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公开(公告)号:DE68919328T2
公开(公告)日:1995-05-24
申请号:DE68919328
申请日:1989-07-07
Applicant: IBM
Inventor: BRAREN BODIL E , SRINIVASAN RANGASWAMY
IPC: A61B17/00 , A61B18/20 , A61B18/26 , A61C3/02 , A61N5/06 , B23K26/00 , B23K26/06 , B23K26/40 , H01L21/301 , H01L21/302 , H01S3/00 , A61B17/36
Abstract: A method and apparatus are described which enhance the ablative effect of a UV laser (10). The ablative effect of a pulsed UV laser (10) is enhanced using a second, longer wavelength pulsed laser (20). Each pulse of the first laser (10) is followed by or combined with a pulse from the second laser (20). The etch depth per pulse is controlled by varying the time between pulses from the first (10) and second (20) lasers. The maximum etch depth per pulse occurs at a time separation which is a function of the substrate (50) being etched. The first laser (10) wavelength is selected to be within the absorption spectrum of the unexcited surface molecules of the substrate (50), while the wavelength of the second laser (20) is selected to be within the absorption spectrum of the surface molecules excited by the incident radiation of the first laser (10).
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公开(公告)号:DE3376889D1
公开(公告)日:1988-07-07
申请号:DE3376889
申请日:1983-06-10
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , HOLLOWAY KAREN LYNNE , SRINIVASAN RANGASWAMY
IPC: H01L21/302 , C08J7/00 , G03F7/039 , H01L21/027 , H01L21/28 , H01L21/768 , H01L23/522 , G03F7/10
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公开(公告)号:DE3362768D1
公开(公告)日:1986-05-07
申请号:DE3362768
申请日:1983-05-25
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , BROWN KAREN HILL , SRINIVASAN RANGASWAMY
IPC: C23C16/16 , C23C16/48 , H01L21/285 , C23C16/04
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公开(公告)号:BR8306654A
公开(公告)日:1984-07-31
申请号:BR8306654
申请日:1983-12-02
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , SRINIVASAN RANGASWAMY , WYNNE JAMES JEFFREY
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公开(公告)号:DE2526456A1
公开(公告)日:1976-03-25
申请号:DE2526456
申请日:1975-06-13
Applicant: IBM
Inventor: ANGADIYAVAR CHANNABASAPPA SANN , SRINIVASAN RANGASWAMY
Abstract: New 2,4,6 trisubstituted pyridines are useful as laser dyes. These dyes are used in solution with a non-interfering solvent to form lasing media useful in dye lasers. When excited, these dyes have emission wavelengths which cover the spectrum from 410-570 nm. The violet and near ultra-violet regions of the visible spectrum are particularly well-served by the new compounds.
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公开(公告)号:DE3373055D1
公开(公告)日:1987-09-24
申请号:DE3373055
申请日:1983-09-06
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , SRINIVASAN RANGASWAMY , WYNNE JAMES JEFFREY
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公开(公告)号:AT28974T
公开(公告)日:1987-09-15
申请号:AT83108760
申请日:1983-09-06
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , SRINIVASAN RANGASWAMY , WYNNE JAMES JEFFREY
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公开(公告)号:AU2165583A
公开(公告)日:1984-06-07
申请号:AU2165583
申请日:1983-11-24
Applicant: IBM
Inventor: BLUM SAMUEL EMIL , SRINIVASAN RANGASWAMY , WYNNE JAMES JEFFREY
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