公开(公告)号：EP4173729A1

公开(公告)日：2023-05-03

申请号：EP22203207.0

申请日：2022-10-24

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  QUAGLIA, Fabio ,  PRELINI, Carlo Luigi

IPC: B06B1/06

Abstract: PMUT acoustic transducer (10) formed in a body (11) of semiconductor material having a face (11A) and accommodating a plurality of first buried cavities (12A-12H), having an annular shape, arranged concentrically with each other and extending at a distance from the face (11A) of the body (11). The first buried cavities (12A-12H) delimit from below a plurality of first membranes (13A-13H) formed by the body (11) so that each first membrane (13A-13H) extends between a respective first buried cavity (12A-12H) of the plurality of first buried cavities and the face (11A) of the body (11). The plurality of first membranes (13A-13H) include a central membrane (13A) and a plurality of peripheral membranes (13B-13H) surrounding the central membrane (13A) and spaced outward in the radial direction. A plurality of piezoelectric elements (15A-15H) extend on the face of the body, each piezoelectric element extending above a respective first membrane (13A-13H) of the plurality of first membranes. The first membranes (13A-13H) have different widths (w1-w8), variable between a minimum value and a maximum value and define respective different resonance frequencies.

公开(公告)号：EP3343653B1

公开(公告)日：2020-07-29

申请号：EP17177446.6

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  ALESSANDRI, Anna

IPC: H01L41/09 ,  H02N2/04

公开(公告)号：EP3533569A1

公开(公告)日：2019-09-04

申请号：EP19154620.9

申请日：2019-01-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  TENTORI, Lorenzo

IPC: B25J15/08 ,  B25J7/00

Abstract: The MEMS manipulation device (1) has a first and a second manipulation arms (40, 41) carrying respective mutually facing gripping elements (6, 7). The first manipulation arm (40) is formed by a driving arm (2) and by an articulated arm (4) hinged together through an articulation structure (10). The first driving arm (2) comprises a first beam element (20) and a first piezoelectric region (29), on the first beam element. The first articulation structure (10) comprises a first constraint element (31) not deformable in the thickness direction, and a first hinge structure (32), interposed between the first driving arm (2), the first articulated arm (4), and the first constraint element (31).

公开(公告)号：EP3490018A1

公开(公告)日：2019-05-29

申请号：EP18208711.4

申请日：2018-11-27

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  PRELINI, Carlo Luigi

IPC: H01L41/09 ,  H04R17/00

Abstract: A micro-electro-mechanic actuator device (1; 85; 95) comprising: a fixed structure (4); and a mobile structure (2), which includes a first deformable band (47c) and a further second deformable band (47a) and a further third deformable band (47b), which extend on opposite sides of the first deformable band, each carrying a piezoelectric actuator (50i-50j). In a working condition, in which the second and third piezoelectrics are biased by a working voltage, the second and third deformable bands (47a, 47b) are subjected to a negative bending, while the first deformable band (47c) is subjected to a positive bending. There are thus generated two translations that add together, causing a displacement of the first deformable band greater than the one that may be obtained by a single membrane of equal base area.

公开(公告)号：EP3441358A1

公开(公告)日：2019-02-13

申请号：EP18187742.4

申请日：2018-08-07

Applicant: STMicroelectronics S.r.l.

Inventor： PACI, Dario ,  GIUSTI, Domenico

IPC: B81B3/00

Abstract: MEMS device (21; 61; 91; 101) including: a semiconductor support body (22) having a first cavity (24); a membrane (26; 56; 106) including a peripheral portion, fixed to the support body (22), and a suspended portion; a first deformable structure (45; 68; 98) at a distance from a central part of the suspended portion of the membrane (26; 56; 106); a second deformable structure (44; 66; 96) laterally offset relative to the first deformable structure (45; 68; 98) towards the peripheral portion of the membrane (26; 56; 106); and a projecting region (40) fixed under the membrane (26; 56; 106); and wherein the second deformable structure (44; 66; 96) is deformable so as to translate the central part of the suspended portion of the membrane (26; 56; 106) along a first direction; and wherein the first deformable structure (45; 68; 98) is deformable so as to translate the central part of the suspended portion of the membrane (26; 56; 106) along a second direction.

公开(公告)号：EP3343265A1

公开(公告)日：2018-07-04

申请号：EP17172096.4

申请日：2017-05-19

Applicant: STMicroelectronics S.r.l.

Inventor： CARMINATI, Roberto ,  GIUSTI, Domenico ,  COSTANTINI, Sonia

IPC: G02B26/08

CPC classification number: G02B26/0858 ,  B81B3/0083 ,  B81B2201/032 ,  B81B2203/0118 ,  G02B26/105 ,  H04N9/3129

Abstract: A MEMS device comprising a fixed structure (22) and a suspended structure (26) including an internal structure (29; 109) and a first arm (B1) and a second arm (B2), each of which has a respective first end and a respective second end, the first ends being fixed to the fixed structure and being angularly arranged at a distance apart, the second ends being fixed to the internal structure, being angularly arranged at a distance apart and being arranged angularly in a same direction of rotation with respect to the corresponding first ends. The MEMS device further includes a number of piezoelectric actuators (50, 52, 54, 56), each of which can be driven so as to cause deformation of a corresponding arm, thus causing a rotation of the internal structure. In resting conditions, each of the first and second arms has a respective elongated portion (30, 32) with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.

公开(公告)号：EP3178783A1

公开(公告)日：2017-06-14

申请号：EP16175301.7

申请日：2016-06-20

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  CARMINATI, Roberto ,  MERLI, Massimiliano

IPC: B81B3/00 ,  G02B26/08

CPC classification number: G02B26/105 ,  B81B3/0048 ,  B81B3/0083 ,  B81B2201/042 ,  G02B26/0858 ,  H04N9/3173

Abstract: A micromechanical device (50) having an tiltable structure (52) rotatable about a first rotation axis (B); a fixed structure (51); and an actuation structure (54) of a piezoelectric type, coupled between the tiltable structure and the fixed structure. The actuation structure (54) is formed by spring elements (55, 56) having a spiral shape. The spring elements (55, 56) are each formed by a plurality of actuation arms (70-73) extending transversely to the first rotation axis (B), each actuation arm carrying a respective piezoelectric band (74, 75) of piezoelectric material. The actuation arms are divided into two sets biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis (B).

Abstract translation: 具有可围绕第一旋转轴线（B）旋转的可倾斜结构（52）的微机械装置（50）; 固定结构（51）; 以及耦合在可倾斜结构和固定结构之间的压电型致动结构（54）。 致动结构（54）由具有螺旋形状的弹簧元件（55,56）形成。 弹簧元件（55,56）各自由横向于第一旋转轴线（B）延伸的多个致动臂（70-73）形成，每个致动臂承载压电材料的相应压电带（74,75）。 致动臂被分成两组，它们以相位相反的方式偏置，以绕第一旋转轴线（B）绕可倾斜结构的相反方向旋转。

公开(公告)号：EP3173235A1

公开(公告)日：2017-05-31

申请号：EP16175467.6

申请日：2016-06-21

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  COLOMBO, Lorenzo ,  PRELINI, Carlo Luigi ,  CATTANEO, Mauro

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14201 ,  B41J2/14233 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14241 ,  B41J2002/14411 ,  B41J2202/12

Abstract: A fluid ejection device (1), comprising: a first semiconductor body (2) including an actuator (3), which is operatively coupled to a chamber (6) for containing the fluid and is configured to cause ejection of the fluid; and a channel (11a) for inlet of the fluid, which extends in a first direction (Z) and has a section having a first dimension (A 1 ); and a second semiconductor body (8), which is coupled to the first semiconductor body (2) and has an ejection nozzle (13) configured to expel the fluid. The second semiconductor body (8) further comprises a first restriction channel (16), which is fluidically coupled to the inlet channel (11a), extends in a second direction (X) orthogonal to the first direction (Z) and has a respective section with a second dimension (A 3 ) smaller than the first dimension (A 1 ) so as to form a restriction between the inlet channel (11a) and the chamber (6).

Abstract translation: 1。一种流体喷射装置（1），包括：第一半导体本体（2），所述第一半导体本体包括致动器（3），所述致动器可操作地联接到用于容纳所述流体的腔室（6）并且构造成引起所述流体的喷射; 和用于流体入口的通道（11a），所述通道（11a）沿第一方向（Z）延伸并具有第一尺寸（A1）的截面; 以及第二半导体本体（8），其耦合到第一半导体本体（2）并具有构造成排出流体的喷嘴（13）。 第二半导体本体（8）还包括流体耦合到入口通道（11a）的第一限制通道（16），其沿与第一方向（Z）正交的第二方向（X）延伸并且具有相应的区段 具有小于第一尺寸（A1）的第二尺寸（A3），以在入口通道（11a）和腔室（6）之间形成限制。

公开(公告)号：EP4378883A1

公开(公告)日：2024-06-05

申请号：EP23207483.1

申请日：2023-11-02

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  QUAGLIA, Fabio ,  FERRERA, Marco ,  PRELINI, Carlo Luigi ,  SAVOIA, Alessandro Stuart

IPC: B81C1/00

CPC classification number: B81C1/00238 ,  B81C2203/079220130101

Abstract: MEMS device (1) comprising: a signal processing assembly (120); a transduction module (38; 40, 41, 56) comprising a plurality of transducer devices (56); a stiffening structure (113) at least partially surrounding each transducer device (56); one or more coupling pillars (36) for each transducer device (56), extending on the stiffening structure (113) and configured to physically and electrically couple the transduction module (38; 40, 41, 56) to the signal processing assembly (120), to carry control signals of the transducer devices (56). Each conductive coupling element (36) has a section having a shape such as to maximize the overlapping surface with the stiffening structure (113) around the respective transducer device (56). This shape includes hypocycloid with a number of cusps equal to or greater than three; triangular; quadrangular.

公开(公告)号：EP4361625A1

公开(公告)日：2024-05-01

申请号：EP23202590.8

申请日：2023-10-10

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  DEL SARTO, Marco ,  QUAGLIA, Fabio ,  DUQI, Enri

IPC: G01N29/04 ,  G01N29/07 ,  G01N29/11

CPC classification number: G01N29/043 ,  G01N29/07 ,  G01N29/11 ,  G01N2291/269720130101 ,  G01N2291/025820130101 ,  G01N2291/04420130101 ,  G01N2291/10120130101 ,  G01N2291/10620130101

Abstract: An integrated electronic system (1) is provided with a package (2) formed by a support base (4) and a coating region (5) arranged on the support base (4) and having at least a first system die (6), including semiconductor material, coupled to the support base (4) and arranged in the coating region (5). The integrated electronic system also has, within the package (2), a monitoring system (14) configured to determine the onset of defects within the coating region (5), through the emission of acoustic detection waves and the acquisition of corresponding received acoustic waves, whose characteristics are affected by, and therefore are indicative of, the aforementioned defects.