線性聚焦光束橢圓測量儀 LINEAR FOCUSED-BEAM ELLIPSOMETER
    11.
    发明专利
    線性聚焦光束橢圓測量儀 LINEAR FOCUSED-BEAM ELLIPSOMETER 审中-公开
    线性聚焦光束椭圆测量仪 LINEAR FOCUSED-BEAM ELLIPSOMETER

    公开(公告)号:TW200925567A

    公开(公告)日:2009-06-16

    申请号:TW097143703

    申请日:2008-11-12

    IPC: G01J

    CPC classification number: G01B11/0641 G01N21/211 G01N21/8422

    Abstract: 本發明係關於一種橢圓測量儀(ellipsometer),且更具體而言,係關於一種線性聚焦光束橢圓測量儀(linear focused-beam ellipsometer),其利用一圓柱光學系統(cylindrical optical system)將光線性地聚焦至一樣本上並接著量測反射光之偏振狀態之變化。該線性聚焦光束橢圓測量儀包含:一分光部件(beam splitting part),用於將一光源中所產生之一光分離成一偏振光;一聚焦部件(focusing part),用於將由該分光部件所分離之光聚焦至一樣本上;以及一光偵測部件(photodetection part),用於偵測自該樣本反射後穿過該聚焦部件及該分光部件之光,其中該聚焦部件係線性地聚焦該分離光至該樣本。該分光部件所分離之光係線性地聚焦至複數個樣本上,並針對多個入射角量測反射光之偏振狀態之變化。因此,可同時量測複數個樣本。

    Abstract in simplified Chinese: 本发明系关于一种椭圆测量仪(ellipsometer),且更具体而言,系关于一种线性聚焦光束椭圆测量仪(linear focused-beam ellipsometer),其利用一圆柱光学系统(cylindrical optical system)将光线性地聚焦至一样本上并接着量测反射光之偏振状态之变化。该线性聚焦光束椭圆测量仪包含:一分光部件(beam splitting part),用于将一光源中所产生之一光分离成一偏振光;一聚焦部件(focusing part),用于将由该分光部件所分离之光聚焦至一样本上;以及一光侦测部件(photodetection part),用于侦测自该样本反射后穿过该聚焦部件及该分光部件之光,其中该聚焦部件系线性地聚焦该分离光至该样本。该分光部件所分离之光系线性地聚焦至复数个样本上,并针对多个入射角量测反射光之偏振状态之变化。因此,可同时量测复数个样本。

    無移動可校正與試驗之真空儀器裝置及其使用方法 VACUUM GAUGE CALIBRATION APPARATUS CAPABLE OF CALIBRATING AND TESTING WITHOUT DISPLACEMENT AND OPERATING METHOD THEREOF
    12.
    发明专利
    無移動可校正與試驗之真空儀器裝置及其使用方法 VACUUM GAUGE CALIBRATION APPARATUS CAPABLE OF CALIBRATING AND TESTING WITHOUT DISPLACEMENT AND OPERATING METHOD THEREOF 审中-公开
    无移动可校正与试验之真空仪器设备及其使用方法 VACUUM GAUGE CALIBRATION APPARATUS CAPABLE OF CALIBRATING AND TESTING WITHOUT DISPLACEMENT AND OPERATING METHOD THEREOF

    公开(公告)号:TW200912267A

    公开(公告)日:2009-03-16

    申请号:TW096143067

    申请日:2007-11-14

    IPC: G01L

    CPC classification number: G01L27/005

    Abstract: 一種無移動可校正與試驗之真空儀器裝置,其中一被校正用真空儀器連結於一真空裝置,以進行校正與試驗。該真空儀器裝置係由一真空遮斷用閥及一移動用真空儀器校正裝置所構成。該真空遮斷用閥係開關連結該真空裝置與被校正用真空儀器之管路,且該移動用真空儀器校正裝置連結在該被校正用真空儀器;該移動用真空儀器校正裝置在該被校正用真空儀器之一側,該移動用真空儀器校正裝置設有依序連結的一基準用真空儀器、一真空連結用閥、一真空室、一閘閥及一排氣裝置;且該移動用真空儀器校正裝置另包含一瓦斯供給源、一洩漏閥及一室用真空儀器,該瓦斯供給源與該真空室連結,以使該真空室產生壓力;該洩漏閥控制該瓦斯供給源內供給至該真空室之瓦斯流動;及該室用真空儀器量測該真空室內之真空度。

    Abstract in simplified Chinese: 一种无移动可校正与试验之真空仪器设备,其中一被校正用真空仪器链接于一真空设备,以进行校正与试验。该真空仪器设备系由一真空遮断用阀及一移动用真空仪器校正设备所构成。该真空遮断用阀系开关链接该真空设备与被校正用真空仪器之管路,且该移动用真空仪器校正设备链接在该被校正用真空仪器;该移动用真空仪器校正设备在该被校正用真空仪器之一侧,该移动用真空仪器校正设备设有依序链接的一基准用真空仪器、一真空链接用阀、一真空室、一闸阀及一排气设备;且该移动用真空仪器校正设备另包含一瓦斯供给源、一泄漏阀及一室用真空仪器,该瓦斯供给源与该真空室链接,以使该真空室产生压力;该泄漏阀控制该瓦斯供给源内供给至该真空室之瓦斯流动;及该室用真空仪器量测该真空室内之真空度。

    INSPECTION APPARATUS FOR THERMO-HYGROMETER BASED ON PHASE CHANGE AND METHODS FOR CONTROLLING AND INSPECTING THE SAME
    13.
    发明申请
    INSPECTION APPARATUS FOR THERMO-HYGROMETER BASED ON PHASE CHANGE AND METHODS FOR CONTROLLING AND INSPECTING THE SAME 审中-公开
    基于相位变化的温湿度计检测装置及其控制和检查方法

    公开(公告)号:WO2015076502A1

    公开(公告)日:2015-05-28

    申请号:PCT/KR2014/009841

    申请日:2014-10-20

    CPC classification number: G01W1/18 G01K15/007 G01W1/02

    Abstract: Disclosed therein are an inspection apparatus for a thermo-hygrometer based on phase change and methods for controlling and inspecting the same which can simultaneously inspect a thermometer and a hygrometer through a simple method using a phase change of reactants. The thermo-hygrometer based on phase change includes: reactants of at least two kinds; a plurality of cylinder type cells; a reactor body having a temperature sensor hole and a plurality of cell holes; a flow pipe in which a first gas circulates by a circulation pump; a relative humidity chamber which has a relative humidity sensor disposed therein; and a temperature control unit which is mounted below the reactor body, wherein when a phase change of a first reactant is induced, the relative humidity sensor is inspected based on the relative humidity of the first gas, and the temperature sensor is inspected based on the phase change temperature of the first reactant.

    Abstract translation: 其中公开了一种基于相位变化的温湿度计的检查装置,以及通过使用反应物的相变的简单方法同时检查温度计和湿度计的方法来控制和检查温度计和湿度计的方法。 基于相变的温湿度计包括:至少两种反应物; 多个圆柱型电池; 具有温度传感器孔和多个电池孔的反应器主体; 第一气体由循环泵循环的流量管; 设置有相对湿度传感器的相对湿度室; 以及温度控制单元,其安装在所述反应器主体的下方,其中当第一反应物的相变被诱发时,基于所述第一气体的相对湿度来检查所述相对湿度传感器,并且基于所述温度传感器检查所述温度传感器 第一反应物的相变温度。

    THIN FILM SUPERCONDUCTING ACCELERATION MEASURING APPARATUS
    14.
    发明申请
    THIN FILM SUPERCONDUCTING ACCELERATION MEASURING APPARATUS 审中-公开
    薄膜超导加速度测量装置

    公开(公告)号:WO2015037874A1

    公开(公告)日:2015-03-19

    申请号:PCT/KR2014/008351

    申请日:2014-09-05

    Inventor: KIM, In-Seon

    CPC classification number: G01P15/105 G01P15/11 H01F6/04 H01F6/06

    Abstract: Provided are an acceleration measuring apparatus, a SQUID sensor module, and a fabrication method of the SQUID sensor module. The acceleration measuring apparatus includes a test mass structure with a superconducting thin film on its one surface and providing elasticity, a superconducting coil for measurement disposed on the substrate to be opposite to the one surface of the test mass structure and magnetically coupled to the test mass structure, a transformer disposed on the substrate and including a primary superconducting coil connected to the superconducting coil and a secondary superconducting coil magnetically coupled to the primary superconducting coil, an input coil disposed on the substrate and connected to the secondary superconducting coil, and a superconducting quantum interference device (SQUID) disposed on the substrate and magnetically coupled to the input coil.

    Abstract translation: 提供了SQUID传感器模块的加速度测量装置,SQUID传感器模块和制造方法。 加速度测量装置包括在其一个表面上具有超导薄膜并提供弹性的测试质量结构,用于测量的超导线圈,设置在基板上以与测试质量结构的一个表面相对并且磁耦合到测试质量 结构,设置在所述衬底上并包括连接到所述超导线圈的初级超导线圈和磁耦合到所述初级超导线圈的次级超导线圈的变压器,设置在所述衬底上并连接到所述次级超导线圈的输入线圈,以及超导 量子干涉装置(SQUID),其设置在基板上并与输入线圈磁耦合。

    APPARATUS AND METHOD FOR MANUFACTURING PHASE-TYPE DIFFRACTION ELEMENT USING LASER EXPOSURE TYPE
    15.
    发明申请
    APPARATUS AND METHOD FOR MANUFACTURING PHASE-TYPE DIFFRACTION ELEMENT USING LASER EXPOSURE TYPE 审中-公开
    使用激光曝光类型制造相型衍射元件的装置和方法

    公开(公告)号:WO2014025149A1

    公开(公告)日:2014-02-13

    申请号:PCT/KR2013/006711

    申请日:2013-07-26

    CPC classification number: G02B5/1871 G02B5/1857 G03F7/70383

    Abstract: The present invention relates to an apparatus for manufacturing a phase-type diffraction element using a direct laser exposure method, a method of manufacturing a phase-type diffraction element, and a phase-type diffraction element using a direct laser exposure method. More specifically, the present invention relates to an apparatus and method for manufacturing a phase-type diffraction element by radiating a laser beam on a substrate formed of photo-curable resin.

    Abstract translation: 本发明涉及一种使用直接激光曝光方法制造相位衍射元件的装置,相型衍射元件的制造方法和使用直接激光曝光法的相位衍射元件。 更具体地,本发明涉及通过在由光固化树脂形成的基板上照射激光束来制造相型衍射元件的装置和方法。

    DIFFRACTION GRATING SPECTROMETER
    17.
    发明申请
    DIFFRACTION GRATING SPECTROMETER 审中-公开
    衍射光谱仪

    公开(公告)号:WO2012093770A1

    公开(公告)日:2012-07-12

    申请号:PCT/KR2011/008111

    申请日:2011-10-28

    CPC classification number: G01J3/1804 G01J3/021 G01J3/0256

    Abstract: Disclosed is a diffraction grating spectrometer. The diffraction grating spectrometer obtains the high spectral resolution by using diffraction gratings having a smaller number of grating lines and low grid density. In the diffraction grating spectrometer, a beam diffracted from a small-size diffraction grating is expanded through the intensity division and wave front reconstruction by using an intensity division/wave front reconstruction unit to obtain the spectral resolution realized by a large-size diffraction grating, so that the size of the diffraction grating spectrometer is reduced.

    Abstract translation: 公开了一种衍射光栅光谱仪。 衍射光栅光谱仪通过使用具有较小数量的光栅线和低栅格密度的衍射光栅获得高光谱分辨率。 在衍射光栅光谱仪中,通过使用强度分割/波前重构单元,通过强度分割和波前重构来扩大从小尺寸衍射光栅衍射的光束,以获得由大尺寸衍射光栅实现的光谱分辨率, 使得衍射光栅光谱仪的尺寸减小。

    INTEGRATING SPHERE PHOTOMETER AND MEASURING METHOD OF THE SAME
    19.
    发明申请
    INTEGRATING SPHERE PHOTOMETER AND MEASURING METHOD OF THE SAME 审中-公开
    整合球面光电测定仪及其测量方法

    公开(公告)号:WO2011108813A2

    公开(公告)日:2011-09-09

    申请号:PCT/KR2011/000970

    申请日:2011-02-14

    CPC classification number: G01J1/04 G01J3/0254

    Abstract: An integrating sphere photometer and a measuring method of the same are provided to precisely measure a directional light source. The integrating sphere photometer includes an integrating sphere having a plurality of through-holes, a plurality of photometers disposed at the through-holes, baffles disposed in front of the photometers to be spaced apart therefrom, an auxiliary light source disposed inside the integrating sphere, an auxiliary baffle disposed in front of the auxiliary light source, and a summing unit of output signals of the photometers under the illumination of a light source to be measured disposed in the central area inside the integrating sphere.

    Abstract translation: 提供积分球光度计及其测量方法以精确测量定向光源。 积分球光度计包括具有多个通孔的积分球,设置在通孔处的多个光度计,设置在光度计前面的挡板,设置在积分球内的辅助光源, 设置在辅助光源前面的辅助挡板,以及设置在积分球内的中心区域中的被测光源的照明下的光度计的输出信号的求和单元。

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