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公开(公告)号:US20220375941A1
公开(公告)日:2022-11-24
申请号:US17574666
申请日:2022-01-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: KISEOK LEE , HUI-JUNG KIM , MIN HEE CHO
IPC: H01L27/108 , H01L29/786
Abstract: A semiconductor memory device including: a stack structure including a plurality of layers that are vertically stacked on a substrate, each of the plurality of layers including a word line, a channel layer, and a data storage element electrically connected to the channel layer; and a bit line that vertically extends on one side of the stack structure, wherein the word line includes: a first conductive line that extends in a first direction; and a gate electrode that protrudes in a second direction from the first conductive line, the second direction intersecting the first direction, wherein the channel layer is on the gate electrode, and wherein the bit line includes a connection part electrically connected to the channel layer.
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公开(公告)号:US20190252386A1
公开(公告)日:2019-08-15
申请号:US16268748
申请日:2019-02-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: KISEOK LEE , BONG-SOO KIM , JIYOUNG KIM , HUI-JUNG KIM , SEOKHAN PARK , HUNKOOK LEE , YOOSANG HWANG
IPC: H01L27/108 , H01L23/528 , H01L29/08 , H01L29/10 , H01L29/165
CPC classification number: H01L27/10805 , H01L23/5226 , H01L23/528 , H01L27/10897 , H01L28/60 , H01L29/0847 , H01L29/1037 , H01L29/165
Abstract: Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.
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公开(公告)号:US20240349492A1
公开(公告)日:2024-10-17
申请号:US18543279
申请日:2023-12-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: MYEONG-DONG LEE , SEUNG-BO KO , KEUNNAM KIM , JONGMIN KIM , HUI-JUNG KIM , TAEJIN PARK , DONGHYUK AHN , KISEOK LEE , MINYOUNG LEE , INHO CHA
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/02 , H10B12/315 , H10B12/34
Abstract: A semiconductor memory device include first and second active patterns extending in a first direction and spaced apart from each other in a second direction crossing the first direction. The first and second active patterns include a first and second edge portions spaced apart from each other in the first direction, and a center portion therebetween. Bit line node contacts are on the center portions. Bit lines are on the bit line node contacts and extend in a third direction crossing the first and second directions. The center portions of the first and second active patterns are sequentially disposed in the second direction. Each of the bit line node contacts has a first width at a level of a top surface, a second width at a level of a bottom surface, and a third width between the top and bottom surfaces less than the first and second widths.
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公开(公告)号:US20240324186A1
公开(公告)日:2024-09-26
申请号:US18405026
申请日:2024-01-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: KISEOK LEE , Chansic YOON
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/0335 , H10B12/053 , H10B12/315 , H10B12/34
Abstract: A semiconductor device includes active patterns on a substrate, gate structures in recesses of the active patterns and extending in the first direction, first contact plugs electrically connected to opposite edge portions of each of the active patterns, respectively, the first contact plugs being spaced apart from each other in each of the first and second directions and aligned in each of the first and second directions, first insulation spacers surrounding sidewalls of the first contact plugs, the first insulation spacers filling spaces between the first contact plugs in the second direction, a bit line structure filling an opening extending in the second direction between the first insulation spacers, the bit line structure contacting central portions of the active patterns, and a capacitor electrically connected to each of the first contact plugs.
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公开(公告)号:US20230309289A1
公开(公告)日:2023-09-28
申请号:US18094719
申请日:2023-01-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun CHOI , KISEOK LEE , HAEJOON LEE , SEUNGJAE JUNG
Abstract: A semiconductor memory device may include a lower layer including a first region and a second region, the lower layer extending in a first direction and a second direction perpendicular to the first direction, and a stack including word lines and interlayer insulating patterns, which are alternatingly stacked in a third direction perpendicular to the first direction and the second direction, the stack having a staircase structure on the second region. The word lines may extend from the first region to the second region in the first direction. Each of the word lines may include sub-gate electrodes, which extend parallel to each other in the first region, and a word line pad, which is connected in common to the sub-gate electrodes in the second region.
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公开(公告)号:US20230178505A1
公开(公告)日:2023-06-08
申请号:US18050497
申请日:2022-10-28
Applicant: Samsung Electronics Co.. Ltd.
Inventor: KISEOK LEE , Hyungeun Choi , Gijae Kang , Keunnam Kim , Soobin Yim , Moonyoung Jeong , Seungjae Jung
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L25/00 , H10B12/00
CPC classification number: H01L24/08 , H01L25/0657 , H01L25/18 , H01L24/80 , H01L25/50 , H01L27/10805 , H01L27/10897 , H01L2224/08145 , H01L2224/80006 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1436
Abstract: Semiconductor memory devices may include a cell array structure that may include a memory cell array including three-dimensionally arranged memory cells and first bonding pads connected to the memory cell array and a peripheral circuit structure that may include peripheral circuits and second bonding pads bonded to the first bonding pads. The cell array structure may include a lower dielectric layer having a first surface and a second surface opposite to the first surface, a stack structure including horizontal electrodes stacked in a vertical direction on the first surface of the lower dielectric layer, a vertical structure including vertical conductive patterns that extend in the vertical direction and cross the horizontal electrodes, and an input/output pad on the second surface of the lower dielectric layer.
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公开(公告)号:US20250048617A1
公开(公告)日:2025-02-06
申请号:US18736153
申请日:2024-06-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: BYEUNGMOO KANG , SEOKHAN PARK , KISEOK LEE
IPC: H10B12/00
Abstract: A capacitor structure may include a plurality of lower electrodes arranged in a first direction and a second direction perpendicular to the first direction, a supporter including a plurality of openings and adjoining the plurality of lower electrodes, a dielectric layer covering the supporter and the plurality of lower electrodes, and an upper electrode covering the dielectric layer, where each of the plurality of openings contacts four lower electrodes, and where the plurality of openings contact opposite sides of the plurality of lower electrodes along the first direction and the second direction.
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公开(公告)号:US20220384449A1
公开(公告)日:2022-12-01
申请号:US17735838
申请日:2022-05-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: EUNJUNG KIM , HYO-SUB KIM , JAY-BOK CHOI , YONGSEOK AHN , JUNHYEOK AHN , KISEOK LEE , MYEONG-DONG LEE , YOONYOUNG CHOI
IPC: H01L27/108
Abstract: A semiconductor memory device includes a device isolation pattern on a substrate and defining a first active section, a first storage node pad on the first active section, a word line in the substrate and extending across the first active section, a bit line on the first storage node pad and crossing over the word line, a storage node contact on one side of the bit line and adjacent to the first storage node pad, and an ohmic layer between the storage node contact and the first storage node pad. A bottom surface of the ohmic layer is rounded.
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公开(公告)号:US20220246180A1
公开(公告)日:2022-08-04
申请号:US17481583
申请日:2021-09-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: WONSOK LEE , MIN TAE RYU , WOO BIN SONG , KISEOK LEE , MINSU LEE , MIN HEE CHO
IPC: G11C5/06 , H01L29/06 , H01L27/108
Abstract: A semiconductor memory includes a bit line extending in a first direction, first and second active patterns, which are alternately disposed in the first direction and on the bit line, and each of which includes a horizontal portion and a vertical portion, first word lines disposed on the horizontal portions of the first active patterns to cross the bit line, second word lines disposed on the horizontal portions of the second active patterns to cross the bit line, and an intermediate structure provided in a first gap region between the first and second word lines or in a second gap region between the vertical portions of the first and second active patterns. The first and second active patterns, which are adjacent to each other, may be disposed to be symmetric with respect to each other.
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公开(公告)号:US20210296237A1
公开(公告)日:2021-09-23
申请号:US17097337
申请日:2020-11-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: HYO-SUB KIM , SOHYUN PARK , DAEWON KIM , DONGOH KIM , EUN A KIM , CHULKWON PARK , TAEJIN PARK , KISEOK LEE , SUNGHEE HAN
IPC: H01L23/535 , H01L27/108 , H01L23/532 , H01L21/768
Abstract: A semiconductor memory device is disclosed. The device may include first and second impurity regions provided in a substrate and spaced apart from each other, the second impurity region having a top surface higher than the first impurity region, a device isolation pattern interposed between the first and second impurity regions, a first contact plug, which is in contact with the first impurity region and has a bottom surface lower than the top surface of the second impurity region, a gap-fill insulating pattern interposed between the first contact plug and the second impurity region, a first protection spacer interposed between the gap-fill insulating pattern and the second impurity region, and a first spacer, which is in contact with a side surface of the first contact plug and the device isolation pattern and is interposed between the first protection spacer and the gap-fill insulating pattern.
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