Abstract:
This disclosure provides systems, methods and apparatus incorporating display elements having light modulators that can operate in more than two states. In some implementations, the light modulator assembly includes an electrostatic actuator that includes a load electrode coupled to a shutter and a drive electrode set positioned proximate to the load electrode. The drive electrode set includes a plurality of discrete portions that are configured to drive the light modulator assembly to a plurality of different light modulator states. In some such implementations, the portions of the drive electrode set are positioned opposite to corresponding regions of the load electrode. In some implementations, the portions are arranged such that the portions are configured to electrostatically engage with adjacent regions of the load electrode.
Abstract:
This disclosure provides systems, methods and apparatus for preventing particles from entering electromechanical systems (EMS) display devices. In one aspect, an apparatus includes a plate, a substrate supporting at least one EMS device, a seal joining the plate and the substrate to define a cavity therebetween and at least one port for receiving a fluid, and a filter disposed between the port and the EMS device. The filter includes elements formed on at least one of a surface of the substrate and a surface of the plate, defining a gap sized to allow the received fluid to pass and to inhibit non-fluidic particles carried in the fluid from the EMS device.
Abstract:
A device includes an array of devices formed on a first substrate. A second substrate is spaced away from the first substrate such that the array of devices are positioned between the first and second substrates. A plurality of spacers arc coupled to the first substrate to maintain at least a minimum gap between the first substrate and the second substrate. The plurality of spacers include a first set of spacers and a second set of spacers. The spacers in the first set of spacers are shorter than the spacers in the second set of spacers. At least one spacer in the second set of spacers is positioned between at least two spacers in the first set of spacers. In some implementations, the device is a display device and the MEMS devices are modulators.
Abstract:
This disclosure provides systems, methods and apparatus for generating images using dual-shutter shutter assemblies. Such shutter assemblies include two shutters that move over a common aperture to selectively obstruct the passage of light there through. In the closed position, portions of one of the shutters overlaps a portion of the other shutter to provide such light obstruction without the two shutters needing to come into contact.
Abstract:
This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes shutters having asymmetric light obstructing portions extending out from opposing sides of a shutter aperture along an axis of motion of the shutter. Actuators move the shutters laterally along the axis of motion to move the shutter between fully closed, partially open, and fully open states to modulate light, thereby forming an image.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. One such apparatus includes a substrate, an elevated aperture layer (EAL) defining a plurality of apertures formed therethrough, a plurality of anchors for supporting the EAL over the substrate and a plurality of display elements positioned between the substrate and the EAL. Each of the display elements may correspond to at least one respective aperture of the plurality of apertures defined by the EAL. Each display element also includes a movable portion supported over the substrate by a corresponding anchor supporting the EAL over the substrate. In some implementations, one or more light dispersion elements may be disposed in optical paths passing through the apertures defined by the EAL.
Abstract:
A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
Abstract:
This disclosure provides systems, methods, and apparatus for a MEMS display incorporating extended height actuators. A light modulating component can be positioned between a substrate and an opposing surface coupled to the substrate. A suspended electrode can be coupled to the light modulating component and suspended between the substrate and the opposing surface. An extended-height electrode can be positioned immediately adjacent to the suspended electrode, and can extend from the substrate up to a height beyond the height of the suspended electrode. The suspended electrode and the extended-height electrode can be configured to move the light modulating component laterally with respect to the substrate.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include an array of display elements coupled to a substrate and an elevated aperture layer (EAL) suspended over the array of display elements. The EAL is coupled to the substrate, and includes, for each of the display elements, at least one aperture for allowing passage of light therethrough. Methods for manufacturing such apparatus include at least one of forming etch holes through the EAL, employing an at least partially sublimatable sacrificial mold, employing a two phase release process, and releasing the apparatus such that a portion of a sacrificial mold remains surrounding portions of the apparatus.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include a transparent substrate, a display element formed on the substrate, a light blocking elevated aperture layer (EAL) supported over the substrate by an anchor formed on the substrate, and an electrical interconnect disposed on the EAL for carrying an electrical signal to the display element. The electrical interconnect can include one or more of a data voltage interconnect, a scan-line interconnect or a global interconnect. In some implementations, a dielectric layer can separate the electrical interconnect from the EAL. The EAL can include an aperture formed through it that corresponds to the display element. In some implementations, a second electrical interconnect disposed on the substrate can be electrically coupled to a plurality of display elements.