公开(公告)号：US09945731B1

公开(公告)日：2018-04-17

申请号：US14596825

申请日：2015-01-14

Applicant: HRL LABORATORIES LLC ,  HRL LABORATORIES LLC

Inventor： Oleg M. Efimov ,  Keyvan R. Sayyah

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01J1/0437 ,  G01J1/0448 ,  G01J2009/0203 ,  G01J2009/0249

Abstract: A system includes a source of laser beams forming an array, a source of a reference laser beam, and an optical detector for measuring respective phase differences between the array laser beams and the reference laser beam. The system includes a mask, having apertures with a shape, size and position identical to a shape, size and position of the array laser beams, and positioned in the reference laser beam to form respective beams of the reference laser beam corresponding to the beams from the array laser beams. A phase modulator phase modulates respective beams of one of (a) the array laser beams and (b) the beams of the reference laser from the mask. A photodetector receives the respective array laser beams and the corresponding reference laser beams from the mask to generate a composite signal. Processing circuitry is responsive to the composite signal for generating respective signals representing the phase differences of the individual laser beams from the reference laser beam.

公开(公告)号：US09091534B2

公开(公告)日：2015-07-28

申请号：US13795998

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hitoshi Iijima ,  Atsushi Maeda

IPC: H04N7/18 ,  A61B3/14 ,  G01B9/02 ,  G01B11/24 ,  G01M11/02 ,  G01J9/00 ,  G01J9/02

CPC classification number: G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract translation: 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。

公开(公告)号：US07405830B2

公开(公告)日：2008-07-29

申请号：US11207327

申请日：2005-08-19

Applicant: Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

Inventor： Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02039 ,  G01B9/02076 ,  G01B9/02081 ,  G01B2290/70 ,  G01J2009/0203 ,  G01J2009/0223 ,  G01J2009/0226

Abstract: The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from a measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift device that enables four interferograms of different amounts of phase shift to be obtained simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant levels of vibration.

Abstract translation: 本发明涉及振动不敏感点衍射干涉测量。 为了获得高的抗振动性，使用单模光纤通过点衍射直接从测试对象反射的测量波产生参考波。 通过添加空间相移装置进一步加强了振动脱敏的能力，该空间相移装置能够在干涉图之间没有时间延迟的同时获得不同量的相移的四个干涉图。 本发明可以有效地用于设计用于需要在显着水平的振动的情况下进行测量的在线应用的测量系统。

公开(公告)号：US20130250099A1

公开(公告)日：2013-09-26

申请号：US13795998

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hitoshi Iijima ,  Atsushi Maeda

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract translation: 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。

公开(公告)号：US6122056A

公开(公告)日：2000-09-19

申请号：US56521

申请日：1998-04-07

Applicant: Michael Straight Hibbs ,  Song Peng

Inventor： Michael Straight Hibbs ,  Song Peng

IPC: H01L21/027 ,  G03F1/84 ,  G01B9/02

CPC classification number: G03F1/84 ,  G01N21/45 ,  G01J2009/0203 ,  G01J2009/0234

Abstract: A method of measuring the phase shift between two regions of a phase shift mask. A workpiece is provided including a first pair of slits each having a substantially similar phase shift characteristic and a second pair of slits each having a different phase shift characteristic. Electromagnetic radiation is directed through the first pair of slits and the second pair of slits on the workpiece. A relative shift is measured between interference patterns caused by the first pair of slits and the second pair of slits.

Abstract translation: 一种测量相移掩模的两个区域之间的相移的方法。 提供工件，其包括具有基本相似的相移特性的第一对狭缝和具有不同相移特性的第二对狭缝。 电磁辐射被引导通过工件上的第一对狭缝和第二对狭缝。 在由第一对狭缝和第二对狭缝引起的干涉图案之间测量相对移动。

公开(公告)号：US20230352899A1

公开(公告)日：2023-11-02

申请号：US18310475

申请日：2023-05-01

Applicant: Nutronics, Inc.

Inventor： Jeffrey D. Barchers ,  Dale H. Martz

IPC: H01S3/10 ,  G02B27/30 ,  G01J9/02 ,  G02B27/12 ,  H01S3/23 ,  G02F2/00

CPC classification number: H01S3/10053 ,  G01J9/02 ,  G02B27/123 ,  G02B27/30 ,  G02F2/00 ,  H01S3/2308 ,  G01J2009/0203 ,  G01J2009/0211

Abstract: Systems and methods for forming a coherent optical phased array laser source from a spatially combined array of output beams is accomplished without any external measurement devices or wavefront sensors. A master oscillator laser is split into a plurality of optical beam transport and amplifier channels to produce a plurality of optical output beams that are spatially combined in an array format. The spatial phase state of the plurality of output beams is measured at the output of a spatial combiner without use of an external measurement device or sensor. The phase of the plurality of optical output beams is controlled to compensate both for aberrations induced by the optical beam transport and amplifier paths to produce a coherent and spatially phased laser beam at the output of the laser source or to produce a phased laser beam with prescribed phase state on each output beam.

公开(公告)号：US5292483A

公开(公告)日：1994-03-08

申请号：US938818

申请日：1992-09-01

Applicant: Wilbur I. Kaye

Inventor： Wilbur I. Kaye

IPC: G01J1/04 ,  G01J9/02 ,  G01N21/41 ,  G01N21/45 ,  G01N21/47 ,  G01N21/65 ,  G01N21/76 ,  G01N21/85 ,  G01N27/447 ,  G01J1/58 ,  G01N21/49

CPC classification number: G01J1/04 ,  G01J1/0422 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01N21/4795 ,  G01N27/44721 ,  G01J2009/0203 ,  G01N2021/1738 ,  G01N2021/1759 ,  G01N2021/178 ,  G01N2021/1782 ,  G01N2021/4173 ,  G01N2021/451 ,  G01N2021/4702 ,  G01N21/645 ,  G01N21/65 ,  G01N21/76 ,  G01N21/85 ,  G01N2201/0893

Abstract: Focusing a generated radiation signal on a detector is effected by a curvilinear surface. The radiation beam signal from the reflected surface is collimated or focused on the detector. Light scattered, Raman scattered, fluorescence, chemiluminescence, phosphorescence radiation signals from particles as a result of a chemical procedure or reaction is enhanced through this focusing technique. The enhanced signal which is detected is subsequently measured through different detection techniques.

Abstract translation: 将生成的辐射信号聚焦在检测器上由曲线表面实现。 来自反射表面的辐射束信号被准直或聚焦在检测器上。 通过这种聚焦技术增强了散射，拉曼散射，荧光，化学发光，来自颗粒的磷光辐射信号，作为化学过程或反应的结果。 随后通过不同的检测技术测量检测到的增强信号。

公开(公告)号：EP2243007A4

公开(公告)日：2017-03-01

申请号：EP08844854

申请日：2008-10-28

Applicant: AMO WAVEFRONT SCIENCES LLC

Inventor： RAYMOND THOMAS D ,  PULASKI PAUL ,  FARRER STEPHEN W ,  NEAL DANIEL R ,  GREENAWAY ALAN H ,  FAICHNIE DAVID M ,  CAMPBELL DALGARNO HEATHER I ,  CRAIK GRAHAM N

IPC: G01J1/02 ,  G01J1/04 ,  G01J9/00

CPC classification number: G01J9/00 ,  G01J2009/002 ,  G01J2009/0203

公开(公告)号：US20110235049A1

公开(公告)日：2011-09-29

申请号：US13131252

申请日：2009-12-04

Applicant: James Gordon Burnett ,  Andrew Maxwell Scott ,  David Caradoc Jones ,  Simon Christopher Woods

Inventor： James Gordon Burnett ,  Andrew Maxwell Scott ,  David Caradoc Jones ,  Simon Christopher Woods

IPC: G01B9/02

CPC classification number: G01J9/04 ,  G01J2009/002 ,  G01J2009/0203 ,  G01J2009/0226

Abstract: Wavefront sensing apparatus comprises a beam splitter (106) for combining a wavefront to be characterised (105) with a frequency-shifted plane wavefront (111) and a bundle of optical fibres (112) arranged to detect the combined beam at a plurality of positions across the combined beam. Output from individual fibres of the bundle are detected to produce corresponding heterodyne signals, the phases of which are extracted by demodulation. By fitting the extracted phases to an assumed functional form for the phase of the wavefront to be characterised, the piston, tip, tilt and radius of curvature phase parameters of the wave-front to be characterised may be found at the position of the fibre bundle. In contrast, prior art methods of wavefront characterisation only allow the piston phase of the wavefront to be characterised to be obtained.

Abstract translation: 波前感测装置包括用于将要表征的波阵面（105）与频移平面波前（111）和一束光纤（112）组合的分束器（106），其布置成在多个位置处检测组合的波束 横跨组合梁。 检测到束的各个光纤的输出，以产生相应的外差信号，其相位通过解调提取。 通过将提取的相位拟合为要表征的波阵面的相位的假设函数形式，可以在纤维束的位置处找到要表征的波前的活塞，尖端，倾斜和弯曲半径相位参数 。 相比之下，波前表征的现有技术方法仅允许获得波阵面的活塞相位。

公开(公告)号：US20060039007A1

公开(公告)日：2006-02-23

申请号：US11207327

申请日：2005-08-19

Applicant: Seung Kim ,  Hagyong Kihm ,  Jung Park

Inventor： Seung Kim ,  Hagyong Kihm ,  Jung Park

IPC: G01B9/02

CPC classification number: G01B9/02039 ,  G01B9/02076 ,  G01B9/02081 ,  G01B2290/70 ,  G01J2009/0203 ,  G01J2009/0223 ,  G01J2009/0226

Abstract: The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from the measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift devise that enables to obtain four interferograms of different amounts of phase shift simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant level of vibration.

Abstract translation: 本发明涉及振动不敏感点衍射干涉测量。 为了获得高的抗振动性，单模光纤通过点衍射直接从测试对象反射的测量波中产生参考波。 通过添加空间相移装置进一步加强振动脱敏的能力，空间相移装置能够在干涉图之间没有时间延迟的同时获得不同量的相移的四个干涉图。 本发明可以有效地用于在需要在存在显着水平的振动的情况下进行测量的在线应用的测量系统的设计中。