公开(公告)号：EP0809285A1

公开(公告)日：1997-11-26

申请号：EP97106274.0

申请日：1997-04-16

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Havemann, Robert H. ,  Dixit, Girish A. ,  Stoltz, Richard A.

IPC: H01L21/768

CPC classification number: H01L21/76831 ,  H01L21/0272 ,  H01L21/0331 ,  H01L21/76843 ,  H01L21/76847 ,  H01L21/76849 ,  H01L21/76873 ,  H01L21/76874 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/7688 ,  H01L23/5283 ,  H01L23/53223 ,  H01L23/53228 ,  H01L2924/0002 ,  H01L2924/00

Abstract: This is a method of forming a via 39 and a conductor 52 on dielectric layer 40 (which dielectric layer 40 is on an electronic microcircuit substrate 10 which via 39 is electrically connected to a conductive area on the surface of the substrate 10) and a structure formed thereby. The method generally comprises: forming the dielectric layer 30 over the substrate 10; forming a via opening through the insulating layer to expose at least a portion of the conductive area; selectively depositing via metal 39 in the via opening to partially fill the via opening; depositing conductor metal 52 over the dielectric 30 and the selectively deposited via metal 39; and patterning the conductor metal. Generally the via metal and the conductor metal consist essentially of aluminum, copper or combinations thereof. A seed layer 50 (selective deposition initiator) may be used, selected from the group consisting of tungsten, titanium, paladium, platinum, copper, aluminum, and combinations thereof. The conductor metal may be doped with the selectively deposited via metal being doped by dopant diffusion from the conductor metal, thereby avoiding the difficulty of depositing a doped selective metal.

Abstract translation: 这是在电介质层40（电介质层40位于电子微电路基板10上，通孔39电连接到基板10的表面上的导电区域）上形成通孔39和导体52的方法， 由此形成。 该方法通常包括：在衬底10上形成电介质层30; 通过所述绝缘层形成通孔，以暴露所述导电区域的至少一部分; 通过金属39选择性地沉积在通孔开口中以部分地填充通孔开口; 在电介质30和选择性沉积的通孔金属39上沉积导体金属52; 并图案化导体金属。 通常，通孔金属和导体金属基本上由铝，铜或其组合组成。 可以使用种子层50（选择性沉积引发剂），其选自钨，钛，adium，铂，铜，铝及其组合。 导体金属可以掺杂有选择性沉积的通孔金属，其通过掺杂剂从导体金属扩散掺杂，从而避免沉积掺杂的选择性金属的困难。

公开(公告)号：EP0687005A2

公开(公告)日：1995-12-13

申请号：EP95304002.9

申请日：1995-06-07

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Havemann, Robert H. ,  Stoltz, Richard A.

IPC: H01L21/768

CPC classification number: H01L21/76834 ,  H01L21/76831 ,  H01L21/76837

Abstract: A semiconductor device and method having a low-permittivity material between closely-spaced leads in order to decrease unwanted capacitance, while having a more structurally strong dielectric between widely-spaced leads where capacitance is not as critical. A metal layer 14 is deposited on a substrate 12 of a semiconductor wafer 10 , where the metal layer 14 has a first region 15 and a second region 17 . An insulating layer 39 is deposited on the metal layer, and the insulating layer 39 is patterned with a conductor pattern of widely-spaced leads and closely-spaced leads. Widely-spaced leads 16 are formed in the first region 15 of the metal layer 14 . At least adjacent portions of closely-spaced leads 18 are formed in the second region 17 of the metal layer 14 . A low-permittivity material 34 is deposited between adjacent portions of the closely-spaced leads 18 . A structural dielectric layer 26 is deposited between at least the widely-spaced leads. The low-permittivity material 34 is a material with a dielectric constant of less than 3. An advantage of the invention includes improved structural strength by placing structurally weak low-permittivity material only where needed, in areas having closely-spaced leads.

Abstract translation: 一种在紧密间隔的引线之间具有低介电常数材料的半导体器件和方法，以便减少不需要的电容，同时在电容不如关键的宽间距引线之间具有更结构强的电介质。 金属层14沉积在半导体晶片10的基板12上，其中金属层14具有第一区域15和第二区域17.绝缘层39沉积在金属层上，并且绝缘层39被图案化 具有广泛间隔的引线和紧密排列的引线的导体图案。 在金属层14的第一区域15中形成宽间距的引线16.至少相邻的紧密间隔的引线18形成在金属层14的第二区域17中。低介电常数材料34沉积在 紧密间隔的引线18的相邻部分。结构介电层26沉积在至少宽间隔的引线之间。 低介电常数材料34是介电常数小于3的材料。本发明的优点包括通过仅在需要时在具有紧密间隔的引线的区域中放置结构弱的低介电常数材料来提高结构强度。

公开(公告)号：EP0663669B1

公开(公告)日：2002-10-02

申请号：EP95300197.1

申请日：1995-01-12

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Magel, Gregory A. ,  Stoltz, Richard A.

IPC: G11C17/16

CPC classification number: G11C17/16

公开(公告)号：EP0547601B1

公开(公告)日：1998-09-02

申请号：EP92121488.8

申请日：1992-12-17

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Stoltz, Richard A.

IPC: H04N9/31

CPC classification number: G09G3/346 ,  G02B26/0841 ,  G09G3/2077 ,  H04N5/7458 ,  H04N9/3126

公开(公告)号：EP0775669A2

公开(公告)日：1997-05-28

申请号：EP96118275.5

申请日：1996-11-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Smith, Douglas M. ,  Johnston, Gregory P. ,  Ackerman, William C. ,  Jeng, Shin-Puu ,  Gnade, Bruce E. ,  Stoltz, Richard A. ,  Maskara, Alok ,  Ramos, Teresa

IPC: C01B13/32 ,  B01J13/00

CPC classification number: H01L21/02126 ,  B01J13/0091 ,  C01B33/1585 ,  C03C1/008 ,  C03C17/25 ,  C03C2217/213 ,  C03C2218/113 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/31695

Abstract: An aerogel precursor sol is disclosed herein. This aerogel precursor sol comprises a metal-based aerogel precursor reactant and a first solvent comprising a polyol; wherein, the molar ratio of the first solvent molecules to the metal atoms in the reactant is at least 1 : 16 . Preferably, the first solvent is glycerol. Preferably, the aerogel precursor reactant may selected from the group consisting of metal alkoxides, at least partially hydrolyzed metal alkoxides, particulate metal oxides, and combinations thereof. Typically, the molar ratio of the first solvent molecules to the metal atoms in the reactant is no greater than 12 : 1, and preferably, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 1 : 2 and 12 : 1. In some embodiments, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 2.5 :1 and 12:1. In some embodiments, the first solvent comprises a glycol. In some embodiments, the reactant is tetraethoxysilane that may be at least partially hydrolyzed. In some embodiments, the first polyol is selected from the group consisting of 1,2,4-butanetriol; 1,2,3- butanetriol; 2 methyl-propanetriol; and 2-(hydroxymethyl)-1,3-propanediol; 1-4, 1-4, butanediol; and 2-methyl-1,3-propanediol, and combinations thereof. This invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, aged, and dried without atmospheric controls. In another aspect, this invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, rapidly aged at an elevated temperature, and dried with only passive atmospheric controls, such as limiting the volume of the aging chamber.

Abstract translation: 本文公开了一种气凝胶前体溶胶。 该气凝胶前体溶胶包括金属基气凝胶前体反应物和包含多元醇的第一溶剂; 其中，反应物中第一溶剂分子与金属原子的摩尔比为至少1:16。 优选地，第一溶剂是甘油。 优选地，气凝胶前体反应物可以选自金属醇盐，至少部分水解的金属醇盐，颗粒金属氧化物及其组合。 通常，反应物中第一溶剂分子与金属原子的摩尔比不大于12:1，并且优选地，反应物中第一溶剂分子与金属原子的摩尔比在1:2和12之间 在一些实施方案中，反应物中第一溶剂分子与金属原子的摩尔比为2.5:1至12:1。 在一些实施方案中，第一溶剂包含二醇。 在一些实施方案中，反应物可以是至少部分水解的四乙氧基硅烷。 在一些实施方案中，第一多元醇选自1,2,4-丁三醇; 1,2,3-丁三醇; 2甲基 - 丙三醇; 和2-（羟甲基）-1,3-丙二醇; 1-4,1-4，丁二醇; 和2-甲基-1,3-丙二醇及其组合。 本发明允许控制孔隙率的薄膜纳米多孔气凝胶沉积，凝胶化，老化和干燥而无需大气控制。 另一方面，本发明允许控制的孔隙率薄膜纳米多孔气凝胶沉积，凝胶化，在​​高温下快速老化，并且仅用无源大气控制干燥，例如限制老化室的体积。

公开(公告)号：EP0547599A3

公开(公告)日：1993-09-08

申请号：EP92121486.2

申请日：1992-12-17

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Stoltz, Richard A.

IPC: H04N3/08 ,  H04N5/30

CPC classification number: H04N3/08

Abstract: An apparatus and method for capturing an image, using a spatial light modulator (SLM) 11 and a single-element sensor 15. The SLM 11 is an array of individually switchable pixel elements, which reflect light toward the sensor if switched to an "on" position. As each pixel element is switched on, light from that pixel element is directed to the sensor 15. For each pixel element, the sensor 15 generates a signal proportional to the light associated with that pixel element, the result being a series of signals representing at least one image frame. The process may be repeated for a number of image frames for generating moving pictures. The SLM is a deformable mirror device.

公开(公告)号：EP0547601A2

公开(公告)日：1993-06-23

申请号：EP92121488.8

申请日：1992-12-17

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Stoltz, Richard A.

IPC: H04N9/31

CPC classification number: G09G3/346 ,  G02B26/0841 ,  G09G3/2077 ,  H04N5/7458 ,  H04N9/3126

Abstract: A color display system (10) for transforming pixel data, where each of three primary colors is represented by a value for its intensity, into an image. Three light sources, (11a - 11c), one for each primary color, each illuminate a spatial light modulator (SLM) (12a - 12c), such as a deformable mirror device. Each of these SLMs (12a - 12c) is operated so that it reflects an amount of light corresponding to the intensity of the pixel currently being displayed. The light thus regulated is linearized into a single beam of mixed-color light using mirrors, (14a, 14b), and lens (15), and directed to an addressing SLM (13). Addressing SLM (13) is operated so that only an element corresponding to the pixel being displayed is "on". The addressing SLM (13) reflects the mixed-color light for that pixel to a photosensitive surface (18).

Abstract translation: 一种彩色显示系统（10），用于将三个原色中的每一个由其强度值表示的像素数据变换为图像。 （11a-11c），每个原色一个（11a-11c）各自照亮空间光调制器（SLM）（12a-12c），诸如可变形反射镜装置。 操作这些SLM（12a-12c）中的每一个，使得其反映与当前正在显示的像素的强度对应的光量。 这样调节的光线使用反射镜（14a，14b）和透镜（15）被线性化成单个混合色光束，并被引导到寻址SLM（13）。 操作SLM（13）的操作使得仅对应于正被显示的像素的元素“开”。 寻址SLM（13）将该像素的混合色反射到感光表面（18）。