Abstract:
The electron beam apparatus is provided with a stage for mounting a sample thereon, a primary optical system for generating an electron beam having an irradiation area and irradiating the electron beam onto the sample, a secondary optical system for detecting electrons which have been generated through the irradiation of the electron beam onto the sample and have acquired structural information of the sample and acquiring an image of the sample about a viewing area and an irradiation area changing section for changing the position of the irradiation area with respect to the viewing area.
Abstract:
A flush toilet for discharging waste using flush water supplied from a flush water supply source is disclosed. The flush toilet comprises a bowl portion including a bowl-shaped waste receiving surface, a rim portion and a shelf portion; a water discharge path for discharging waste; a water spouting portion for spouting flush water onto the shelf portion of the bowl portion to form a swirl flow; and a water conduit for supplying the flush water to the water spouting portion; wherein the bowl portion includes a front region and a rear region, and the rim portion of the bowl portion is such that the curvature radius in the front region is equal to or smaller than the curvature radius of the rear region, and wherein the water spouting portion is formed on either the left or right side in the front region of the rim portion and spouts the flush water toward the front of the rim portion.
Abstract:
A rotary electric machine includes a stator; and a rotor including an iron core, which has a tubular connecting portion surrounding a shaft and 10 magnetic pole portions integrally formed with the connecting portion corresponding to a pole number, and a plurality of permanent magnets arranged between the magnetic pole portions. The iron core includes axially-penetrated magnet accommodating air gaps formed between the magnetic pole portions at the radial outer side of the connecting portion, and the permanent magnets are installed in the respective magnet accommodating air gaps such that a radial outer surface of each of the permanent magnets makes close contact with an inner surface of each of the magnet accommodating air gaps and such that a gap exists between a radial inner surface of each of the permanent magnets and the connecting portion.
Abstract:
A radio communication device includes, a radio communication device includes, a plurality of IC chips that conducts radio communicate with a reader/writer, a first setting unit that sets one IC chip selected from the plurality of IC chips to an exclusive-lock release state that allows radio communication to be conducted with the reader/writer, a determination unit that determines whether the radio communication is being conducted normally when radio communication between the one IC chip set to the exclusive-lock release state and the reader/writer is conducted, and a second setting unit that sets the one IC chip set to the exclusive-lock release state to a exclusive-locked state that does not allow radio communication with the reader/writer when the radio communication is determined as not being conducted normally, and sets another IC chip that is different from the one IC chip set to the exclusive-locked state to the exclusive-lock release state.
Abstract:
A production process of a resin composition containing 100 parts by weight of a polyester fiber, 1 to 600 parts by weight of a copolymer of ethylene with a glycidyl group-carrying monomer, and 0.3 to 500 parts by weight of an unsaturated carboxylic acid-modified polyolefin resin, the process comprising steps of (1) melt-kneading the copolymer with the modified polyolefin resin, and (2) kneading the resultant melted resin with the polyester fiber at a temperature lower than a melting point of the polyester fiber.
Abstract:
A resin composition comprising a fiber component and a resin component, whereinthe fiber component is (A) a surface-treated fiber (component A) which comprises 100 parts by weight of a fiber comprising a polyalkylene terephthalate and/or a polyalkylene naphthalene dicarboxylate (component Af) and 0.1 to 10 parts by weight of a sizing agent having a glass transition point of −80° C. or higher and lower than 70° C. and adhered to the surface of the fiber (component Ac); andthe resin component comprises (B) an ethylene-based copolymer containing a glycidyl group (component B), (C) a modified polyolefin resin modified with an unsaturated carboxylic acid and/or an unsaturated carboxylic acid derivative (component C), and (D) a polyolefin resin having a melt flow rate of 40 to 200 g/10 min (component D), except for the components C and D, the content of the component D being 30 to 850 parts by weight based on 100 parts by weight of the component A, and the total content of the components B and C being 5 to 630 parts by weight based on 100 parts by weight of the component A, and a molded article thereof.
Abstract:
It is an object of the present invention to provide a solid-state imaging device for enhancing accuracy of AD conversion and active switching of up-counting and down-counting in the asynchronous counter without limiting the AD conversion frequency. The solid-state imaging device according to the present invention includes an asynchronous counter having an up-counting mode in which up-counting is performed, a down-counting mode in which down-counting is performed, and a holding mode for switching operation settings between the up-counting and the down-counting while maintaining a count value held in the asynchronous counter.
Abstract:
The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.
Abstract:
An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).
Abstract:
An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are provided. The electron beam apparatus is a mapping-projection-type electron beam apparatus for observing or evaluating a surface of the sample by irradiating the sample with a primary electron beam and forming on a detector an image of reflected electrons emitted from the sample. An electron impact-type detector such as an electron impact-type CCD or an electron impact-type TDI is used as the detector for detecting the reflected electrons. The reflected electrons are selectively detected from an energy difference between the reflected electrons and secondary electrons emitted from the sample. To eliminate charge-up caused on the sample surface by irradiation with the primary electron beam, the surface of the sample is covered with a cover placed above the sample and a gas is supplied to the space above the sample covered with the cover. The gas is brought into contact with the sample surface to reduce charge-up on the sample surface.