  G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：AU2866402A

公开(公告)日：2002-06-11

申请号：AU2866402

申请日：2001-11-28

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R ,  LIU JIAN ,  ADAMS MARK L ,  HANSEN CARL L

IPC: B01L3/00 ,  B01L7/00 ,  B01L9/00 ,  B67D99/00 ,  B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  C12Q1/68 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K31/126 ,  F16K99/00 ,  A61F2/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：NO20016268A

公开(公告)日：2002-02-27

申请号：NO20016268

申请日：2001-12-20

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K

CPC classification number: B29C51/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B33Y80/00 ,  B81B5/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2201/034 ,  C12Q1/6874 ,  F04B43/043 ,  F15C1/06 ,  F15C5/00 ,  F16K11/20 ,  F16K13/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2224 ,  Y10T137/87249 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24744 ,  C12Q2535/125

公开(公告)号：GB2352283A

公开(公告)日：2001-01-24

申请号：GB0015726

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K7/14 ,  F04B43/14 ,  G02B26/08

Abstract: A microfabricated structure is formed by layers 20,22 of elastomeric material having recesses or channels 23 formed in them either by moulding the layers with the recesses/channels in their surface or by incorporating a portion of photoresist material between the layers which is then removed. Between overlying layers in the region of the channels/recesses a thin membrane is formed which can be actuated so as to enter one of the channel/recess and so restrict or prevent flow in that channel/recess. A series of channels/recesses may be formed and the membranes actuated in sequence so as to provide a pumping action. The membranes may be actuated by fluid pressure in one of the channel/recess or by electrostatic or magnetic forces. The membranes may reflect light and a series of them may be provided to form a micro-mirror array. The elastomeric material may be capable of transmitting incident light enabling the invention to be applied to a refracting structure. The dimensions of the channels/recesses and the thickness of the membranes is in the micro-metre range.

公开(公告)号：CA2721172A1

公开(公告)日：2001-01-04

申请号：CA2721172

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: B81B3/00 ,  G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C1/06 ,  F15C1/22 ,  F15C3/04 ,  F15C3/16 ,  F15C5/00 ,  F16K7/00 ,  F16K7/07 ,  F16K7/17 ,  F16K7/20 ,  F16K17/02 ,  F16K99/00 ,  H01H59/00

Abstract: A microfabricated elastomeric structure comprises an elastomeric block formed with microfabricated recesses having a width less than 1000 µm therein. A portion of the elastomeric block is deflectable into one of the recesses when the portion is actuated.

公开(公告)号：AU779988B2

公开(公告)日：2005-02-24

申请号：AU5773400

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K17/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：BR0011982A

公开(公告)日：2002-09-17

申请号：BR0011982

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHUO HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K17/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：NO20016268L

公开(公告)日：2002-02-27

申请号：NO20016268

申请日：2001-12-20

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：AU5773400A

公开(公告)日：2001-01-31

申请号：AU5773400

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K17/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.