公开(公告)号：DE3878060T2

公开(公告)日：1993-08-12

申请号：DE3878060

申请日：1988-07-01

Applicant: IBM

Inventor： BARBEE STEVEN GEORGE ,  HUANG HUNG-CHANG ,  HUNT DONALD JOHN ,  KIM JUNGIHL ,  PARK JAE MYUNG ,  PERRY CHARLES HAMPTON ,  SHIH DA-YUAN

IPC: B32B18/00 ,  C03C17/22 ,  C03C17/23 ,  C03C17/245 ,  C04B41/50 ,  C04B41/87 ,  H01L23/15 ,  H05K1/03 ,  H01L23/14 ,  H01L21/48 ,  C23C16/30 ,  C23C14/34

Abstract: The article comprises a sintered ceramic, and an adherent coating of a dielectric material on at least a part of the surface of said ceramic, said coating forming a compressive layer on said part of said ceramic surface. The method for forming e.g. such articles comprises, depositing onto at least a portion of said ceramic article an adherent layer of dielectric material, said layer forming a compressive layer on cooling.

公开(公告)号：DE3878060D1

公开(公告)日：1993-03-18

申请号：DE3878060

申请日：1988-07-01

Applicant: IBM

Inventor： BARBEE STEVEN GEORGE ,  HUANG HUNG-CHANG ,  HUNT DONALD JOHN ,  KIM JUNGIHL ,  PARK JAE MYUNG ,  PERRY CHARLES HAMPTON ,  SHIH DA-YUAN

IPC: B32B18/00 ,  C03C17/22 ,  C03C17/23 ,  C03C17/245 ,  C04B41/50 ,  C04B41/87 ,  H01L23/15 ,  H05K1/03 ,  H01L23/14 ,  H01L21/48 ,  C23C16/30 ,  C23C14/34

Abstract: The article comprises a sintered ceramic, and an adherent coating of a dielectric material on at least a part of the surface of said ceramic, said coating forming a compressive layer on said part of said ceramic surface. The method for forming e.g. such articles comprises, depositing onto at least a portion of said ceramic article an adherent layer of dielectric material, said layer forming a compressive layer on cooling.

公开(公告)号：DE3877437T2

公开(公告)日：1993-07-15

申请号：DE3877437

申请日：1988-06-28

Applicant: IBM

Inventor： CLARKE THOMAS CARL ,  KOVAC CAROLINE ANN ,  JUNG DAE YOUNG ,  PARK JAE MYUNG ,  THOMAS RICHARD RONALD

IPC: C23C16/06 ,  C23C16/04 ,  C23C16/18 ,  C23C18/16 ,  C23C18/20 ,  C23C18/28 ,  C23C18/30 ,  H01L21/288 ,  H05K3/14 ,  H05K3/18 ,  H01L21/02

公开(公告)号：DE3877437D1

公开(公告)日：1993-02-25

申请号：DE3877437

申请日：1988-06-28

Applicant: IBM

Inventor： CLARKE THOMAS CARL ,  KOVAC CAROLINE ANN ,  JUNG DAE YOUNG ,  PARK JAE MYUNG ,  THOMAS RICHARD RONALD

IPC: C23C16/06 ,  C23C16/04 ,  C23C16/18 ,  C23C18/16 ,  C23C18/20 ,  C23C18/28 ,  C23C18/30 ,  H01L21/288 ,  H05K3/14 ,  H05K3/18 ,  H01L21/02