12.
    发明专利
    未知

    公开(公告)号:FR2325078A1

    公开(公告)日:1977-04-15

    申请号:FR7623636

    申请日:1976-07-27

    Applicant: IBM

    Abstract: A positive photoresist having increased sensitivity to light and formed by the addition of an acidic compound to a 1,2-quinone-diazide sulphonic acid ester sensitizer.

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