Apparatus for optical system coherence testing
    11.
    发明授权
    Apparatus for optical system coherence testing 失效
    光学系统相干测试装置

    公开(公告)号:US07161684B2

    公开(公告)日:2007-01-09

    申请号:US11139479

    申请日:2005-05-31

    Abstract: The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the laser beam is measured by illuminating the test reticle and recording and/or analyzing the optical patterns generated by the illumination. The technique was designed for the characterization of laser-based systems via the detection of optical radiation modulated by transmissive, reflective and diffractive patterns printed on a reticle or lithographic plate designed specifically for this purpose. The novelty and advantages over the prior art are insensitivity to vibration, alignment, and multi-path differences associated with classical interferometric coherence measurement techniques. The technique is focus error insensitive. The robustness and convenience of the technique is driven by the use of a single plate with no optical alignment, making the technique easily implemented in the field.

    Abstract translation: 本发明涉及相干测试标线片或平版印刷版,以及用于使用测试掩模版测试激光束的相干性的方法。 通过照射测试标线并记录和/或分析由照明产生的光学图案来测量激光束的质量或相干性。 该技术被设计用于通过检测印刷在专门为此目的而设计的掩模版或平版印刷板上的透射,反射和衍射图案调制的光学辐射来表征基于激光的系统。 与现有技术相比,新颖性和优点对于与经典的干涉相干测量技术相关的振动,对准和多径差异是不敏感的。 该技术是焦点误差不敏感。 该技术的鲁棒性和便利性是通过使用不具有光学对准的单个板来驱动的,使得该技术在现场容易地实现。

    Method and apparatus for optical system coherence testing
    12.
    发明申请
    Method and apparatus for optical system coherence testing 失效
    光学系统一致性测试的方法和装置

    公开(公告)号:US20020027662A1

    公开(公告)日:2002-03-07

    申请号:US09899570

    申请日:2001-07-06

    Abstract: The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the laser beam is measured by illuminating the test reticle and the recording and/or analyzing the optical patterns generated by the illumination. The technique was designed for, but not limited to, the characterization of laser-based systems via the detection of optical radiation modulated by transmissive, reflective and diffractive patterns printed on a reticle or lithographic plate designed specifically for this purpose. The novelty and advantages over the prior art are insensitivity to vibration, alignment, and multi-path differences of classical interferometric coherence measurement techniques. Spatial coherence and longitudinal or temporal coherence may be measured independently. Vertical and horizontal coherence may be measured independently. The technique is focus error insensitive. That is to say, that focus errors will be recorded by the technique in a deterministic fashion and can be removed from the data. The robustness and convenience of the technique is driven by the single plate with no optical alignment, making the technique easily implemented in the field. The multiplexing of the feature orientations, sizes and line types and feature locations allows for the determination of coherence parameters as a function of position in the beam.

    Abstract translation: 本发明涉及相干测试标线片或平版印刷版,以及用于使用测试掩模版测试激光束的相干性的方法。 通过照射测试标线和记录和/或分析由照明产生的光学图案来测量激光束的质量或相干性。 该技术设计用于但不限于通过检测由通过专门为此目的而设计的掩模版或平版印刷板上印刷的透射,反射和衍射图案调制的光学辐射来表征激光系统。 与现有技术相比的新颖性和优点是对经典干涉相干测量技术的振动,对准和多径差异不敏感。 可以独立地测量空间相干性和纵向或时间相干性。 垂直和水平相干可以独立测量。 该技术是焦点误差不敏感。 也就是说,该技术将以确定性的方式记录焦点误差,并且可以从数据中移除。 该技术的坚固性和便利性由单板驱动,无需光学对准,使得该技术在现场轻松实现。 特征取向,尺寸和线类型以及特征位置的多路复用允许确定作为光束中位置的函数的相干参数。

    Fiber optic coherence meter
    13.
    发明授权
    Fiber optic coherence meter 失效
    光纤相干仪

    公开(公告)号:US4747688A

    公开(公告)日:1988-05-31

    申请号:US911935

    申请日:1986-09-26

    Inventor: Joseph M. Geary

    CPC classification number: G01J9/02 G01J2009/0211 G01J2009/0226

    Abstract: An incident light field is applied to the two separate front fiber faces of a pair of identical optical fibers which are initially held in a common plane. One fiber face is always kept stationary. The other fiber face may be moved either laterally in a plane common to the stationary face, or longitudinally into and out of the common plane. The output end of the device comprises two separate rear fiber faces that are held in a common plane. These faces are stationary. There is no lateral or longitudinal motion of one relative to the other. The light emerging from these two faces interferes in the far field. Straight line interference fringes whose spacing depends upon the lateral separation of the rear fiber faces are formed. The fringe modulation, however, depends upon the relative position of the front fiber faces. This modulation changes as one front face is scanned either laterally or longitudinally. The modulation changes with such motion is related to the degree of spatial or temporal coherence of the incident light field.

    Abstract translation: 入射光场被施加到最初保持在公共平面中的一对相同光纤的两个分开的前纤维面上。 一个纤维面总是保持静止。 另一个纤维面可以在与固定面共同的平面中横向移动,或纵向进入和离开公共平面。 该装置的输出端包括保持在公共平面中的两个单独的后纤维面。 这些面是静止的。 没有一个相对于另一个的横向或纵向运动。 从这两个面孔出现的光线在远处干扰。 形成间隔取决于后纤维面的横向分离的直线干涉条纹。 然而,边缘调制取决于前纤维面的相对位置。 当一个正面被横向或纵向扫描时,该调制变化。 这种运动的调制变化与入射光场的空间或时间相干程度有关。

    Radiation interference devices
    14.
    发明授权
    Radiation interference devices 失效
    辐射干扰装置

    公开(公告)号:US4722604A

    公开(公告)日:1988-02-02

    申请号:US461203

    申请日:1983-01-20

    CPC classification number: G01J9/02 G01J2009/0211 G01J3/45

    Abstract: An interference device for discriminating between radiation sources of differing coherence length comprises means to divide received radiation from a source into two components. A path difference, defining a coherence length cut-off, is introduced into the path of one component and the components are brought together for interference. The recombined light passes through a reticle with alternate opaque and tranparent bars and an optical band-pass filter to a detector. Interference fringes present in the plane of the reticle are swept across the reticle by the action of the collection optical system of the device which includes a scanning rotating mirror. Two similar devices can be arranged for band-pass coherence length filtering and when used in conjunction with a light soruce whose coherence is modulated the device can be used for signalling.

    Abstract translation: 用于区分不同相干长度的辐射源的干扰装置包括将来自源的接收辐射分成两部分的装置。 定义相干长度截止的路径差被引入到一个组件的路径中,并且组件被聚集在一起用于干扰。 重新组合的光通过具有交替的不透明透明棒和光学带通滤光器的掩模版到检测器。 通过包括扫描旋转镜的装置的收集光学系统的作用,存在于掩模版的平面中的干涉条纹扫过光罩。 可以安排两个类似的装置用于带通相干长度滤波,并且当与光耦合器一起使用时,其相干性被调制,该装置可以用于信令。

    OPTICAL NOTCH FILTER FOR DISCRIMINATING AGAINST COHERENT RADIATION
    15.
    发明授权
    OPTICAL NOTCH FILTER FOR DISCRIMINATING AGAINST COHERENT RADIATION 失效
    用于歧视相干辐射的光学插槽过滤器

    公开(公告)号:EP0326612B1

    公开(公告)日:1993-03-10

    申请号:EP88908805.0

    申请日:1988-07-05

    CPC classification number: G01J9/02 G01J2009/0211 G02F1/11

    Abstract: A self-tuning optical notch filter is employed to separate coherent from noncoherent radiation in an overall beam. The presence of coherent radiation is detected, preferably with an interferometer, and the frequency of the detected coherent radiation is determined. An electrical control signal is generated with a frequency corresponding to that of the coherent radiation, and causes an optical filter to filter out the coherent radiation from the beam. In the preferred embodiment the optical filter is a Bragg cell, and the electrical control signal is applied to an electro-acoustic transducer which furnishes an acoustic control signal to the Bragg cell.

    Imaging coherent radiometer
    16.
    发明公开
    Imaging coherent radiometer 失效
    成像相干放射线计

    公开(公告)号:EP0256300A3

    公开(公告)日:1990-03-14

    申请号:EP87110016.0

    申请日:1987-07-10

    Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam. Detecting means are provided to detect the interference of the first and second beams across the entire wavefront of the recombined beam, and over the entire image of the scene being viewed. Processing means detect and determine the location and wavelength of coherent radiation or coherent lack of radiation in the scene being viewed by the apparatus. This information can then be visually displayed. Additional processing means to respond to specific coherent wavelengths or wavelength sets.

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