公开(公告)号：DE3878060D1

公开(公告)日：1993-03-18

申请号：DE3878060

申请日：1988-07-01

Applicant: IBM

Inventor： BARBEE STEVEN GEORGE ,  HUANG HUNG-CHANG ,  HUNT DONALD JOHN ,  KIM JUNGIHL ,  PARK JAE MYUNG ,  PERRY CHARLES HAMPTON ,  SHIH DA-YUAN

IPC: B32B18/00 ,  C03C17/22 ,  C03C17/23 ,  C03C17/245 ,  C04B41/50 ,  C04B41/87 ,  H01L23/15 ,  H05K1/03 ,  H01L23/14 ,  H01L21/48 ,  C23C16/30 ,  C23C14/34

Abstract: The article comprises a sintered ceramic, and an adherent coating of a dielectric material on at least a part of the surface of said ceramic, said coating forming a compressive layer on said part of said ceramic surface. The method for forming e.g. such articles comprises, depositing onto at least a portion of said ceramic article an adherent layer of dielectric material, said layer forming a compressive layer on cooling.

公开(公告)号：DE3775827D1

公开(公告)日：1992-02-20

申请号：DE3775827

申请日：1987-05-12

Applicant: IBM

Inventor： BEZAMA RASCHID JOSE ,  PERRY CHARLES HAMPTON

IPC: B28B3/00 ,  B28B11/00 ,  B30B1/00 ,  B30B5/02 ,  C04B35/64 ,  F27B17/00

Abstract: A gas-loaded diaphragm (10) for exerting a predetermined pressure on a ceramic substrate during sintering to prevent x-y shrinkage. In the most preferred embodiment, the diaphragm comprises a gas-filled base composed of two opposing discs, and a substantially hollow gas-filled toroid container (20) disposed around the perimeter of the opposing discs and communicating therewith to permit gas flow therebetween. This diaphragm (10) is disposed in relation to a ceramic substrate-containing cell (28) so that when it is heated to a desired temperature, the gas in the diaphragm expands and forces the two opposing discs (12) apart to thereby exert a predetermined pressure on the ceramic substrate-containing cell (28).