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    FLACHSPULE UND LITHOGRAPHISCHES VERFAHREN ZUR HERSTELLUNG VON MIKROBAUTEILEN
    13.
    发明授权
    FLACHSPULE UND LITHOGRAPHISCHES VERFAHREN ZUR HERSTELLUNG VON MIKROBAUTEILEN 有权
    扁平线圈和光刻工艺用于生产微型元件

    公开(公告)号：EP1238311B1

    公开(公告)日：2006-08-02

    申请号：EP00976041.4

    申请日：2000-11-17

    Applicant: INSTITUT FÜR MIKROTECHNIK MAINZ GmbH

    Inventor： SCHMITZ, Felix ,  NIENHAUS, Matthias, Dr. ,  LACHER, Manfred

    IPC: G03F7/00 ,  B81C1/00 ,  H01F41/04

    CPC classification number: B81C99/008 ,  B81B2201/034 ,  B81C2201/032 ,  G03F7/00 ,  G03F7/0035 ,  H01F17/0006 ,  H01F41/042

    Abstract: The invention relates to a flat coil and to a lithographic method for producing microcomponents with metal component structures in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produce the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided. The invention also relates to a method for producing microcomponents with component structures of cross-linkable resist material and to a flat coil for micromotors with at least one coil layer with strip conductors in the sub-millimeter range.

    櫛歯を用いたアクチュエータ
    16.
    发明申请
    櫛歯を用いたアクチュエータ 审中-公开
    执行机构使用COMB TEETH

    公开(公告)号：WO2007114354A1

    公开(公告)日：2007-10-11

    申请号：PCT/JP2007/057145

    申请日：2007-03-30

    Applicant: パイオニア株式会社 ,  前田 孝則 ,  高橋 宏和 ,  石杜 昌弘

    Inventor： 前田 孝則 ,  高橋 宏和 ,  石杜 昌弘

    IPC: H02N1/00 ,  B81B3/00 ,  G11B9/14

    CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

    Abstract: アクチュエータ（６）は、一端側が固定部（３）の接続点（Ｃ１）に回転可能に接続され、他端側が移動部（４）の接続点（Ｃ２）に回転可能に接続された連結部（７）と、一端側が固定部（３）の接続点（Ｃ３）に回転可能に接続され、他端側が移動部（４）の接続点（Ｃ４）に回転可能に接続された連結部（８）と、基端側が櫛歯基点（Ｂ１）に接続され、先端側が櫛歯基点（Ｂ１）の旋回軌道に沿って伸びる櫛歯電極（１２）と、基端側が固定部（３）に接続され、先端側が櫛歯電極（１２）の湾曲に対応するように伸び、櫛歯電極（１２）と所定の間隔をもって対向する櫛歯電極（１３）とを備えている。

    Abstract translation: 致动器（6）包括连接部分（7），其一端可旋转地连接到固定部分（3）的连接点（C1），另一端可旋转地连接到移动部分（4）的连接点（C2） ），连接部分（8），其一端可旋转地连接到固定部分（3）的连接点（C3），另一端可旋转地连接到移动部分（4）的连接点（C4），梳子 - 具有连接到梳齿基点（B1）的根部分和沿着转动路径延伸的前端部分的电极（12）和具有连接到固定的根部的梳齿电极（13） （3），另一部分沿着梳齿电极（12）的曲线延伸并且以预定的间隙与梳齿电极（12）相对。

    SHAPED MICROCOMPONENTS VIA REACTIVE CONVERSION OF BIOLOGICALLY-DERIVED MICROTEMPLATES
    17.
    发明申请
    SHAPED MICROCOMPONENTS VIA REACTIVE CONVERSION OF BIOLOGICALLY-DERIVED MICROTEMPLATES 审中-公开
    生物微生物反应转化的形状微生物

    公开(公告)号：WO2002097054A2

    公开(公告)日：2002-12-05

    申请号：PCT/US2002/017209

    申请日：2002-05-30

    Applicant: THE OHIO STATE UNIVERSITY

    Inventor： SANDHAGE, Kenneth, H.

    IPC: C12N

    CPC classification number: G01N33/54346 ,  B81B2201/034 ,  B81B2201/035 ,  B81C1/00 ,  B81C99/0085 ,  G01N33/54353 ,  G01N33/544 ,  Y10S977/811 ,  Y10S977/84 ,  Y10S977/89 ,  Y10S977/90

    Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

    Abstract translation: 本发明集中在用于大规模生产三维微型组件的革命性的低成本（高度可扩展）方法：天然衍生的，生物催化衍生的和/或基因定制的三维微型模板的生物繁殖 （例如，硅藻的截头圆锥体，放射体的微骨架，软体动物的壳）具有所需的尺寸特征，随后将这种微模板反应转化成具有与起始微模板不同的所需组成的微组件，并具有与起始微模板类似的尺寸特征 微模板。 因为这些微型组件的形状可以通过微模板的形状的基因工程来定制，所以这种微复合材料被认为是基因工程材料（GEM）。

    APPARATUS WITH A ROTATABLE MEMS DEVICE
    18.
    发明申请
    APPARATUS WITH A ROTATABLE MEMS DEVICE 审中-公开
    具有可旋转微机电装置的装置

    公开(公告)号：WO2017065911A1

    公开(公告)日：2017-04-20

    申请号：PCT/US2016/051630

    申请日：2016-09-14

    Applicant: INTEL CORPORATION

    Inventor： HIRSHBERG, Arnon

    IPC: B81B3/00 ,  B81B7/00

    CPC classification number: G02B26/085 ,  B81B5/00 ,  B81B2201/034 ,  G02B26/105 ,  H02K33/18 ,  H02N1/006

    Abstract: Embodiments of the present disclosure are directed toward an apparatus with a rotatable MEMS device. The apparatus may include a magnetic circuit with two magnets disposed opposite each other to produce a magnetic field between the magnets. The MEMS device may be placed in a frame disposed between the magnets. The MEMS device may include a driving coil disposed around the device, and may be rotatable around a first axis of the frame, in response to application of electromagnetic force produced by interaction of electric current to pass through the driving coil, with the magnetic field. The frame may include another driving coil, and may be rotatable around a second axis orthogonal to first axis, in response to application of electromagnetic force produced by interaction of electric current to pass through the second driving coil, with the magnetic field. Other embodiments may be described and/or claimed.

    Abstract translation: 本公开的实施例针对具有可旋转MEMS装置的装置。 该设备可以包括具有彼此相对设置的两个磁体以在磁体之间产生磁场的磁路。 MEMS器件可以放置在设置在磁体之间的框架中。 MEMS装置可以包括设置在装置周围的驱动线圈，并且响应于通过电流通过驱动线圈的电流的相互作用产生的电磁力与磁场的施加，该驱动线圈可以围绕框架的第一轴线旋转。 框架可以包括另一个驱动线圈，并且可以响应于由通过第二驱动线圈的电流的相互作用产生的电磁力与磁场的施加而围绕与第一轴线正交的第二轴线旋转。 其他实施例可以被描述和/或要求保护。

    SHAPED MICROCOMPONENTS VIA REACTIVE CONVERSION OF BIOLOGICALLY-DERIVED MICROTEMPLATES
    19.
    发明申请
    SHAPED MICROCOMPONENTS VIA REACTIVE CONVERSION OF BIOLOGICALLY-DERIVED MICROTEMPLATES 审中-公开
    生物微生物反应转化的形状微生物

    公开(公告)号：WO02097054A3

    公开(公告)日：2003-02-13

    申请号：PCT/US0217209

    申请日：2002-05-30

    Applicant: UNIV OHIO STATE

    Inventor： SANDHAGE KENNETH H

    IPC: A61K9/00 ,  A61K9/14 ,  B27N3/08 ,  B81C1/00 ,  C23C16/00 ,  G01N33/543 ,  G01N33/544 ,  B29C71/00 ,  A01N1/00

    CPC classification number: G01N33/54346 ,  B81B2201/034 ,  B81B2201/035 ,  B81C1/00 ,  B81C99/0085 ,  G01N33/54353 ,  G01N33/544 ,  Y10S977/811 ,  Y10S977/84 ,  Y10S977/89 ,  Y10S977/90

    Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

    Abstract translation: 本发明集中在用于大规模生产三维微型组件的革命性的低成本（高度可扩展）方法：天然衍生的，生物催化衍生的和/或基因定制的三维微型模板的生物繁殖 （例如，硅藻的截头圆锥体，放射体的微骨架，软体动物的壳）具有所需的尺寸特征，随后将这种微模板反应转化成具有与起始微模板不同的所需组成的微组件，并具有与起始微模板类似的尺寸特征 微模板。 由于这些微型组件的形状可以通过微型模板的形状的遗传工程来定制，所以这种微复合材料被认为是基因工程材料（GEM）。

    FLAT COIL AND LITHOGRAPHIC METHOD FOR PRODUCING MICROCOMPONENTS
    20.
    发明申请
    FLAT COIL AND LITHOGRAPHIC METHOD FOR PRODUCING MICROCOMPONENTS 审中-公开
    扁平线圈和光刻工艺用于生产微型元件

    公开(公告)号：WO01037045A1

    公开(公告)日：2001-05-25

    申请号：PCT/EP2000/011447

    申请日：2000-11-17

    IPC: G03F7/40 ,  B81B1/00 ,  B81C1/00 ,  G03F7/00 ,  H01F17/00 ,  H01F41/04 ,  H02K3/26 ,  H02K15/04

    CPC classification number: B81C99/008 ,  B81B2201/034 ,  B81C2201/032 ,  G03F7/00 ,  G03F7/0035 ,  H01F17/0006 ,  H01F41/042

    Abstract: The invention relates to a flat coil and to a lithographic method for producing microcomponents with metal component structures in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produce the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided. The invention also relates to a method for producing microcomponents with component structures of cross-linkable resist material and to a flat coil for micromotors with at least one coil layer with strip conductors in the sub-millimeter range.

    Abstract translation: 公开的是一种扁平线圈和用于在亚毫米范围内生产具有金属部件的结构的微平版印刷方法，其中，抗蚀剂材料通过选择性曝光的装置构造并溶解出来的未曝光区域，并通过电镀工艺与金属之间的间隙中的抗蚀剂结构用于形成金属 器件结构被填充。 此方法应允许微部件的处理固有的分离成为可能。 这是在该微一个三维结构的金属牺牲层被制造，这限制了微组件的制备过程中实现，并且，对于微元件的分离，所述牺牲层被除去。 还提供了一种用于生产具有交联性的部件结构的微抗蚀剂微型电动机材料和扁平线圈与具有导体路径中所描述的亚毫米范围内的至少一个绕组层的方法。

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