公开(公告)号：US20160327493A1

公开(公告)日：2016-11-10

申请号：US14982747

申请日：2015-12-29

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Yevgeniy Churin

IPC: G01N21/88 ,  G02B5/32 ,  G02B27/12 ,  G02F1/33 ,  G02B27/10 ,  G01N21/95 ,  G02B26/12

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.

Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。

公开(公告)号：US08339593B2

公开(公告)日：2012-12-25

申请号：US12571791

申请日：2009-10-01

Applicant: Eiji Kamiyama ,  Takehiro Tsunemori ,  Kazuhiro Yamamoto ,  Kenji Aoki

Inventor： Eiji Kamiyama ,  Takehiro Tsunemori ,  Kazuhiro Yamamoto ,  Kenji Aoki

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2201/1045 ,  G01N2201/106

Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.

Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。

公开(公告)号：US20080100830A1

公开(公告)日：2008-05-01

申请号：US11554513

申请日：2006-10-30

Applicant: Alexander Veis ,  Yoram Saban

Inventor： Alexander Veis ,  Yoram Saban

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N2201/106

Abstract: A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

Abstract translation: 用于检查物体的系统和方法。 该系统包括：行进透镜声光装置，其适于产生传播通过移动透镜声光装置的有源区域的行进透镜; 第一扫描器，适于在行进透镜传播时将光束引向行进透镜; 第一分束器，适于接收由所述行进透镜形成的光束; 并将扫描光束分割成多个照明光束; 多个探测器; 和物镜; 适于接收多个照明光束，将多个照明光束引导到物体的多个区域，从物体的多个区域接收多个收集的光束，并将多个收集的光束引导到多个检测器; 其中每个检测器与多个区域的区域相关联。

公开(公告)号：US09864173B2

公开(公告)日：2018-01-09

申请号：US15004331

申请日：2016-01-22

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Wenjian Cai ,  Kai Cao

IPC: G01B11/00 ,  G02B13/00 ,  G01N21/95 ,  G01N21/956

CPC classification number: G02B13/0095 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

公开(公告)号：US20150122032A1

公开(公告)日：2015-05-07

申请号：US14490558

申请日：2014-09-18

Applicant: SAMSUNG MEDISON CO., LTD. ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jong-kyu JUNG ,  Dal-kwon KOH ,  Jung-ho KIM ,  Jung-taek OH ,  Jae-kwang LEE

IPC: G01N21/17

CPC classification number: G01N21/1702 ,  A61B5/0062 ,  A61B5/0095 ,  A61B8/44 ,  A61B8/4427 ,  G01N2201/06113 ,  G01N2201/106

Abstract: Provided are a photoacoustic apparatus and method of operating the same. The photoacoustic apparatus includes: a laser module that generates laser light and transmits a laser state signal indicating a state of a laser module; a probe including an optical output unit for irradiating laser light generated by the laser module onto an object and a scanner for detecting a photoacoustic signal that is generated from the object; a scanner controller for controlling a position of the scanner; a sequence controller for controlling acquisition of the photoacoustic signal based on the laser state signal; a signal receiver that is controlled by the sequence controller to acquire the photoacoustic signal; and a photoacoustic image generator for generating a photoacoustic image based on the photoacoustic signal. The laser state signal includes a lasing ready state signal and a laser exposure state signal.

Abstract translation: 提供一种光声装置及其操作方法。 光声装置包括：激光模块，其产生激光并透射表示激光模块的状态的激光状态信号; 探针，包括用于将由激光模块产生的激光照射到物体上的光学输出单元和用于检测从物体产生的光声信号的扫描仪; 扫描仪控制器，用于控制扫描仪的位置; 序列控制器，用于基于所述激光状态信号控制所述光声信号的获取; 由序列控制器控制以获取光声信号的信号接收机; 以及光声图像发生器，用于基于光声信号产生光声图像。 激光状态信号包括激光准备状态信号和激光曝光状态信号。

公开(公告)号：US06665112B2

公开(公告)日：2003-12-16

申请号：US10357487

申请日：2003-02-04

Applicant: Motonari Tateno

Inventor： Motonari Tateno

IPC: G02F133

CPC classification number: G01N21/95692 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/067 ,  G01N2201/106

Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, an a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.

Abstract translation: 光掩模基板检查装置设置有激光器，扫描从激光器输出的激光束的第一声光元件，第二声光元件，其产生具有凹透镜效应的虚拟图像，从而从第一声光 元件。 光掩模基板检查装置还设置有设置在第二声光元件的激光束的输出侧的凹透镜和在作为被检查对象的标线基板上对虚像进行成像的光学系统。 凹透镜通过第一声光元件在与扫描方向垂直的方向上放大激光束。

公开(公告)号：US06538795B2

公开(公告)日：2003-03-25

申请号：US09998521

申请日：2001-11-29

Applicant: Motonari Tateno

Inventor： Motonari Tateno

IPC: G02F111

CPC classification number: G01N21/95692 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/067 ,  G01N2201/106

Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.

Abstract translation: 光掩模基板检查装置设置有激光器，扫描从激光器输出的激光束的第一声光元件和第二声光元件，其产生具有凹透镜效应的虚拟图像，该虚拟图像从第一声光输出的激光束 元件。 光掩模基板检查装置还设置有设置在第二声光元件的激光束的输出侧的凹透镜和在作为被检查对象的标线基板上对虚像进行成像的光学系统。 凹透镜通过第一声光元件在与扫描方向垂直的方向上放大激光束。

公开(公告)号：EP0532927B1

公开(公告)日：1996-02-21

申请号：EP92114182.6

申请日：1992-08-20

Applicant: KLA INSTRUMENTS CORPORATION

Inventor： Whil,Mark Joseph ,  Fu,Tao-Yi

IPC: G01N21/88 ,  G03F9/00

CPC classification number: G01N21/95607 ,  G01N2021/558 ,  G01N2021/8861 ,  G01N2021/95615 ,  G01N2021/95676 ,  G01N2201/106

公开(公告)号：EP0532927A3

公开(公告)日：1993-07-28

申请号：EP92114182.6

申请日：1992-08-20

Applicant: KLA INSTRUMENTS CORPORATION

Inventor： Whil,Mark Joseph ,  Fu,Tao-Yi

IPC: G01N21/88 ,  G03F9/00

CPC classification number: G01N21/95607 ,  G01N2021/558 ,  G01N2021/8861 ,  G01N2021/95615 ,  G01N2021/95676 ,  G01N2201/106

Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

公开(公告)号：US11927873B2

公开(公告)日：2024-03-12

申请号：US17268199

申请日：2019-08-14

Applicant: Femtonics Kft.

Inventor： Gergely Katona ,  András Fehér ,  Máté Veress ,  Pál Maák ,  Gergely Szalay ,  Balázs Chiovini ,  Zoltán Szadai ,  Linda Sulcz-Judák ,  Balázs József Rózsa

IPC: G02F1/33 ,  G01N21/64

CPC classification number: G02F1/33 ,  G01N21/645 ,  G01N2021/6463 ,  G01N2201/106

Abstract: The object of the invention relates to a method for scanning with an optical beam (50) using a first acousto-optic deflector (15, 15′) having an optical axis along a Z-axis and at least one acousto-optic crystal layer (14), involving directing the optical beam (50) in the first acousto-optic deflector (15, 15′), and deflecting the optical beam (50) along an X-axis perpendicular to the Z-axis by means of the first acousto-optic deflector (15, 15), during which generating a plurality of acoustic chirp signals (30) in the at least one acousto-optic crystal layer (14) of the acousto-optic deflector (15, 15′) by—generating a first acoustic chirp signal (30a) having a duration of τ in the acousto-optic crystal layer (14), then—generating a second acoustic chirp signal (30b) in the acousto-optic crystal layer (14) within a τ period of time counted from the start of the generation of the first acoustic chirp signal (30a).