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公开(公告)号：WO2011097382A1
公开(公告)日：2011-08-11
申请号：PCT/US2011/023607
申请日：2011-02-03
Applicant: HALLIBURTON ENERGY SERVICES, INC. , PAI, Raj , MORYS, Marian , LIEN, Phap Hung
Inventor： PAI, Raj , MORYS, Marian , LIEN, Phap Hung
IPC: G01V5/04
CPC classification number: G01J5/12 , E21B47/102 , E21B49/08 , E21B2049/085 , G01J5/14 , G01J2005/067
Abstract: In some embodiments, apparatus and systems, as well as methods, may operate to receive radiation at an active detector of a pair of radiation detectors to provide a first signal proportional to an intensity of the radiation, to receive none of the radiation at a blind detector of the pair of radiation detectors to provide a second signal proportional to the reception of no radiation, and to combine the first signal and the second signal to provide an output signal representing the difference between the first signal and the second signal. The pair of radiation detectors may comprise thermopile detectors. Combination may occur via differential amplification. Additional apparatus, systems, and methods are disclosed.
Abstract translation: 在一些实施例中，装置和系统以及方法可以操作以在一对辐射检测器的有源检测器处接收辐射，以提供与辐射的强度成比例的第一信号，以在盲人处接收不到的辐射 检测器，以提供与无辐射的接收成比例的第二信号，以及组合第一信号和第二信号以提供表示第一信号和第二信号之间的差的输出信号。 该对辐射探测器可以包括热电堆检测器。 可以通过差分放大进行组合。 公开了附加装置，系统和方法。
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12.发明申请INFRAROT-SENSORVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINER INFRAROT-SENSORVORRICHTUNG 审中-公开红外线传感器及其制造方法红外线传感器
公开(公告)号：WO2013171020A1
公开(公告)日：2013-11-21
申请号：PCT/EP2013/058134
申请日：2013-04-19
Applicant: ROBERT BOSCH GMBH
Inventor： HERRMANN, Ingo , SOMMER, Edda , SCHELLING, Christoph , RETTIG, Christian , HATTASS, Mirko
IPC: H01L27/146 , G01J5/20
CPC classification number: H01L27/14649 , G01J5/20 , G01J2005/0048 , G01J2005/067 , H01L27/14609 , H01L27/14629 , H01L27/14636 , H01L27/1467 , H01L27/14685 , H01L31/028
Abstract: Die Erfindung schlägt eine Infrarot-Sensorvorrichtung (100;200;300) vor, aufweisendein Halbleitersubstrat (1), wenigstens ein im Halbleitersubstrat (1) mikromechanisch ausgebildetes Sensorelement (2), und wenigstens ein im Halbleitersubstrat (1) mikromechanisch ausgebildetes Kalibrierungselement (3) für das Sensorelement (2), wobei auf dem Halbleitersubstrat (1) im Bereich des Sensorelements (2) und des Kalibrierungselements (3) Absorbermaterial (6) angeordnet ist, wobei im Halbleitersubstrat (1) im Wesentlichen unterhalb des Sensorelements (2) und im Wesentlichen unterhalb des Kalibrierungselements (3) jeweils eine Kaverne (8) ausgebildet ist, wobei mittels der Kavernen (8) das Sensorelement (2) und das Kalibrierungselement (3) vom übrigen Halbleitersubstrat (1) thermisch und elektrisch getrennt sind. Dadurch wird für die Infrarot-Sensorvorrichtung eine hohe Sensitivität, eine Kalibrierungsfunktionalität für das Sensorelement und eine hohes Signal-Rauschverhältnis erreicht.
Abstract translation: 本发明提出一种红外线传感器装置（100; 200; 300）之前comprisinga半导体衬底（1），至少一个在所述半导体衬底（1）微机械形成传感器元件（2），并且在半导体基板的至少一个（1）微机械形成校准元件（3） 用于传感器元件（2），其中所述半导体衬底（1）上的传感器元件（2）和校准元件的区域（3）的吸收材料（6）设置，其中，在所述半导体衬底（1）基本上是在传感器元件（2）下方，并在 在每种情况下基本上形成的校准元件（3）下方的空腔（8），其中，由所述腔体的装置（8），所述传感器元件（2）和从所述半导体衬底（1）的其余部分的校准元件（3）被热和电分离。 因此，高灵敏度，对于传感器元件的校准功能和高的信噪比为红外线传感器装置来实现。
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公开(公告)号：WO2012132316A1
公开(公告)日：2012-10-04
申请号：PCT/JP2012/001916
申请日：2012-03-21
Applicant: 三菱マテリアル株式会社 , 中村 賢蔵 , 石川 元貴 , 魚住 学司
CPC classification number: G01J5/10 , G01J5/0215 , G01J5/20 , G01J2005/067 , H01L37/02
Abstract: 軽量でかつ基板に立設させて十分な支持強度で取り付けることが容易な赤外線センサを提供する。絶縁性フィルム２と、該絶縁性フィルム２の一方の面に互いに離間させて設けられた第１の感熱素子３Ａ及び第２の感熱素子３Ｂと、絶縁性フィルム２の一方の面に形成され第１の感熱素子３Ａに接続された導電性の第１の配線膜４Ａ及び第２の感熱素子３Ｂに接続された導電性の第２の配線膜４Ｂと、第２の感熱素子３Ｂに対向して絶縁性フィルム２の他方の面に設けられた赤外線反射膜６とを備え、センサ部に対応したセンサ部用窓部８ａが形成されて絶縁性フィルムに貼り付けられた補強板８と、第１の配線膜および第２の配線膜に接続され絶縁性フィルムの端部に形成されコネクタに嵌め込み可能な第１の端子電極７Ａおよび第２の端子電極７Ｂとを備えている。
Abstract translation: 提供了一种重量轻的红外线传感器，以立式的方式设置在基板上，并且容易地以足够的支撑强度附着。 一种红外线传感器，具备：绝缘膜（2）; 设置在所述绝缘膜（2）的一个表面上以彼此分离的第一热敏元件（3A）和第二热敏元件（3B）; 形成在所述绝缘膜（2）的一个表面并连接到所述第一热敏元件（3A）的第一导电布线膜（4A）; 连接到第二热敏元件（3B）的第二导电布线膜（4B）; 以及设置在所述绝缘膜（2）的另一个表面上以与所述第二热敏元件（3B）相对的红外反射膜（6）。 所述红外线传感器还设置有：加强板（8），形成有与传感器部件对应的传感器部分窗口（8a），并附着在所述绝缘膜上; 并且分别连接到第一布线膜和第二布线膜的第一端子电极（7A）和第二端子电极（7B）形成在绝缘膜的边缘上，并且能够插入到连接器 。
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公开(公告)号：EP3204742A4
公开(公告)日：2018-05-30
申请号：EP15848474
申请日：2015-10-09
Applicant: BOSCH GMBH ROBERT
Inventor： ROCZNIK THOMAS , PURKL FABIAN , O'BRIEN GARY , FEYH ANDO , KIM BONGSANG , SAMARAO ASHWIN , YAMA GARY
CPC classification number: G01J5/06 , G01J5/0809 , G01J5/0853 , G01J5/20 , G01J5/24 , G01J2005/066 , G01J2005/067
Abstract: A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.
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公开(公告)号：EP2693178A4
公开(公告)日：2014-09-24
申请号：EP12764040
申请日：2012-03-21
Applicant: MITSUBISHI MATERIALS CORP
Inventor： NAKAMURA KENZO , ISHIKAWA MOTOTAKA , UOZUMI GAKUJI
CPC classification number: G01J5/10 , G01J5/0215 , G01J5/20 , G01J2005/067 , H01L37/02
Abstract: Provided is a lightweight infrared sensor which is readily and stably erected to a substrate. The infrared sensor includes an insulating film; a first and a second heat sensitive element are disposed on one surface of the insulating film separately; a first and second conductive film on one surface of the insulating film and are respectively connected to the first and the second heat sensitive element; and an infrared reflection film on the other surface of the insulating film so as to face the second heat sensitive element. The infrared sensor further includes a reinforcing plate on which a sensor part window corresponding to a sensor part is formed and which is adhered to the insulating film; and a first and a second terminal electrode are respectively connected to the first and the second wiring film, are formed on the edge of the insulating film.
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Patent Agency Ranking16.发明公开
公开(公告)号：EP3204742A1
公开(公告)日：2017-08-16
申请号：EP15848474.1
申请日：2015-10-09
Applicant: Robert Bosch GmbH
Inventor： ROCZNIK, Thomas , PURKL, Fabian , O'BRIEN, Gary , FEYH, Ando , KIM, Bongsang , SAMARAO, Ashwin , YAMA, Gary
CPC classification number: G01J5/06 , G01J5/0809 , G01J5/0853 , G01J5/20 , G01J5/24 , G01J2005/066 , G01J2005/067
Abstract: A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.
Abstract translation: 半导体传感器系统，特别是辐射热测量计，包括衬底，由衬底支撑的电极，与衬底隔开的吸收器，电压源和电流源。 电极可以包括镜子，或者该系统可以包括与电极分离的镜子。 吸收体的辐射吸收效率基于吸收体和反射镜之间的最小间隙距离。 电流源在吸收器结构上施加DC电流以产生指示吸收器结构吸收的辐射的信号。 电压源为电极供电以产生作用在吸收器上的调制静电场以调节最小间隙距离。 静电场包括调整吸收效率的直流分量和循环驱动吸收器的交流分量，以消极地干扰信号中的噪声。
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17.发明公开COMPENSATED OPTICAL DETECTION APPARATUS, SYSTEMS, AND METHODS 审中-公开VORRICHTUNGEN，SYSTEME UND VERFAHRENFÜRKOMPENSIERTE OPTISCHE ERKENNUNG
公开(公告)号：EP2531873A4
公开(公告)日：2017-01-25
申请号：EP11740356
申请日：2011-02-03
Applicant: HALLIBURTON ENERGY SERVICES INC
Inventor： PAI RAJ , MORYS MARIAN , LIEN PHAP HUNG
CPC classification number: G01J5/12 , E21B47/102 , E21B49/08 , E21B2049/085 , G01J5/14 , G01J2005/067
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公开(公告)号：US20190003893A1
公开(公告)日：2019-01-03
申请号：US15871033
申请日：2018-01-14
Inventor： Chao WANG , Ying DUAN , Jun HU , Zezhan ZHANG , Yang YANG , Xueke GOU , Fei WANG , Jing JIANG , Jinguang LV , Yueming WANG , Hongchuan JIANG , Li DU , Jiexiong DING , Jingqiu LIANG , Xianfu LIU , Xiaojiang SHI , Bing XIONG
CPC classification number: G01J5/0088 , F01D17/02 , F01D17/085 , F01D21/003 , F05D2270/303 , F05D2270/804 , G01J5/0022 , G01J5/52 , G01J2005/0048 , G01J2005/067
Abstract: A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).
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公开(公告)号：US20180283956A1
公开(公告)日：2018-10-04
申请号：US15997836
申请日：2018-06-05
Applicant: Melexis Technologies NV
Inventor： Carl VAN BUGGENHOUT , Ben MAES , Karel VANROYE , Stijn REEKMANS
CPC classification number: G01J5/06 , G01J5/045 , G01J5/10 , G01J2005/0048 , G01J2005/065 , G01J2005/067 , G01J2005/106
Abstract: An infrared sensor assembly for sensing infrared radiation comprises infrared sensing elements and the infrared sensing compensation elements that are different so that, for a same flux on the infrared sensing elements and the infrared sensing compensation elements, the radiation responsive element of the infrared sensing elements absorbs more radiation than the radiation responsive element of the infrared sensing compensation elements, as to receive substantially more radiation than the radiation responsive element of the infrared sensing compensation elements. An output of the sensor array is a subtractive function of a sum of the signals of the plurality of infrared sensing elements and a sum of the signals of the plurality of the infrared sensing compensation elements such that at least linear and/or non-linear parasitic thermal fluxes are at least partly compensated for.
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公开(公告)号：US20170314996A1
公开(公告)日：2017-11-02
申请号：US15584072
申请日：2017-05-02
Applicant: Keller HCW GmbH
Inventor： Uwe-Peter Arlt
CPC classification number: G01J5/06 , G01J5/0003 , G01J5/24 , G01J2001/446 , G01J2005/0048 , G01J2005/067 , G01J2005/068
Abstract: In a method for noncontact, radiation thermometric temperature measurement, a short-circuit photocurrent that is proportional to a received radiant power is produced in a photodiode radiation detector that is operating photovoltaically without bias voltage. The photocurrent is processed in a current to voltage converter. Subsequently, a temperature signal corresponding to the radiant power is generated. A corrective current, dependent on a temperature of the photodiode radiation detector, is added to the short-circuit photocurrent to compensate a fault current, wherein the fault current is based on an input bias current and an input offset voltage of the current to voltage converter across a temperature-dependent shunt resistance of the photodiode radiation detector. A device with a corrective current source controlled by a microcontroller is provided that can be used to perform the method.
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