公开(公告)号：CA2441419A1

公开(公告)日：2002-12-19

申请号：CA2441419

申请日：2001-11-20

Applicant: IBM ,  FREUDENBERG NONWOVENS L P

Inventor： DAVIS KENNETH M ,  BILLINGS SCOTT CLAYTON ,  GILBRIDE DAVID S ,  VANGSNESS JEAN ,  RODBELL KENNETH P ,  CHEN SHYNG-TSONG ,  HSU OSCAR KAI CHI

IPC: B24B37/24 ,  B24D3/28 ,  B24D11/00 ,  B24D13/14 ,  C08J5/14 ,  H01L21/304 ,  B24B1/00 ,  B27N3/18

Abstract: A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, a nd the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers ar e embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.

公开(公告)号：AT307006T

公开(公告)日：2005-11-15

申请号：AT01952272

申请日：2001-06-27

Applicant: IBM

Inventor： CHEN SHYNG-TSONG ,  CHUNG ALEX SIU KEUNG ,  DAVIS KENNETH M ,  HSU OSCAR KAI CHI ,  RODBELL KENNETH P

IPC: B24B37/26 ,  B24D13/14 ,  H01L21/304 ,  B24B1/00 ,  B24B37/04 ,  B24D18/00 ,  B23C3/28 ,  B26D7/01

Abstract: Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).

公开(公告)号：AT289895T

公开(公告)日：2005-03-15

申请号：AT01950744

申请日：2001-06-29

Applicant: IBM

Inventor： CHEN SHYNG-TSONG ,  DAVIS KENNETH M ,  RODBELL KENNETH P

IPC: B24B37/26 ,  B24D13/12 ,  B24D13/14 ,  B24D18/00 ,  H01L21/304 ,  B24B37/04

Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.

公开(公告)号：DE60109170T2

公开(公告)日：2006-01-12

申请号：DE60109170

申请日：2001-06-29

Applicant: IBM

Inventor： CHEN SHYNG-TSONG ,  DAVIS M ,  RODBELL P

IPC: B24B37/26 ,  B24D13/12 ,  B24D13/14 ,  B24D18/00 ,  H01L21/304

Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.

公开(公告)号：AU7170901A

公开(公告)日：2002-01-14

申请号：AU7170901

申请日：2001-06-29

Applicant: IBM

Inventor： CHEN SHYNG-TSONG ,  DAVIS KENNETH M ,  RODBELL KENNETH P

IPC: B24B37/26 ,  B24D13/12 ,  B24D13/14 ,  B24D18/00 ,  H01L21/304 ,  B24B37/04

Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.

公开(公告)号：DE60114201D1

公开(公告)日：2006-03-02

申请号：DE60114201

申请日：2001-06-27

Applicant: IBM ,  FREUDENBERG NON WOVENS LOWELL

Inventor： CHEN SHYNG-TSONG ,  CHUNG SIU ,  DAVIS M ,  HSU KAI ,  RODBELL P

IPC: B23C3/28 ,  B24B1/00 ,  B24B37/26 ,  B24D13/14 ,  B24D18/00 ,  B26D7/01 ,  H01L21/304

Abstract: Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).

公开(公告)号：AU2001297847A1

公开(公告)日：2002-12-23

申请号：AU2001297847

申请日：2001-11-20

Applicant: IBM ,  FREUDENBERG NONWOVENS L P

Inventor： RODBELL KENNETH P ,  VANGSNESS JEAN ,  HSU OSCAR KAI CHI ,  BILLINGS SCOTT CLAYTON ,  DAVIS KENNETH ,  GILBRIDE DAVID S ,  CHEN SHYNG-TSONG

IPC: B24B37/24 ,  B24D3/28 ,  B24D11/00 ,  B24D13/14 ,  C08J5/14 ,  H01L21/304 ,  B24B1/00 ,  B27N3/18

公开(公告)号：AU7304501A

公开(公告)日：2002-01-14

申请号：AU7304501

申请日：2001-06-27

Applicant: IBM ,  FREUDENBERG NON WOVENS

Inventor： CHEN SHYNG-TSONG ,  CHUNG ALEX SIU KEUNG ,  DAVIS KENNETH M ,  HSU OSCAR KAI CHI ,  RODBELL KENNETH P

IPC: B24B37/26 ,  B24D13/14 ,  H01L21/304 ,  B24B1/00

Abstract: Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).