公开(公告)号：DE69224060T2

公开(公告)日：1998-05-07

申请号：DE69224060

申请日：1992-06-16

Applicant: CANON KK

Inventor： TSUJI TOSHIHIKO ,  NOSE NORIYUKI ,  YOSHII MINORU ,  MIYAZAKI KYOICHI ,  TAKEUCHI SEIJI

IPC: G01J9/02 ,  G01J9/04 ,  G01N21/88 ,  G01N21/94 ,  G03F7/20

公开(公告)号：DE69223207T2

公开(公告)日：1998-04-16

申请号：DE69223207

申请日：1992-09-24

Applicant: CANON KK

Inventor： SENTOKU KOICHI ,  MATSUMOTO TAKAHIRO ,  NOSE NORIYUKI ,  YOSHII MINORU ,  SAITOH KENJI

IPC: G03F7/20 ,  G03F9/00

Abstract: A method and device for measuring the relative displacement between first and second diffraction gratings (7,8) includes an interference optical system (2,4a,4b,10) forming first and second interference rays of light from light diffracted from the first and second diffraction gratings and separating the first and second interference rays of light on the basis of the difference in their direction of polarization, a first Detector (11a) for detecting the first interference ray of light to generate a first detection signal, a second detector (11b) for detecting the second interference ray of light to generate a second detection signal, and signal processing section (12,13) for detecting the phase difference between the first and second detection signals and for determining the relative displacement between the first and second diffraction gratings on the basis of the phase difference.

公开(公告)号：DE68928288T2

公开(公告)日：1998-01-22

申请号：DE68928288

申请日：1989-05-09

Applicant: CANON KK

Inventor： KAWAKAMI EIGO ,  YOSHII MINORU ,  UZAWA SHUNICHI

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03F9/00

公开(公告)号：DE69126800T2

公开(公告)日：1997-11-13

申请号：DE69126800

申请日：1991-01-04

Applicant: CANON KK

Inventor： TOKUMITSU JUN ,  YOSHII MINORU ,  SUDA SHIGEYUKI ,  SEKINE MASAYOSHI

IPC: G02B7/36 ,  H04N5/232

公开(公告)号：DE69125231T2

公开(公告)日：1997-08-07

申请号：DE69125231

申请日：1991-09-04

Applicant: CANON KK

Inventor： YOSHII MINORU ,  SAITOH KENJI ,  SUDA SHIGEYUKI ,  ABE NAOTO

IPC: G03F9/00 ,  H01J37/20 ,  G01B11/27 ,  H01L21/00

公开(公告)号：DE69211086T2

公开(公告)日：1996-11-14

申请号：DE69211086

申请日：1992-10-02

Applicant: CANON KK

Inventor： TAKEUCHI SEIJI ,  NISHIMURA TETSUHARU ,  YOSHII MINORU ,  NOSE HIROYASU ,  ISHIZUKA KOH

IPC: G01B9/02 ,  G01D5/38 ,  G03F9/00

公开(公告)号：DE69207657D1

公开(公告)日：1996-02-29

申请号：DE69207657

申请日：1992-07-09

Applicant: CANON KK

Inventor： MATSUMOTO TAKAHIRO ,  YOSHII MINORU ,  SAITO KENJI ,  NOSE HIROYASU ,  SENTOKU KOICHI ,  TAKEUCHI SEIJI

IPC: G01B9/02 ,  G03F9/00

公开(公告)号：DE68923018T2

公开(公告)日：1995-11-09

申请号：DE68923018

申请日：1989-02-16

Applicant: CANON KK

Inventor： OHWADA MITSUTOSHI ,  MATSUGU MASAKAZU ,  SUDA SHIGEYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  NOSE NORIYUKI ,  SAITOH KENJI ,  HASEGAWA MASANOBU

IPC: G03F9/00 ,  G03B41/00 ,  G03B27/53

公开(公告)号：DE68923018D1

公开(公告)日：1995-07-20

申请号：DE68923018

申请日：1989-02-16

Applicant: CANON KK

Inventor： OHWADA MITSUTOSHI ,  MATSUGU MASAKAZU ,  SUDA SHIGEYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  NOSE NORIYUKI ,  SAITOH KENJI ,  HASEGAWA MASANOBU

IPC: G03F9/00 ,  G03B41/00 ,  G03B27/53

公开(公告)号：GB2241780A

公开(公告)日：1991-09-11

申请号：GB9104933

申请日：1991-03-08

Applicant: CANON KK

Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  KURODA RYO

IPC: G01D5/38

Abstract: A device for measuring the relative position of two relatively moving objects includes a diffraction grating (GS) on one object and a measuring head (MH) on the other object (SR), which includes a second diffraction grating (GF1 and 2), a light source (LD) and a photo-detecting system (PD1-4). Two beams (LO1 and LO2) are projected upon two parts of the. second diffraction grating so that different diffraction orders are directed to the same point on the first diffraction grating (GS) and are thereby diffracted along a common path and mutually interfere. The photodetecting system (PD1-4) determines the position from cyclical variations in interference produced by relative movement between the two gratings. Polarising beam splitters (MK21-23) may produce beams out of phase by steps of 45 DEG . In other embodiments a single grating receives two beams at different angles produced by a double refracting prism, and a single grating splits one beam into opposite diffraction orders which are reflected back through the grating and recombined.