公开(公告)号：WO2007008265A8

公开(公告)日：2007-03-22

申请号：PCT/US2006013330

申请日：2006-04-10

Applicant: ZETETIC INST ,  HILL HENRY A

Inventor： HILL HENRY A

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01B9/02022 ,  G01B9/02024 ,  G01B9/02056 ,  G01B9/02057 ,  G01J2009/0223 ,  G03F7/706

Abstract: A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.

Abstract translation: 1.一种用于测量空间脉冲响应函数的特性的点衍射干涉仪，所述干涉仪包括：用于产生源光束的光源; 光学系统; 包括位于所述光学系统的物平面中的测试对象的光学元件，所述测试对象包括用于从所述源光束产生穿过所述光学系统的测量光束的衍射点，其中所述光学元件还从所述源光束 与测量光束组合以在光学系统的图像平面中产生干涉图案的参考光束，干涉图案表示光学系统的空间脉冲响应函数。

公开(公告)号：US20170184455A1

公开(公告)日：2017-06-29

申请号：US14986560

申请日：2015-12-31

Applicant: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Inventor： Xiangzhao Wang ,  Feng Tang ,  Guoxian Zhang ,  Shifu Xu

IPC: G01J9/02

CPC classification number: G01M11/0271 ,  G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0265 ,  G03F7/706

Abstract: A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

公开(公告)号：US20150204728A1

公开(公告)日：2015-07-23

申请号：US14562092

申请日：2014-12-05

Applicant: Yang Liu ,  Randall E. Brand ,  Hoa V. Pham ,  Shikhar Fnu

Inventor： Yang Liu ,  Randall E. Brand ,  Hoa V. Pham ,  Shikhar Fnu

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0253 ,  G01J2009/0269 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/1475 ,  G01N2015/1402 ,  G01N2015/1479 ,  G02B21/14 ,  G02B21/365

Abstract: Systems, methods and other embodiments associated with spatial-domain Low-coherence Quantitative Phase Microscopy (SL-QPM) are described herein. SL-QPM can detect structural alterations within cell nuclei with nanoscale sensitivity (0.9 nm) (or nuclear nano-morphology) for “nano-pathological diagnosis” of cancer. SL-QPM uses original, unmodified cytology and histology specimens prepared with standard clinical protocols and stains. SL-QPM can easily integrate in existing clinical pathology laboratories. Results quantified the spatial distribution of optical path length or refractive index in individual nuclei with nanoscale sensitivity, which could be applied to studying nuclear nano-morphology as cancer progresses. The nuclear nano-morphology derived from SL-QPM offers significant diagnostic value in clinical care and subcellular mechanistic insights for basic and translational research. Techniques that provide for depth selective investigation of nuclear and other cellular features are disclosed.

Abstract translation: 本文描述了与空间域低相干定量相位显微镜（SL-QPM）相关联的系统，方法和其它实施例。 SL-QPM可以检测细胞核内的结构变化，具有纳米级灵敏度（0.9 nm）（或核纳米形态），用于癌症的“纳米病理诊断”。 SL-QPM使用原始，未修改的细胞学和组织学标本，用标准临床方案和污渍制备。 SL-QPM可以轻松整合到现有的临床病理实验室。 结果量化了具有纳米尺度敏感性的单个核中光程长度或折射率的空间分布，可用于研究核纳米形态作为癌症进展。 来自SL-QPM的核纳米形态为临床护理和亚细胞机械学基础和翻译研究提供了显着的诊断价值。 公开了提供对核和其他蜂窝特征的深度选择性研究的技术。

公开(公告)号：US20060285124A1

公开(公告)日：2006-12-21

申请号：US11383328

申请日：2006-05-15

Applicant: Henry Hill

Inventor： Henry Hill

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G03F7/706 ,  G01J2009/0223 ,  G03F7/70591 ,  G03F7/7085 ,  G03F7/70941

Abstract: Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.

Abstract translation: 用于原位和非原位测量由光学系统产生的光斑的复振幅和强度的模量的空间分布的装置和方法。 原位和非原位测量包括使用同时位于光学系统的物平面中的衍射位置阵列的干涉测量和非干涉测量，以增加与共轭图像平面中的测光特性相关的信号。 衍射点产生具有随机相对相位的衍射光束。 通常，干涉测量轮廓测量采用相移点衍射干涉测量法来产生地形干涉信号，并且非干涉测量基于与地形干扰信号不同的闪光相关信号。 地形干扰信号和火炬相关信号由检测器产生，作为电干扰信号或电眩光相关信号，或作为记录介质中相应的曝光引起的变化。

公开(公告)号：US07088458B1

公开(公告)日：2006-08-08

申请号：US10743107

申请日：2003-12-23

Applicant: Ulrich Wegmann

Inventor： Ulrich Wegmann

IPC: G01B9/02 ,  G01B9/00

CPC classification number: G02B27/60 ,  G01J9/02 ,  G01J9/0215 ,  G01J2009/0223

Abstract: Apparatus and method for measuring an optical imaging system, and detector unit. The measuring apparatus contains an arrangement for combining wavefront and distortion measurements. For this purpose, respectively associated interferometry and Moiré structures can be introduced on the object side and image side. The detector unit contains a fiber plate and/or a flexible image conductor with a curved entry surface or with at least two different entry surfaces, which are offset axially or inclined spatially with respect to each other, or with an axially movable entry surface. By way of suitable wavefront acquisition in various lateral positions of object and/or image structure, a topographic calibration of the object or image structure can be carried out. Furthermore, by way of a Moiré technique, the lateral displacement travel in phase-shifting steps for the wavefront acquisition and, by way of point diffraction interferometry, the axial relative position of object and image structure can be determined highly accurately. The apparatus and method are used, in particular, for measuring lenses in microlithography installations.

Abstract translation: 用于测量光学成像系统的装置和方法以及检测器单元。 测量装置包含用于组合波前和失真测量的装置。 为此，可以在物体侧和像侧引入相应的相关干涉测量和莫尔结构。 检测器单元包含具有弯曲入口表面或具有至少两个不同入口表面的纤维板和/或柔性图像导体，其相对于彼此轴向偏移或在空间上倾斜或具有可轴向移动的入口表面。 通过在物体和/或图像结构的各种横向位置中的合适的波前采集的方式，可以执行对象或图像结构的地形校准。 此外，通过莫尔技术，可以高精度地确定用于波前采集的相移步骤中的横向位移行程，并且通过点衍射干涉测量可以高精度地确定物体和图像结构的轴向相对位置。 该装置和方法特别用于微光刻设备中的测量透镜。

公开(公告)号：EP1883783A2

公开(公告)日：2008-02-06

申请号：EP06770323.1

申请日：2006-05-15

Applicant: Zetetic Institute

Inventor： HILL, Henry, A.

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G03F7/706 ,  G01J2009/0223 ,  G03F7/70591 ,  G03F7/7085 ,  G03F7/70941

Abstract: Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.

公开(公告)号：EP0468816A3

公开(公告)日：1992-09-30

申请号：EP91306865.6

申请日：1991-07-26

Applicant: RESEARCH DEVELOPMENT CORPORATION OF JAPAN ,  Nagoshi, Toshiyuki ,  Ichimura, Tsutomu

Inventor： Nagoshi, Toshiyuki ,  Ichimura, Tsutomu ,  Inaba, Fumio

IPC: G01J3/45

CPC classification number: G01J3/4532 ,  G01J2009/0223

Abstract: An apparatus for effecting spatial Fourier transform spectroscopic detection of light from a surface luminescent object with high sensitivity by use of a quadrangular common path interferometer comprises a beam splitter (BS) first, second and third reflecting mirrors (M1-M3), a first imaging lents (L2), and a detecting means (D) disposed at a position which is substantially conjugate with the second reflecting mirror (M2) with respect to the first imaging lens (M2), for detecting a one-or two-dimensional distribution image of interference fringes, the beam splitter (BS) and the first to third reflecting mirrors (M1-M3) being disposed respectively at the vertices of a quadrangle, so that the detected interference fringes are subjected to spatial Fourier transform to obtain a spectral distribution of light from a specimen. A light beam from the specimen (1) is converged by a second imaging lens (L) so as to enter the beam splitter (BS), the second imaging lens (L) being disposed so that the focussed image of said specimen (1) is substantially coincident with the position of the second reflecting mirror (M2).

公开(公告)号：EP2960635A1

公开(公告)日：2015-12-30

申请号：EP15172822.7

申请日：2015-06-19

Applicant: OTSUKA ELECTRONICS CO., LTD. ,  National University Corporation Tokyo University of Agriculture and Technology

Inventor： Izutani, Yusuke ,  Iwai, Toshiaki

IPC: G01J3/44 ,  G01J9/02 ,  G01N15/02 ,  G01N21/45 ,  G01N21/51

CPC classification number: G01N21/51 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/4412 ,  G01J9/02 ,  G01J2009/0223 ,  G01N15/0211 ,  G01N21/0303 ,  G01N21/45 ,  G01N2015/0222 ,  G01N2021/0389 ,  G01N2021/4709 ,  G01N2201/062

Abstract: A dynamic light scattering measurement device (1) includes an irradiation section that applies light emitted from a low-coherence light source (10) to a sample (40) that includes particles (42), a spectral intensity acquisition section (62) that disperses reflected light from a reference plane and scattered light from the sample (40) that has passed through the reference plane to acquire a spectral intensity of interference light of the reflected light and the scattered light, the reference plane being situated to intersect an optical path through which the light is applied to the sample, and a measurement section (80) that measures dynamic light scattering of the sample (40) based on the acquired spectral intensity.

Abstract translation: 动态光散射测定装置（1）包括：在照射部分没有应用来自低相干光源（10）到样品（40）做了发射光包括颗粒（42），一个光谱强度获取部（62）并分散 反射从样本的基准平面和散射光的光（40）确实已通过参考平面来获取反射光和散射光的干涉光的光谱强度通过，参考平面被位于光路通过交叉 其中光被施加到样品，和测定部（80）做了措施基于所获取的光谱强度的试样（40）的动态光散射。

公开(公告)号：EP0468816B1

公开(公告)日：1995-06-07

申请号：EP91306865.6

申请日：1991-07-26

Applicant: RESEARCH DEVELOPMENT CORPORATION OF JAPAN ,  Nagoshi, Toshiyuki ,  Ichimura, Tsutomu

Inventor： Nagoshi, Toshiyuki ,  Ichimura, Tsutomu ,  Inaba, Fumio

IPC: G01J3/45

CPC classification number: G01J3/4532 ,  G01J2009/0223

公开(公告)号：US07633630B2

公开(公告)日：2009-12-15

申请号：US11501644

申请日：2006-08-09

Applicant: Peter Y. M. Livingston

Inventor： Peter Y. M. Livingston

IPC: G01B9/02 ,  G01D5/36

CPC classification number: G01B9/02061 ,  G01B9/02038 ,  G01B9/02057 ,  G01J9/0215 ,  G01J2009/0223

Abstract: An apparatus in one example has: first and second Fourier transform lenses, the first Fourier transform lens receiving an incident plane wavefront and focusing the plane wavefront down to a focal point in a focal plane, and the second Fourier transform lens reimaging the focused down plane wavefront to an output plane wavefront; a bead located substantially at the focal point and that is illuminated by radiation that comes in from the first lens, the bead reradiating a spherical wave, which interferes with light that passes around the bead to produce a diffraction pattern; an array of controllable light transmissive elements that support the bead in the focal plane; and a null seeking servomechanism for assigning an electrical value of phase departure of the incident plane wavefront from a reference thereof, the null seeking servomechanism controlling the light transmissive elements to produce phase shifts in light that passes around the bead to thereby remove aberrations in the incident plane wavefront.

Abstract translation: 一个示例中的装置具有：第一和第二傅里叶变换透镜，第一傅里叶变换透镜接收入射平面波前，并将平面波前向下聚焦到焦平面中的焦点，并且第二傅里叶变换透镜重新成像聚焦的下平面 波前到输出平面波前; 基本上位于焦点处并且由来自第一透镜的辐射照射的珠粒，珠粒再辐射球面波，其干扰通过珠粒周围的光以产生衍射图案; 支持焦平面中的珠粒的可控光透射元件的阵列; 以及用于从其参考中分配入射平面波前相位偏移的电值的零寻找伺服机构，该无效寻找伺服机构控制光透射元件以产生通过珠的光的相移，从而去除事件中的像差 平面波前。