公开(公告)号：DE69003146D1

公开(公告)日：1993-10-14

申请号：DE69003146

申请日：1990-03-05

Applicant: IBM

Inventor： BETTERTON KATHLEEN MARY ,  HINSBERG WILLIAM DINAN ,  NGUYEN HUU TINH ,  TANG WING TSANG ,  TWIEG ROBERT JAMES

IPC: G02F1/13 ,  C07C327/28 ,  C07C327/32 ,  C09K19/20 ,  C09K19/28 ,  C09K19/32

公开(公告)号：DE3686103D1

公开(公告)日：1992-08-27

申请号：DE3686103

申请日：1986-05-23

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

Abstract: A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220 DEG C, and curing the coating.

公开(公告)号：DE3861251D1

公开(公告)日：1991-01-24

申请号：DE3861251

申请日：1988-02-09

Applicant: IBM

Inventor： ALLEN ROBERT DAVID ,  FRECHET JEAN M J ,  TWIEG ROBERT JAMES ,  WILLSON CARLTON GRANT

IPC: G03F7/004 ,  G03F7/029 ,  G03F7/038 ,  G03F7/039 ,  H01L21/027

Abstract: Heat stable, negative resist compositions are provided for use, particularly in deep ultraviolet light x-ray and electron beams. The composition comprises an acid generting onium salt photoinitiator, a source of polyfunctional activated aromatic rings and a source of polyfunctional carbonium ions, with at least one of said sources being a polymer.