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公开(公告)号：FR2952225B1
公开(公告)日：2012-03-23
申请号：FR0957769
申请日：2009-11-03
Applicant: ST MICROELECTRONICS SA , ST MICROELECTRONICS CROLLES 2
Inventor： DUTARTRE DIDIER , CAMPIDELLI YVES , LOUBET NICOLAS
IPC: H01L21/335 , H01L21/8238 , H01L29/78
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