公开(公告)号：JP2011022149A

公开(公告)日：2011-02-03

申请号：JP2010173006

申请日：2010-07-30

Applicant: Vti Technologies Oy ,  ヴェーテーイー テクノロジーズ オサケユキチュア

Inventor： KUISMA HEIKKI ,  LAHDENPERA JUHA ,  MUTIKAINEN RISTO

IPC: G01P15/125 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0013 ,  B81B2201/0235 ,  B81C1/0096 ,  B81C2201/112 ,  G01P15/08 ,  G01P15/0802

Abstract: PROBLEM TO BE SOLVED: To provide an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.
SOLUTION: This capacitive acceleration sensor includes a pair of electrodes composed of a movable electrode (4) and a stationary electrode (5), and, related to the pair of electrodes, an isolator protrusion (6) having a diamond-like DLC (Diamond-like Carbon) coating.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种改进的，更耐用的传感器结构，其耐受比过去结构更好的过载情况下的磨损。 解决方案：该电容式加速度传感器包括由可动电极（4）和固定电极（5）组成的一对电极，并且与该对电极相关联，具有菱形的隔离突起（6） DLC（类金刚石碳）涂层。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：FI119785B

公开(公告)日：2009-03-13

申请号：FI20041229

申请日：2004-09-23

Applicant: VTI TECHNOLOGIES OY

Inventor： RUOHIO JAAKKO ,  MUTIKAINEN RISTO

IPC: G01L9/12 ,  G01L20060101 ,  G01L9/00 ,  G01P3/483 ,  G01P15/08 ,  G01P15/125

Abstract: The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.

公开(公告)号：AU2003202615A1

公开(公告)日：2003-09-04

申请号：AU2003202615

申请日：2003-02-10

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERA JUHA ,  MUTIKAINEN RISTO

IPC: G01L9/00 ,  G01L19/04 ,  G01P15/08 ,  G01P15/125 ,  G01L9/12

Abstract: A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial area formed under the conducting electrode, and a thickness (d 2 ) of the partial area of the insulating layer is less than a thickness (d 1 ) of the support areas of the insulating area.

公开(公告)号：FI119527B

公开(公告)日：2008-12-15

申请号：FI20030338

申请日：2003-03-05

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERAE JUHA ,  MUTIKAINEN RISTO

IPC: G01P15/125 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

公开(公告)号：FI20041229A

公开(公告)日：2006-03-24

申请号：FI20041229

申请日：2004-09-23

Applicant: VTI TECHNOLOGIES OY

Inventor： RUOHIO JAAKKO ,  MUTIKAINEN RISTO

IPC: G01L9/12 ,  G01L20060101 ,  G01L9/00 ,  G01P3/483 ,  G01P15/08 ,  G01P15/125

Abstract: The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.

公开(公告)号：NO20054579A

公开(公告)日：2005-10-05

申请号：NO20054579

申请日：2005-10-05

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERA JUHA ,  MUTIKAINEN RISTO

IPC: G01P15/08 ,  B81B3/00 ,  B81C1/00 ,  G01P15/125 ,  B81B7/00

CPC classification number: G01P15/125 ,  B81B3/0013 ,  B81B2201/0235 ,  B81C1/0096 ,  B81C2201/112 ,  G01P15/08 ,  G01P15/0802

公开(公告)号：CH697268B1

公开(公告)日：2008-07-31

申请号：CH14292004

申请日：2004-02-11

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERAE JUHA ,  MUTIKAINEN RISTO

IPC: G01P15/125 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08

公开(公告)号：NO20054579L

公开(公告)日：2005-10-05

申请号：NO20054579

申请日：2005-10-05

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERA JUHA ,  MUTIKAINEN RISTO

IPC: G01P15/08 ,  B81B3/00 ,  B81C1/00 ,  G01P15/125 ,  B81B7/00

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

公开(公告)号：FI20030338A0

公开(公告)日：2003-03-05

申请号：FI20030338

申请日：2003-03-05

Applicant: VTI TECHNOLOGIES OY

Inventor： KUISMA HEIKKI ,  LAHDENPERAE JUHA ,  MUTIKAINEN RISTO

IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01P

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

公开(公告)号：DE112004000353T5

公开(公告)日：2006-01-26

申请号：DE112004000353

申请日：2004-02-11

Applicant: VTI TECHNOLOGIES OY VANTAA

Inventor： KUISMA HEIKKI ,  LAHDENPERAE JUHA ,  MUTIKAINEN RISTO

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.