VARIABLE ATTENUATION OF FREE-SPACE LIGHT BEAMS

    公开(公告)号:CA2401563A1

    公开(公告)日:2001-09-27

    申请号:CA2401563

    申请日:2001-03-16

    Applicant: XROS INC

    Abstract: One aspect is a method for controllably attenuating the beam of light (108) coupled between incoming and outgoing optical fibers (106) by misaligning mirror surfaces (116a, 116b) included of an optical switching module (100). Misalignment of the mirror surfaces (116a and 116b) causes only a portion of the beam of light (108) propagating along the incoming optical fiber (106), which is less than when the light beam deflectors' mirror surfaces (116) are precisely aligned, to propagate along the outgoing optical fiber (108). Thus , the optical switching module (100) controllably attenuates the beam of light (108) coupled between the incoming and the outgoing optical fibers (106). Another aspect is a variable-optical-attenuator ("VOA") (212) that includes an optically reflective membrane (222) upon which the beam of light (108) impinges. Application of an electrostatic field between an adjacent electrod e (228) and the membrane (222) deforms the membrane (222) thereby attenuating an impinging beam of light (108).

    TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS
    13.
    发明申请
    TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS 审中-公开
    二维微镜阵列增强

    公开(公告)号:WO0161400A3

    公开(公告)日:2003-07-10

    申请号:PCT/US0105309

    申请日:2001-02-16

    CPC classification number: G02B26/085 G02B26/0841

    Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.

    Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中,用于静电偏转的电极设置在被加工,附接或模制成基底的锥形或准圆锥形实体上。 扭转传感器(244)沿旋转轴提供以控制象限偏转电极的偏转。 屏蔽传感器结构(240)包括硅层(241),绝缘层(242)和金属层(243)。 该结构还包括在硅层(241)中的传感器注入电阻器(244)和施加在传感器注入电阻器(244)上方以稳定传感器输出并消除光敏感的屏蔽件(245)。

    IMPROVED HANDHELD DOCUMENT SCANNER
    14.
    发明申请
    IMPROVED HANDHELD DOCUMENT SCANNER 审中-公开
    改进的手持扫描仪

    公开(公告)号:WO9905635A9

    公开(公告)日:1999-07-08

    申请号:PCT/US9815509

    申请日:1998-07-23

    Applicant: XROS INC

    Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

    Abstract translation: 用于扫描器(100)的文件传送装置具有邻近文件(134)设置的柔性细长的手指(226),并且施加到手指(226)的力促使手指(226)上的齿(233)接触 其中文档(134)沿着通过扫描器(100)的路径敦促文档(134)。 向手指(226)施加力的压电板(222)仅需要少量的电力。 为了横穿扫描器(100),文档(134)也可以沿着引导件(272)手动馈送。 沿着由文件(134)穿过的路径设置的第一和第二速度感测检测器(276a和276b)允许扫描器(100)确定手动馈送的文件(134)穿过扫描仪(100)的速度, 。 为了节省电能,扫描器(100)还包括用于在存在待扫描的文件(134)时启动扫描器(100)的原稿存在检测器(274)。

    IMPROVED HANDHELD DOCUMENT SCANNER
    15.
    发明申请
    IMPROVED HANDHELD DOCUMENT SCANNER 审中-公开
    改进的手持式文档扫描仪

    公开(公告)号:WO9905635A2

    公开(公告)日:1999-02-04

    申请号:PCT/US9815509

    申请日:1998-07-23

    Applicant: XROS INC

    Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

    Abstract translation: 用于扫描器(100)的文件传送器具有邻近文件(134)设置的柔性细长指状件(226),并且施加到指状件(226)的力促使指状件(226)上的齿(233)接触 与沿着通过扫描仪(100)的路径推动文件(134)的文件(134)。 将力施加到手指(226)的压电板(222)仅需要少量的电力。 为了穿过扫描仪(100),文件(134)也可以沿着引导件(272)手动馈送。 沿着由文件(134)横穿的路径设置的第一和第二速度感测检测器(276a和276b)允许扫描仪(100)确定手动馈送文件(134)穿过扫描仪(100)的速度, 。 为了节省电能,扫描仪(100)还包括文件存在检测器(274),用于当待扫描文件(134)存在时激活扫描仪(100)。

    FLEXIBLE, MODULAR, COMPACT FIBER OPTIC SWITCH

    公开(公告)号:CA2344487C

    公开(公告)日:2004-11-30

    申请号:CA2344487

    申请日:1999-09-15

    Applicant: XROS INC

    Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) tha t receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinate s with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106).

    MICROMACHINED MEMBERS COUPLED FOR RELATIVE ROTATION BY TORSIONAL FLEXURE HINGES

    公开(公告)号:CA2340192A1

    公开(公告)日:2000-03-09

    申请号:CA2340192

    申请日:1999-09-02

    Applicant: XROS INC

    Abstract: A monolithically fabricated micromachined structure couples a reference fram e (56) to a dynamic plate (58). Performance of torsional oscillators or scanne rs benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segmen t (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

    COMPACT DOCUMENT SCANNER OR PRINTER ENGINE
    18.
    发明公开
    COMPACT DOCUMENT SCANNER OR PRINTER ENGINE 失效
    紧凑型扫描仪或打印机

    公开(公告)号:EP0870212A4

    公开(公告)日:1999-10-06

    申请号:EP96945027

    申请日:1996-12-24

    Applicant: XROS INC

    Abstract: A compact medium scanner (100) scans a surface (132) of a medium (134) with a beam of light (106). A medium transport mechanism (202, 206) advances the surface along a medium transport path through a scanning station. A light source (104) produces a collimated beam of light (106) that impinges upon a mirror plate (112) of a micromachined torsional scanner (108). A pair of coaxially aligned torsion bars (304) support the mirror plate (112) within the torsional scanner (108). A mirror-surface drive means (306, 312) rotates the mirror plate (112) about the torsion bars (304). A single reciprocation of the mirror plate (112) by the drive means (306, 312) deflects the beam of light (106) over a fan-shaped region having a virtually fixed vertex (128) on the mirror plate (112). Scanner optics (116, 122) direct the fan-shaped region beam of light (106) onto the surface (132) of the medium (134) then present in the scanning station to thereby scan across the medium (134) with the beam of light (106).

    ADJUSTING OPERATING CHARACTERISTICS OF MICROMACHINED TORSIONAL OSCILLATORS
    19.
    发明公开
    ADJUSTING OPERATING CHARACTERISTICS OF MICROMACHINED TORSIONAL OSCILLATORS 失效
    SETTING MICRO装配式扭转振荡器的工作尺码

    公开(公告)号:EP1012890A4

    公开(公告)日:2000-06-28

    申请号:EP98915245

    申请日:1998-04-01

    Applicant: XROS INC

    Abstract: An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member (154, 54) from which project a first pair of axially aligned torsion bars (156, 56). A first dynamic member (54 or 52), coupled to and supported from the reference member (154, 54) by the torsion bars (156, 56), oscillates in one-dimension about the torsion bar's axis. A second dynamic member (52) may be supported from the first dynamic member (54) by a second pair of axially aligned torsion bars (56) for two-dimensional oscillation. The dynamic members (54, 52) respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members (54, 52) permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member (54). Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.

    INTEGRATED SILICON PROFILOMETER AND AFM HEAD
    20.
    发明公开
    INTEGRATED SILICON PROFILOMETER AND AFM HEAD 失效
    集成硅PROFILE刀和GRID PROBE

    公开(公告)号:EP0868648A4

    公开(公告)日:2000-03-01

    申请号:EP96943712

    申请日:1996-12-10

    Applicant: XROS INC

    Abstract: A topographic head (100) for profilometry and AFM supports a central paddle (108) by coaxial torsion bars (104) projecting inward from an outer frame (102). A tip (118) projects from the paddle distal from the bars. The torsion bars include an integrated paddle rotation sensor (142). An XYZ stage (200) may carry the topographic head for X, Y and Z axis translation. The XYZ stage's fixed outer base (202) is coupled to an X-axis stage (204) via a plurality of flexures (206). The X-axis stage is coupled to a Y-axis stage (212) also via a plurality of flexures (214). One of each set of flexures includes a shear stress sensor (222). A Z-axis stage (238) may also be included to provide an integrated XYZ scanning stage. The topographic head's frame, bars and paddle, and the XYZ stage's stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer (252a, 252b, 262).

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