13.
    发明专利
    未知

    公开(公告)号:NO20054579L

    公开(公告)日:2005-10-05

    申请号:NO20054579

    申请日:2005-10-05

    Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

    14.
    发明专利
    未知

    公开(公告)号:FI20030338A0

    公开(公告)日:2003-03-05

    申请号:FI20030338

    申请日:2003-03-05

    Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

    15.
    发明专利
    未知

    公开(公告)号:FI20096034A

    公开(公告)日:2011-04-09

    申请号:FI20096034

    申请日:2009-10-08

    Abstract: A device (100) harvests energy from vibration and/or strain and utilizes both capacitive (102a, 102b) and piezoelectric elements (105). The principle of operation is out-of-plane capacitive harvester, where the bias voltage for the capacitive element is generated with a piezoelectric element (105). The device utilizes a thin dielectric film (104) between the capacitor plates (102a, 102b) maximizing the harvested energy and enabling the harvester operation in semi-contact mode so that short circuits are prevented. For example when utilized in a wheel or the like, the capacitor is closed and opened at every strike or every turn of a wheel being thus independent of the harvester's mechanical resonance frequency.

    16.
    发明专利
    未知

    公开(公告)号:FI119728B

    公开(公告)日:2009-02-27

    申请号:FI20055618

    申请日:2005-11-23

    Inventor: KUISMA HEIKKI

    Abstract: The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises a microelectromechanical chip part (46), sealed by means of a cover part (24), (28), (33), (41), (47), (48), and an electronic circuit part (64), (74), suitably bonded to each other. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.

    17.
    发明专利
    未知

    公开(公告)号:FI20055323A

    公开(公告)日:2007-03-05

    申请号:FI20055323

    申请日:2005-06-17

    Inventor: KUISMA HEIKKI

    Abstract: The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide a capacitive acceleration sensor, which is applicable for use in small capacitive acceleration sensor solutions, and which, in particular, is applicable for use in small and extremely thin capacitive acceleration sensor solutions measuring acceleration in relation to several axes.

    METHOD OF MANUFACTURING A CAPACITIVE ACCELERATION SENSOR, AND A CAPACITIVE ACCELERATION SENSOR

    公开(公告)号:CA2610185A1

    公开(公告)日:2006-12-21

    申请号:CA2610185

    申请日:2006-06-13

    Inventor: KUISMA HEIKKI

    Abstract: The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide a capacitive acceleration sensor, which is applicable for use in small capacitive acceleration sensor solutions, and which, in particular, is applicable for use in small and extremely thin capacitive acceleration sensor solutions measuring acceleration in relation to several axes.

    19.
    发明专利
    未知

    公开(公告)号:FI20065484A0

    公开(公告)日:2006-07-07

    申请号:FI20065484

    申请日:2006-07-07

    Abstract: The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises, suitably bonded to each other, a microelectromechanical chip part sealed by a cover part, and at least one electronic circuit part. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.

    20.
    发明专利
    未知

    公开(公告)号:NO20080334L

    公开(公告)日:2008-03-14

    申请号:NO20080334

    申请日:2008-01-16

    Inventor: KUISMA HEIKKI

    Abstract: The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide a capacitive acceleration sensor, which is applicable for use in small capacitive acceleration sensor solutions, and which, in particular, is applicable for use in small and extremely thin capacitive acceleration sensor solutions measuring acceleration in relation to several axes.

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