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公开(公告)号：US4900150A
公开(公告)日：1990-02-13
申请号：US199858
申请日：1988-05-27
Applicant: David B. Hall
Inventor： David B. Hall
CPC classification number: H01S3/0014 , G01N21/41 , G01J2009/0207 , G01J9/04
Abstract: A variety of techniques for deriving cavity linewidth that share the use of multiple input sources of known frequency separation is disclosed allowing the measurement of resonator cavity linewidth. Among the techniques include a double peak ratio method for measuring cavity linewidth through use of a low pass filter. The double peak ratio method allows vertical measurements which are noise immune and independent of swept frequency errors as a method of determining cavity linewidth in a straightforward and accurate manner.
Abstract translation: 公开了用于导出共享使用已知频率分离的多个输入源的腔线宽度的各种技术，允许谐振腔腔线宽的测量。 这些技术包括通过使用低通滤波器来测量空腔线宽的双峰比方法。 双峰值比方法允许垂直测量，其是噪声免疫的，并且与扫频频率误差无关，作为以简单和准确的方式确定空腔线宽的方法。
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公开(公告)号：EP0467343A3
公开(公告)日：1992-07-08
申请号：EP91111969.1
申请日：1991-07-17
Applicant: CANON KABUSHIKI KAISHA
Inventor： Ohtsuka, Masaru, c/o Canon Kabushiki Kaisha , Haya, Satoshi, c/o Canon Kabushiki Kaisha , Nishimoto, Yoshifumi, c/o Canon Kabushiki Kaisha
CPC classification number: G01B9/02077 , G01B9/02002 , G01B11/255 , G01B2290/45 , G01B2290/70 , G01J9/04 , G01J2009/0207
Abstract: An optical heterodyne interferometer generates first and second different frequency light beams. The first light beam after irradiating an object to be measured is combinde with the second light beam used as a reference to from a heterodyne signal. A first detector detects heterodyne signals from at least three points not in a straight line within a region of the object to be measured. A second detector detects heterodyne signals at respective points within the measuring region. Optical phase changes of the light beams due to the object to be measured are detected according to the signals obtained from the first and second detectors.
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公开(公告)号：EP0314709A1
公开(公告)日：1989-05-10
申请号：EP88902383.0
申请日：1988-03-30
Applicant: WILD HEERBRUGG AG.
Inventor： DÄNDLIKER, René
CPC classification number: G01B9/02007 , G01B9/02003 , G01B9/02027 , G01B9/02067 , G01B2290/70 , G01J9/04 , G01J2009/0207 , G01J2009/0253 , G01J2009/0261
Abstract: L'installation comprend: un laser (10, 20) pour la fréquence n1(11) et n2 (21); respectivement un diviseur de faisceau polarisant (21, 22) pour produire des faisceaux partiels polarisés et croisés de fréquence n1 (13, 14) et n2 (23, 24); un modulateur respectif (18, 28) pour décaler les faisceaux d'une fréquence f1 et f2 ; une paire respective de miroirs de déflection (15, 17; 25, 27) et un diviseur de faisceau polarisant respectif (16, 26) pour réunir (19, 29) les faisceaux n1, n1+f1, n2, n2+f2; deux photodétecteurs (35, 45) munis chacun d'un polariseur (34, 44); un interféromètre de Michelson; un diviseur de faisceau non-polarisant (30) pour répartir les faisceaux partiels (19, 29) en un faisceau de mesure (32) et un faisceau de référence. Le faisceau de référence (33) arrive sur le photodétecteur (35) qui lui est assigné tandis que le faisceau de mesure (32) arrive sur l'interféromètre de Michelson puis aboutit au photodétecteur (45) qui lui correspond. Les signaux des photodétecteurs subissent une démodulation d'amplitude et la différence de phase entre les deux signaux démodulés est déterminée. Cette différence de phase est dépendante seulement de la position de l'objet de mesure et de la longueur d'onde équivalente à la différence n1 - n2. Pour stabiliser ou corriger, on peut doubler le dispositif et utiliser l'une des exécutions comme référence. Le procédé correspondant est décrit pour déterminer la position ou la distance sous forme d'écart entre deux positions. L'indétermination peut être levée en modifiant la fréquence ou la distance avec intégration simultanée de la différence de phase sur l'intervalle de temps.
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公开(公告)号：EP0512450A3
公开(公告)日：1993-04-07
申请号：EP92107488.6
申请日：1992-05-04
Applicant: CANON KABUSHIKI KAISHA
CPC classification number: G01J9/0246 , G01J9/04 , G01J2009/0207
Abstract: A wavelength variation measuring apparatus is disclosed. A light beam from a light source device capable of controlling an oscillation wavelength is divided into two light beams by a light divider. A predetermined optical path length difference is imparted to the divided light beams to synthesize the beams by a light synthesizer. A part of the synthesized light is used as detection light and the rest of the synthesized light is used as measuring light. A beat signal is detected from the detection light by a photodetector. A feedback control is effected to the light source device by use of the beat signal to thereby stabilize the oscillated wavelength of the light source device and to direct the measuring light to an object to be measured. The beat signal is rendered as a measurement data correction signal, and measurement data obtained by directing the measuring light to the object to be measured is corrected.
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公开(公告)号：EP0467343A2
公开(公告)日：1992-01-22
申请号：EP91111969.1
申请日：1991-07-17
Applicant: CANON KABUSHIKI KAISHA
Inventor： Ohtsuka, Masaru, c/o Canon Kabushiki Kaisha , Haya, Satoshi, c/o Canon Kabushiki Kaisha , Nishimoto, Yoshifumi, c/o Canon Kabushiki Kaisha
CPC classification number: G01B9/02077 , G01B9/02002 , G01B11/255 , G01B2290/45 , G01B2290/70 , G01J9/04 , G01J2009/0207
Abstract: An optical heterodyne interferometer generates first and second different frequency light beams. The first light beam after irradiating an object to be measured is combinde with the second light beam used as a reference to from a heterodyne signal. A first detector detects heterodyne signals from at least three points not in a straight line within a region of the object to be measured. A second detector detects heterodyne signals at respective points within the measuring region. Optical phase changes of the light beams due to the object to be measured are detected according to the signals obtained from the first and second detectors.
Abstract translation: 光学外差干涉仪产生第一和第二不同频率的光束。 照射待测物体之后的第一光束与作为参考的第二光束由外差信号组合。 第一检测器检测来自待测物体区域内不在一条直线上的至少三个点的外差信号。 第二检测器检测测量区域内各个点处的外差信号。 根据从第一和第二检测器获得的信号来检测由于待测量对象引起的光束的光学相位变化。
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Patent Agency Ranking
公开(公告)号：EP0512450B1
公开(公告)日：1997-01-08
申请号：EP92107488.6
申请日：1992-05-04
Applicant: CANON KABUSHIKI KAISHA
CPC classification number: G01J9/0246 , G01J9/04 , G01J2009/0207
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公开(公告)号：EP0314709B1
公开(公告)日：1992-03-11
申请号：EP88902383.4
申请日：1988-03-30
Applicant: Leica Heerbrugg AG
Inventor： DÄNDLIKER, René
CPC classification number: G01B9/02007 , G01B9/02003 , G01B9/02027 , G01B9/02067 , G01B2290/70 , G01J9/04 , G01J2009/0207 , G01J2009/0253 , G01J2009/0261
Abstract: The device comprises : a laser device (10, 20) for the frequency n1 (11) and the frequency n2 (21), each provided with a polarizing beam splitter (12, 22) for producing crossed polarized partial beams of frequency n1 (13, 14) and n2 (23, 24), respectively, with a modulator (18, 28) for shifting the frequency of each of the partial beams to the frequency f1 or f2, respectively, with a pair of deflecting mirrors (15, 17, 25, 27) and with a polarizing beam splitter (16, 26) for uniting (19, 29) the partial beams n1, n1+f1, n2, n2+f2; two photodetectors (35, 45) before each of which a polarizer (34, 44) is arranged; a Michelson interferometer; a non-polarizing beam splitter (30) for distributing each of the partial beams (19, 29) into a measurement light beam (32) or a reference light beam (33). The reference light beam is transmitted to the corresponding photodetector (35). The measurement light beam (32) is transmitted to the Michelson interferometer and then to the corresponding photodetector (45).The photodetector signals are modulated in function of the amplitude, and the phase difference between the two modulated signals is determined. This phase difference depends only on the position of the test object and the equivalent wavelenght of the difference, n1-n2. For stabilization or correction, the device can be executed in duplicate and one of the executions used as a reference. The corresponding process can be applied to determine positions or distances as the interval between two positions. Uncertainties can be eliminated by shifting the distance or changing the frequency with simultaneous integration of the phase difference over time.
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公开(公告)号：WO2008086473A1
公开(公告)日：2008-07-17
申请号：PCT/US2008/050750
申请日：2008-01-10
Applicant: ATTOCHRON, LLC , CABANISS, John , CHAFFEE, Tom
Inventor： CABANISS, John , CHAFFEE, Tom
IPC: H04B10/158 , G01J3/453
CPC classification number: G01J9/02 , G01J9/04 , G01J2009/0207 , G01J2009/0234 , H04B10/676
Abstract: Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.
Abstract translation: 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。
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公开(公告)号：WO1989008825A1
公开(公告)日：1989-09-21
申请号：PCT/EP1989000255
申请日：1989-03-11
Applicant: TABARELLI, Werner , LÖBACH, Ernst , LEUCHS, Gerhard
Inventor： TABARELLI, Werner
IPC: G01J09/02
CPC classification number: G01J9/0246 , G01J2009/0207 , G01N21/45
Abstract: An arrangement for determining the wavelength of light beams in a medium or the refractive index of the medium comprises at least two stationary measuring bodies (11a, 11b, 11c) of different length each of which determines a different geometric path for two partial beams produced by a beam splitter. One partial beam (f2) of a pair of such partial beams travels along a path (d1, d2, d3) in the medium determined by the corresponding measuring body (11a, 11b or 11c). Two light beams of different frequency (f1, f2) are provided. One partial beam of each pair of partial beams is produced from the light beam of frequency (f1), and the other partial beam of each pair of partial beams is produced from the light beam of the other frequency (f2). A photoelectric detector (17) determines the phase relation of the interference fluctuations of each emergent light beam (15a-c) formed by recombination and superposition of the two partial beams of each pair of partial beams. This phase relation is an index of the difference in optical path of each partial beam of a pair of partial beams.
Abstract translation: 用于确定介质中的光束的波长或介质的折射率的装置包括至少两个不同长度的固定测量体（11a，11b，11c），每个固定测量体（11a，11b，11c）决定了由 分束器。 一对这样的部分光束的一个部分光束（f2）沿着由对应的测量体（11a，11b或11c）确定的介质中的路径（d1，d2，d3）行进。 提供不同频率（f1，f2）的两个光束。 从频率（f1）的光束产生每对分光束的一个部分光束，并且从另一个频率（f2）的光束产生每对部分光束的另一部分光束。 光电检测器（17）确定通过每对部分光束的两个部分光束的复合和叠加形成的每个出射光束（15a-c）的干涉波动的相位关系。 该相位关系是一对部分光束的每个局部光束的光程差的指标。
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20.发明公开Apparatus and a method for high numerical aperture microscopic examination of materials 失效用于材料的高数值孔径显微镜检查的设备和方法
公开(公告)号：EP0503236A3
公开(公告)日：1995-07-05
申请号：EP92100744.9
申请日：1992-01-17
Applicant: International Business Machines Corporation
CPC classification number: G01N21/9505 , G01J3/44 , G01J2003/421 , G01J2009/0207 , G01N21/3563 , G01N21/359 , G01N2021/1725 , G01N2021/1782 , G01N2021/8822 , G01N2201/0638 , G01N2201/1087 , G02B3/00 , G02B21/0016
Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers (110) uses an optical device (112) made from a material having a high index of refraction and held in very close proximity to the wafer (110). The optical device (112) may either be a prism (130) or a plano-convex lens (112). The plano-convex lens (112) may be held in contact with the wafer (110) or separated from the wafer via an air bearing (112') or an optical coupling fluid (214) to allow the sample to be navigated beneath the lens (112). The lens (112) may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.
Abstract translation: 用于在半导体晶片（110）的内部特征的近红外中执行高分辨率光学成像的设备和方法使用由具有高折射率并保持在非常靠近晶片的材料制成的光学器件（112） 110）。 光学装置（112）可以是棱镜（130）或平凸透镜（112）。 平凸透镜（112）可以通过空气轴承（112'）或光学耦合流体（214）保持与晶片（110）接触或与晶片分离，以允许样品在透镜下方 （112）。 透镜（112）可以用于诸如明场显微镜，Schlieren显微镜，暗场显微镜，Linnik干涉仪，拉曼分光镜和吸收分光镜等多种光学仪器中。
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