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    Method of manufacturing silica and titania extreme ultraviolet ray optical element
    11.
    发明专利
    Method of manufacturing silica and titania extreme ultraviolet ray optical element 审中-公开
    制造二氧化硅和钛金刚石超紫外线光学元件的方法

    公开(公告)号：JP2004131373A

    公开(公告)日：2004-04-30

    申请号：JP2003311023

    申请日：2003-09-03

    Applicant: Corning Inc ,  コーニング・インコーポレーテッド

    Inventor： HRDINA KENNETH E ,  SABIA ROBERT

    IPC: G02B1/00 ,  C03B8/02 ,  C03B19/10 ,  C03B19/12 ,  C03B20/00 ,  C03C3/06

    CPC classification number: C03C3/06 ,  C03B19/106 ,  C03B19/12 ,  C03B2201/42

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing an ultra-low thermal expansion extreme ultraviolet ray element formed from glass containing silica and titania. SOLUTION: The ultra-low thermal expansion extreme ultraviolet ray element is manufactured by a step for providing water-soluble sol containing a silica powder containing titania, a step for forming gel-like silica body containing titania from the sol, in which titania is uniformly distributed, a step for obtaining a dry silica body containing titania by drying the gel, and a step for forming a glass material by heating the dry silica body containing titania to a sufficient temperature. COPYRIGHT: (C)2004,JPO

    Abstract translation: 解决的问题：提供一种由含有二氧化硅和二氧化钛的玻璃制成的超低热膨胀极紫外线元件的制造方法。 解决方案：超低热膨胀极紫外线元件是通过提供含有二氧化钛的二氧化硅粉末的水溶性溶胶的步骤制造的，用于从溶胶中形成含有二氧化钛的凝胶状二氧化硅体的步骤，其中 二氧化钛均匀分布，通过干燥凝胶获得含有二氧化钛的干燥二氧化硅体的步骤，以及通过将含有二氧化钛的干燥二氧化硅体加热到足够的温度来形成玻璃材料的步骤。 版权所有（C）2004，JPO

    Synthetisches Kieselsäureglas und Verfahren zur Herstellung desselben
    13.
    发明专利
    Synthetisches Kieselsäureglas und Verfahren zur Herstellung desselben 未知

    公开(公告)号：DE102006043368B4

    公开(公告)日：2019-01-10

    申请号：DE102006043368

    申请日：2006-09-15

    Applicant: CORNING INC

    Inventor： HARPER BRIAN L ,  HRDINA KENNETH E ,  LASALA JOHN E

    IPC: C03C3/06 ,  C03B20/00 ,  C03C4/00 ,  C03C23/00

    Abstract: Quarzglasmaterial, das geeignet ist, im Strahlengang der lithographischen Strahlung von Lithographievorrichtungen, die bei einer Wellenlänge von unterhalb 300 nm arbeiten, verwendet zu werden, das mit molekularem Wasserstoff dotiert ist und eine durchschnittliche molekulare Wasserstoffkonzentration [H](avg) von nicht weniger als 5×10Molekülen/cmund von nicht mehr als 1×10Molekül/cm, eine maximale molekulare Wasserstoffkonzentration [H](max) und eine minimale molekulare Wasserstoffkonzentration [H](min), wobei 0,10 ≤ [H](min)/[H](max) ≤ 0,95 ist, und eine Brechungsindexvariation von 0,3 ppm oder weniger besitzt, wobei das Quarzglasmaterial eine lichtinduzierte Wellenfrontverzerrung (LIWFD) gemessen bei 633 nm von zwischen -1,0 und 1,0 nm/cm hat, wenn es 10 Milliarden Pulsen eines Lasers bei 193 nm, der bei einer Fluenz von 70 µJ/cmarbeitet, ausgesetzt wird.

    14.
    发明专利
    未知

    公开(公告)号：DE60043233D1

    公开(公告)日：2009-12-10

    申请号：DE60043233

    申请日：2000-02-17

    Applicant: CORNING INC

    Inventor： HRDINA KENNETH E ,  KAR GITIMOY ,  WIGHT JOHN F ,  YU CHUNZHE C

    IPC: B23B1/00 ,  B28B3/20 ,  B28B11/00 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B32/00 ,  C03B37/012 ,  G02B6/02

    Abstract: The present invention describes an extrusion process for manufacturing a titanium-containing silicate glass honeycomb structure, having a variety of shapes and sizes depending on its ultimate application. The titanium-containing glass honeycomb has a very low coefficient of thermal expansion (CTE) and the CTE can be varied by adjusting the titanium level to match the CTE of members that are bonded to the honeycomb. Furthermore, the inventive honeycomb structure is lightweight, yet able to support heavy loads on its end faces. Therefore, the inventive honeycomb can be advantageously used as a light-weight support for such objects as mirrors. Especially contemplated is using these inventive honeycomb supports for mirrors used in extraterresial environments where temperature extremes are present. These honeycombs can be used singularly or in aggregates to provide such support. Embodiments are described wherein the mass of the honeycomb is further reduced by removing select portions of the honeycomb without deleteriously impacting its ability for load bearing.

    Method of making a titania-doped fused silica preform
    16.
    发明专利
    Method of making a titania-doped fused silica preform 未知

    公开(公告)号：AU4581601A

    公开(公告)日：2001-12-11

    申请号：AU4581601

    申请日：2001-03-16

    Applicant: CORNING INC

    Inventor： CAIN MICHAE B ,  HRDINA KENNETH E ,  ROSPLOCK CYNTHIA K

    IPC: C03B19/14 ,  C03B37/014 ,  C03B37/018 ,  C23C16/448

    Abstract: A method of vaporizing a liquid TiO2 precursor utilized in making a titania-doped fused silica preform includes passing the liquid TiO2 precursor through a packed-bed vaporizer with a carrier gas under conditions sufficient to vaporize the TiO2 precursor without substantial thermal degradation thereof. Further, the method includes commingling the vaporized TiO2 precursor with a vaporized SiO2 precursor and delivering the mixture to a vapor utilization site to form the preform. In one embodiment of the present invention, liquid TiO2 and SiO2 precursors are contemporaneously vaporized in the vaporizer and delivered to the vaporization utilization site to form the preform.

    LIGHT WEIGHT POROUS STRUCTURE
    17.
    发明申请
    LIGHT WEIGHT POROUS STRUCTURE 审中-公开
    轻重量多孔结构

    公开(公告)号：WO0209937A8

    公开(公告)日：2002-07-04

    申请号：PCT/US0121147

    申请日：2001-07-03

    Applicant: CORNING INC

    Inventor： HRDINA KENNETH E ,  SEMPOLINSKI DANIEL R ,  WASILEWSKI MICHAEL H ,  YU CHUNZHE C

    IPC: C03B19/08 ,  C03B19/14 ,  C03C11/00 ,  B32B17/06 ,  C03B8/02 ,  C03C3/04

    CPC classification number: C03C11/007 ,  C03B19/08 ,  C03B19/14 ,  C03B19/1423 ,  C03B2201/42 ,  C03B2207/36 ,  C03B2207/62 ,  C03C11/00

    Abstract: These glass bodies are light weight porous structures such as a boules of high purity fused silica or ultra-low expansion glass. More specifically, the porous structures are supports for mirror blanks. Porous glass is made utilizing flame deposition of pure silica or doped silica in a manner similar to the production of high purity fused silica. Bubbles or seeds are formed in the glass during laydown. Several means of creating and controlling these seeds are available. The processes use incomplete combustion to create the bubbles. There are a number of different steps to create the incomplete combustion. One such step involves maintaining a short distance between the hydrolysis flame and the glass precursor.

    Abstract translation: 这些玻璃体是轻质多孔结构，例如高纯度熔融石英或超低膨胀玻璃的泡沫。 更具体地，多孔结构是用于镜面坯料的支撑件。 以与制备高纯度熔凝石英相似的方法，利用纯二氧化硅或掺杂二氧化硅的火焰沉积制造多孔玻璃。 泡沫或种子在放置期间在玻璃中形成。 创建和控制这些种子的几种手段是可用的。 这些过程使用不完全燃烧来产生气泡。 有几个不同的步骤来创建不完全燃烧。 一个这样的步骤涉及保持水解火焰和玻璃前体之间的短距离。

    TITANIUM-CONTAINING SILICA GLASS HONEYCOMB STRUCTURE FROM SILICA SOOT EXTRUSION
    20.
    发明申请
    TITANIUM-CONTAINING SILICA GLASS HONEYCOMB STRUCTURE FROM SILICA SOOT EXTRUSION 审中-公开
    含硅二氧化硅玻璃蜂窝结构从二氧化硅提取物

    公开(公告)号：WO0048775A3

    公开(公告)日：2000-11-30

    申请号：PCT/US0004158

    申请日：2000-02-17

    Applicant: CORNING INC

    Inventor： HRDINA KENNETH E ,  KAR GITIMOY ,  WIGHT JOHN F JR ,  YU CHUNZHE C

    IPC: B28B3/20 ,  B28B11/00 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B32/00 ,  C03B37/012 ,  G02B6/02 ,  B32B3/12

    CPC classification number: G02B6/02347 ,  B28B3/269 ,  B28B11/003 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/42 ,  G02B6/02361 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/236 ,  Y10T428/24149

    Abstract: The present invention describes an extrusion process for manufacturing a titanium-containing silicate glass honeycomb structure (100), having a variety of shapes and sizes depending on its ultimate application. The titanium-containing glass honeycomb has a very low coefficient of thermal expansion (CTE) and the CTE can be varied by adjusting the titanium level to match the CTE of members that are bonded to the honeycomb. Furthermore, the inventive honeycomb structure is lightweight, yet able to advantageously used as a light-weight support for such objects as mirrors. Especially extraterrestrial environments where temperature extremes are present. These honeycombs can be used singularly or in aggregates to provide such support. Embodiments are described wherein the mass of the honeycomb is further reduced by removing select portions of the honeycomb without deleteriously impacting its ability for load bearing.

    Abstract translation: 本发明描述了根据其最终应用，具有各种形状和尺寸的含钛硅酸盐玻璃蜂窝结构体（100）的制造挤出方法。 含钛玻璃蜂窝体具有非常低的热膨胀系数（CTE），并且通过调节钛水平以匹配结合到蜂窝体的构件的CTE可以改变CTE。 此外，本发明的蜂窝结构是轻质的，但是能够有利地用作诸如镜子之类的物体的轻质支撑。 特别是出现极端温度的地球外环境。 这些蜂蜜可以单独使用或以聚集体形式提供这种支持。 描述了通过除去蜂窝的选择部分而进一步减小蜂窝体的质量的实施例，而不会有害地影响其承载能力。

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