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    11.
    发明专利
    未知

    公开(公告)号：DE60118127D1

    公开(公告)日：2006-05-11

    申请号：DE60118127

    申请日：2001-09-07

    Applicant: XEROX CORP

    Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

    IPC: G02B26/02 ,  G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array of micro electromechanical systems (MEMS) tilt mirrors (104) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a glass substrate

    12.
    发明专利
    未知

    公开(公告)号：DE60107518T2

    公开(公告)日：2005-05-12

    申请号：DE60107518

    申请日：2001-09-07

    Applicant: XEROX CORP

    Inventor： PEETERS ERIC ,  ROSA MICHEL A

    IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can be tilted about two non-colinear axes and is suspended by a plurality of suspension arms (450) attached to a silicon on insulator substrate. Each of the plurality of suspension arms (450) comprises a layer with a built-in stress gradient deposited thereon which serves to automatically raise the MEMS tilt mirrors (106) during a release etch in the fabrication phase.

    13.
    发明专利
    未知

    公开(公告)号：DE60129914D1

    公开(公告)日：2007-09-27

    申请号：DE60129914

    申请日：2001-11-28

    Applicant: XEROX CORP

    Inventor： SUN DECAI ,  ROSA MICHEL A

    IPC: B81B3/00 ,  G02B26/08 ,  B81B7/00

    Abstract: Provided is a ribbon structure which may be used as part of a micro-assembly including a micro-device formed on or in a device layer of a single crystal silicon substrate. The ribbon structure is also formed in the device layer, where the ribbon structure is thinned to a thickness less than the thickness of the micro-device. The ribbon structure has an electrical conductive material deposited on its surface. When implemented as part of the micro-assembly, a first end of the micro-device and a first end of a ribbon structure are interconnected, wherein the ribbon structure and out-of-plane device are formed as a single piece.

    14.
    发明专利
    未知

    公开(公告)号：DE60126389T2

    公开(公告)日：2007-08-23

    申请号：DE60126389

    申请日：2001-11-01

    Applicant: XEROX CORP

    Inventor： STREET ROBERT A ,  PEETERS ERIC ,  ROSA MICHEL A ,  LU JENG PING ,  CHUA CHRISTOPHER L

    IPC: G02B26/08 ,  H04Q11/00 ,  G02B6/35

    Abstract: An optical cross switch including an improved system to align optical components is described. The system utilizes a highly transmissive sensor (170) positioned in the optical path of an optical signal to determine the precise position of the optical signal. A feedback loop uses output from the highly transmissive sensor (170) to readjust elements (128,136) that maintain the optical signal in a desired position. The current system is particularly suitable for use in an optical cross switch.

    16.
    发明专利
    未知

    公开(公告)号：DE60118678T2

    公开(公告)日：2006-08-31

    申请号：DE60118678

    申请日：2001-09-07

    Applicant: XEROX CORP

    Inventor： ROSA MICHEL A ,  PEETERS ERIC

    IPC: G02B26/02 ,  G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a silicon substrate.

    17.
    发明专利
    未知

    公开(公告)号：DE60118127T2

    公开(公告)日：2006-08-24

    申请号：DE60118127

    申请日：2001-09-07

    Applicant: XEROX CORP

    Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

    IPC: G02B26/02 ,  G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array of micro electromechanical systems (MEMS) tilt mirrors (104) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a glass substrate

    19.
    发明专利
    未知

    公开(公告)号：DE60126389D1

    公开(公告)日：2007-03-22

    申请号：DE60126389

    申请日：2001-11-01

    Applicant: XEROX CORP

    Inventor： STREET ROBERT A ,  PEETERS ERIC ,  ROSA MICHEL A ,  LU JENG PING ,  CHUA CHRISTOPHER L

    IPC: G02B26/08 ,  H04Q11/00 ,  G02B6/35

    Abstract: An optical cross switch including an improved system to align optical components is described. The system utilizes a highly transmissive sensor (170) positioned in the optical path of an optical signal to determine the precise position of the optical signal. A feedback loop uses output from the highly transmissive sensor (170) to readjust elements (128,136) that maintain the optical signal in a desired position. The current system is particularly suitable for use in an optical cross switch.

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