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    ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM
    11.
    发明专利
    ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM 未知

    公开(公告)号：CA1095760A

    公开(公告)日：1981-02-17

    申请号：CA301709

    申请日：1978-04-21

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  TIBBETTS RAYMOND E ,  WILCZYNSKI JANUSZ S

    IPC: H01L21/30 ,  G02B17/00 ,  G02B17/08 ,  G03F7/20 ,  H01L21/027 ,  F04F5/46 ,  E21B21/00

    Abstract: ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM A unit magnification optical system having micron resolution capability over a broad frequency spectrum. A spherical concave mirror is used to provide unit magnification at high numerical aperture with respect to object and image planes which are both located at or in the proximity of the center of curvature of the mirror, or the optical equivalent thereof. A first refractory element optically close to the object and image planes corrects longitudinal chromatic aberration of the principal rays while a second refractory element optically close to the mirror corrects residual longitudinal chromatic aberration of the marginal rays. In the preferred embodiment, a double prism arrangement located between the first refractory element and the center of curvature of the mirror optically reflects the object and image planes to parallel opposed positions having a common axis perpendicular to the axis of the mirror, The system may be used for either step-and-repeat or scanning exposure operations in fabricating microcircuits.

    12.
    发明专利
    未知

    公开(公告)号：DE69113715D1

    公开(公告)日：1995-11-16

    申请号：DE69113715

    申请日：1991-08-05

    Applicant: IBM

    Inventor： GOODMAN DOUGLAS S ,  ROSENBLUTH ALAN E ,  TIBBETTS RAYMOND E ,  WILCZYNSKI JANUSZ S

    IPC: G02B17/00 ,  G02B17/02 ,  G02B17/08 ,  G02B19/00 ,  G02B27/18 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01S3/101 ,  G03B41/00 ,  G02B27/00 ,  G11B7/135

    Abstract: An optical system having a plurality of substantially planar reflecting surfaces (10, 20, 36) and a plurality of curved reflecting surfaces (26, 28) providing an optical projection system which can scan a mask object (2) onto an image plane by having the mask (2) and copy substrate (42) substantially fixed in position relative to each other and either simultaneously moving the mask (2) and copy substrate (42) in the same direction or maintaining the mask (2) and image plane substantially stationary and fixed with respect to each other while scanning the optical system. The optical system uses one wavelength of an electromagnetic radiation to align the mask (2) to the copy substrate (42) and another wavelength of electromagnetic radiation to form the image of the mask (2) on the copy substrate (42). The apparatus can be used as a laser ablation optical tool to laser ablate the image of a mask (2) onto the copy substrate (42), as an inspection tool, as a photolithographic and for other related applications. The projection lens is a modified Dyson type lens.

    MICRO-OBJECTIVE REDUCTION LENS SYSTEM
    13.
    发明专利
    MICRO-OBJECTIVE REDUCTION LENS SYSTEM 未知

    公开(公告)号：CA939543A

    公开(公告)日：1974-01-08

    申请号：CA109043

    申请日：1971-03-30

    Applicant: IBM

    Inventor： TIBBETTS RAYMOND E ,  WILCZYNSKI JANUSZ S

    IPC: G02B13/00

    Abstract: 1289250 Micro-objective lens INTERNATIONAL BUSINESS MACHINES CORP 19 April 1971 [2 April 1970] 25605/71 Addition to 1167960 Heading G2J A lens comprises ten optically aligned lens elements I-X, I and II, III and IV, V and VI and VIII and IX being respectively cemented together to form meniscus doublets, in which a diaphragm 13 is positioned between element VI and element VII, and wherein:- where F is the focal length of the combination, and R, S, t are the radii and distances shown. Optical data are given for nine examples.

    LASER BEAM HOMOGENIZER
    14.
    发明专利
    LASER BEAM HOMOGENIZER 未知

    公开(公告)号：CA1264712A

    公开(公告)日：1990-01-23

    申请号：CA524576

    申请日：1986-12-04

    Applicant: IBM

    Inventor： FAN BUNSEN ,  TIBBETTS RAYMOND E ,  WILCZYNSKI JANUSZ S ,  WITMAN DAVID F

    IPC: H01S3/101 ,  G02B5/02 ,  G02B5/08 ,  G02B27/09 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G02B27/00 ,  G02B17/02

    Abstract: LASER BEAM HOMOGENIZER A coherent laser beam having a possible non-uniform spatial intensity distribution is transformed into an incoherent light beam having a substantially uniform spatial intensity distribution by homogenizing the laser beam with a light tunnel (a transparent light passageway having flat intenally reflective side surfaces). It has been determined that when the cross-section of the tunnel is a polygon (as preferred) and the sides of the tunnel are all parallel to the axis of the tunnel (as preferred), the laser light at the exit of the light tunnel (or alternatively at any image plane with respect thereto) will have a substantially uniform intensity distribution and will be incoherent only when the aspect ratio of the tunnel length divided by width) equals or exceeds the cotangent of the input beam divergence angle .theta. and when wmin = Lcoh(R + (1 + R2)1/2) > 2RLcoh, where Wmin is the minimum required width for the light tunnel, Lcoh is the effective coherence length of the laser light being homogenized and is the chosen aspect ratio for the light tunnel.

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