Abstract:
A method for the electrical and/or mechanical interconnection of components of a microelectronic system comprising at least one first component (5a, 5b; 50a-50d, 51a-51d; 70) and one second component (2; 71), provides for the formation of at least one local Joule-effect micro-heater (R) incorporated in one of the first and second components at a respective soldering point between the first component and the second component, and for the supply of electrical energy (V, 13a, 13b) to the micro-heater so as to utilize the heat produced by the micro-heater by the Joule effect to solder the first and second components at the soldering point.
Abstract:
An electromagnetic head (130) for a storage device comprises a magnetic core (205) forming a magnetic circuit, the magnetic core (205) being interrupted by a first air-gap (230) for magnetic coupling with a memory cell of the device, and by at least one second air-gap (235) which separates a first pole (240) and a second pole (245) of the magnetic core (205), and magnetoresistive means (250) disposed in the region of the second air-gap (235) for reading the memory cell; the magnetoresistive means (250) are connected to the magnetic core (205) in the region of the first pole (240) and of the second pole (245) so as to be connected in the magnetic circuit.
Abstract:
A microelectromechanical structure, usable in an optical switch for directing a light beam towards one of two light guide elements, including: a mirror element (53), rotatably movable; an actuator (65), which can translate; and a motion conversion assembly (77), arranged between the mirror element (53) and the actuator (65). The motion conversion assembly (77) includes a projection (54) integral with the mirror element (53) and elastic engagement elements (73) integral with the actuator (65) and elastically loaded towards the projection. The elastic engagement elements (73) are formed by metal plates fixed to the actuator (65) at one of their ends and engaging the projection (54) with an abutting edge (73b) countershaped with respect to the projection (54).
Abstract:
A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another provides for the formation of a layer of sacrificial material (32), the formation of the electrical connection elements (43) on the layer of sacrificial material, and the removal of the layer of sacrificial material beneath the electrical connecting elements, the layer of sacrificial material being a thin film (32) with at least one adhesive side (21) which can be applied dry to the surface of the micro-mechanism.
Abstract:
The method comprises the steps of: forming an integrated device (54) including a microactuator (10) in a semiconductor material wafer (29); forming an immobilisation structure (45,47) of organic material on the wafer; simultaneously forming a securing flange (51) integral with the microactuator (10) and electrical connections for connecting the integrated device to a read/write head; bonding a transducer (6,55) supporting the read/write head to the securing flange (51); connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the actuator unit to a suspension; and removing the immobilisation structure (45,47).
Abstract:
The integrated electronic device (35) is intended for bonding to a motherboard (36) of dimensions much larger than the device. The device comprises a substrate (3') of semiconductor material; an insulating and protective layer (11, 25) above the substrate, housing electrical connection structures inside it; a solid through contact (20) extending through the substrate (3), connected to the electrical connection structure and having a lower end projecting from the substrate (3') for connection to tracks (37) of the board (35). The substrate (3') initially has a thickness much greater than the length of the through contact (20) and is reduced in thickness by lapping after bonding the front surface to a support wafer (30) and before separating the individual devices.
Abstract:
The process comprises forming a buried sacrificial layer (5) of porous silicon in the starting substrate (2) and then a single-crystal epitaxial layer (7) intended to accommodate both the sensitive element and the integrated circuit. After forming electronic components (12, 18) in the epitaxial layer, the epitaxial layer (7) is anisotropically etched over the buried sacrificial layer (5) to form trenches (27) through which the buried sacrificial layer is then etched and removed. The suspended mass (30) thus obtained has high mechanical properties, high thickness, the process is wholly compatible with standard microelectronics techniques and can be implemented at low cost.