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公开(公告)号：DE69403816D1
公开(公告)日：1997-07-24
申请号：DE69403816
申请日：1994-01-05
Applicant: IBM
Inventor： CUOMO JEROME J , GUARNIERI C RICHARD , HOPWOOD JEFFREY A
IPC: C23C14/00 , C23C16/50 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H05H1/46
Abstract: A shield (124) for shunting capacitive electric fields generated by an RF coil (116) away from a gas plasma process chamber's dielectric window (122) and toward ground. The shield comprises an electrically conducting, substantially planar body section having a periphery and adapted to be located between the RF coil and the dielectric window during plasma treating of a workpiece. A central opening in the body section and gaps about the periphery permit RF magnetic fields to inductively couple with the plasma (110) and return around the coil, respectively. The shield substantially reduces interference by capacitive electric fields generated by the coil with inductive coupling between the coil and the gas plasma, thus substantially eliminating contamination from sputtering of the dielectric window by the capacitive electric fields.
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公开(公告)号：DE68925459T2
公开(公告)日：1996-09-05
申请号：DE68925459
申请日：1989-10-19
Applicant: IBM
Inventor： BREZOCZKY BLASIUS , CUOMO JEROME J , GUARNIERI C RICHARD , RAMANATHAN KUMBAKONAM V
Abstract: A process for forming chromium dioxide thin films which are receptive to high density magnetic recording. The process comprises depositing both chromium and oxygen on a substrate by evaporative techniques and concurrently bombarding the substrate with high energy ions of at least one of the film constituents to form a latent CrOx film forming layer. The process is carried out at approximately room temperature. The as-grown latent film forming layer is subsequently heat treated by a rapid thermal anneal step which raises the temperature of the as-grown fillm to about 500 DEG C. The rapid thermal anneal step preferably comprises a series of at least five separate pulses over a 10-second time span. After the rapid thermal anneal, the sample is rapidly quenched to room temperature.
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公开(公告)号：DE3853094T2
公开(公告)日：1995-08-10
申请号：DE3853094
申请日：1988-03-15
Applicant: IBM
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公开(公告)号：DE3782860T2
公开(公告)日：1993-06-09
申请号：DE3782860
申请日：1987-06-05
Applicant: IBM
Inventor： DONALDSON ROBERT L , VERRIER GUY F , SEELAND JR , GUARNIERI C RICHARD , GREANIAS EVON C
Abstract: A combined finger touch and stylus detection system is disclosed for use on the viewing surface of the visual display device. Transparent conductors (X1, X2,...X112) arranged in horizontal and vertical grid are supported on a flexible, transparent overlay membrane (20) which is adaptable to a variety of displays. A unique interconnection pattern is provided between the transparent conductors in the array and buses (80,90) which interconnect the conductors with the supporting electronics, whereby a minimum number of bus wires can be employed to service the array conductors and yet both unique finger touch location sensing and unique stylus location sensing can be accomplished. The system includes a control processor (100) which operates on stored program instructions which, in a first embodiment provides for the alternate detection of either finger touch location or stylus location and, in a second embodiment, provides for the simultaneous detection of both finger touch location and stylus location. The resulting system provides the unique function of combined finger touch and stylus detection, is adaptable to a variety of display surfaces, is provided with a structure which is easily manufacturable, and which has an inherent long-term reliability.
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