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公开(公告)号:BR8101382A
公开(公告)日:1981-09-15
申请号:BR8101382
申请日:1981-03-10
Applicant: IBM
Inventor: TSI WING SZE D , DAVIS M
IPC: H04L5/22 , G06F13/00 , G06F15/173 , G06F3/04
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公开(公告)号:DE60109170T2
公开(公告)日:2006-01-12
申请号:DE60109170
申请日:2001-06-29
Applicant: IBM
Inventor: CHEN SHYNG-TSONG , DAVIS M , RODBELL P
IPC: B24B37/26 , B24D13/12 , B24D13/14 , B24D18/00 , H01L21/304
Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.
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公开(公告)号:BR7702422A
公开(公告)日:1978-01-17
申请号:BR7702422
申请日:1977-04-15
Applicant: IBM
Inventor: DAVIS M , MAYES G , MODERMOTT T
Abstract: A data processing system is described wherein, during linkage to a subroutine, by a single machine instruction, a complete status save and the assignment of a dynamic work area are effected. By another single machine instruction the process is reversed. The elements of the complete machine status and the dynamic work area are retained in a hardware controlled stack, thus permitting nesting of the subroutine calls.
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