公开(公告)号：DE60212229D1

公开(公告)日：2006-07-27

申请号：DE60212229

申请日：2002-03-19

Applicant: XEROX CORP

Inventor： GULVIN PETER M ,  CHEN JINGKUANG

IPC: B81B7/00 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  B81C1/00

Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.

公开(公告)号：DE60205413D1

公开(公告)日：2005-09-15

申请号：DE60205413

申请日：2002-01-18

Applicant: XEROX CORP

Inventor： GULVIN PETER M ,  EKLUND ELLIOTT A

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00 ,  F04B43/04 ,  H04R7/08 ,  H04R19/00

Abstract: A method for fabricating a membrane (50) having a corrugated, multi-layer structure, comprising the steps of: providing a substrate (20) having an insulator layer (30) on the top surface of the substrate (20), a conductive layer (40) on the insulator layer, a sacrificial layer (206) on said conductive layer (40), and a second conductive layer (202); patterning a series of etch holes (205) in the second conductive layer (202) to allow release etchant to have access to a second sacrificial layer (206) ; depositing the second sacrificial layer (206) onto said second conductive layer (202) so that the series of holes (205) are filled with the second sacrificial layer (206) ; patterning the second sacrificial layer with a radial and/or concentric grid pattern so that a third conductive layer (201) when deposited will form the support structure and top portion of the corrugated structure; depositing the third conductive layer (201) so that the grid pattern is filled in and is in contact with the second conductive layer (202) and; removing the first and second sacrificial layers (206) by immersing the device in a release etchant.

公开(公告)号：CA2929424C

公开(公告)日：2018-06-26

申请号：CA2929424

申请日：2016-05-09

Applicant: XEROX CORP

Inventor： NYSTROM PETER J ,  MANDEL BARRY P ,  HAYS ANDREW W ,  MA JUN ,  MANTELL DAVID ALLEN ,  REDDING GARY D ,  GULVIN PETER M

IPC: B41J2/04 ,  B41J2/175

Abstract: A pin actuated printhead includes an orifice through which a material is ejected, a chamber to hold the material to be ejected, a channel connecting the chamber to the orifice, and an actuated pin, to enter the orifice and to eject the material from the orifice. The printhead is configured to eject a material with a viscosity of 10,000 cP or more at an elevated temperature.

公开(公告)号：CA2929424A1

公开(公告)日：2016-11-20

申请号：CA2929424

申请日：2016-05-09

Applicant: XEROX CORP

Inventor： NYSTROM PETER J ,  MANDEL BARRY P ,  HAYS ANDREW W ,  MA JUN ,  MANTELL DAVID ALLEN ,  REDDING GARY D ,  GULVIN PETER M

IPC: B41J2/04 ,  B41J2/175

Abstract: A pin actuated printhead includes an orifice through which a material is ejected, a chamber to hold the material to be ejected, a channel connecting the chamber to the orifice, and an actuated pin, to enter the orifice and to eject the material from the orifice. The printhead is configured to eject a material with a viscosity of 10,000 cP or more at an elevated temperature.

公开(公告)号：DE602004015521D1

公开(公告)日：2008-09-18

申请号：DE602004015521

申请日：2004-03-19

Applicant: XEROX CORP

Inventor： KUBBY JOEL A ,  FEINBERG KATHLEEN A ,  GERMAN KRISTINE A ,  GULVIN PETER M ,  MA JUN ,  LIN PINYEN

IPC: G02B6/35 ,  G02B26/02 ,  B81B3/00 ,  G02B6/12

公开(公告)号：DE60134106D1

公开(公告)日：2008-07-03

申请号：DE60134106

申请日：2001-10-03

Applicant: XEROX CORP

Inventor： KUBBY JOEL A ,  EKLUND ELLIOTT A ,  GULVIN PETER M

IPC: B41J2/045 ,  B41J2/14 ,  B41J2/055 ,  B81B3/00 ,  F04B43/04 ,  H02N1/00

公开(公告)号：DE60128440D1

公开(公告)日：2007-06-28

申请号：DE60128440

申请日：2001-11-27

Applicant: MICROSCAN SYSTEMS INC ,  XEROX CORP

Inventor： SCHARF BRUCE R ,  GULVIN PETER M ,  CHEN JINGKUANG ,  KUBBY JOEL A ,  LIN CHUANG-CHIA ,  TRAN ALEX T

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/762 ,  H01L27/14

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.

公开(公告)号：DE60128437D1

公开(公告)日：2007-06-28

申请号：DE60128437

申请日：2001-11-27

Applicant: MICROSCAN SYSTEMS INC ,  XEROX CORP

Inventor： SCHARF BRUCE R ,  KUBBY JOEL A ,  LIN CHUANG-CHIA ,  TRAN ALEX T ,  ZOSEL ANDREW J ,  GULVIN PETER M ,  CHEN JINGKUANG

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/762 ,  H01L27/14

Abstract: The present invention provides a micromechanical or microoptomechanical structure produced by a process comprising defining the structure in a single-crystal silicon layer separated by an insulator layer from a substrate layer; selectively etching the single crystal silicon layer; depositing and etching a polysilicon layer on the insulator layer, with remaining polysilicon forming mechanical elements of the structure; metalizing a backside of the structure; and releasing the formed structure.

公开(公告)号：CA2375712C

公开(公告)日：2005-01-25

申请号：CA2375712

申请日：2002-03-11

Applicant: XEROX CORP

Inventor： GULVIN PETER M ,  CHEN JINGKUANG

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  B81B7/00 ,  B81C5/00 ,  B81B7/02

Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructu re may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from t he effects of electromagnetic interference or conductive fluids.

公开(公告)号：CA2461327A1

公开(公告)日：2004-09-19

申请号：CA2461327

申请日：2004-03-16

Applicant: XEROX CORP

Inventor： LIN PINYEN ,  KUBBY JOEL A ,  GERMAN KRISTINE A ,  MA JUN ,  FEINBERG KATHLEEN A ,  GULVIN PETER M

IPC: G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35 ,  H04Q3/52 ,  B81B7/02

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M .times. N optical signal switching system. The optical MEMS switch comprises a plurali ty of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. T he optical MEMS switch utilizes a latching mechanism in association with a thermal dri ve actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs ). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.