公开(公告)号：WO2008119964A8

公开(公告)日：2009-01-08

申请号：PCT/GB2008001085

申请日：2008-03-28

Applicant: UNIV STRATHCLYDE ,  UNIV DUNDEE ,  GIRKIN JOHN MICHAEL ,  POLAND SIMON ,  LONGBOTTOM CHRISTOPHER

Inventor： GIRKIN JOHN MICHAEL ,  POLAND SIMON ,  LONGBOTTOM CHRISTOPHER

IPC: A61B5/00 ,  G01N21/49

CPC classification number: A61B5/0088 ,  A61B5/0082 ,  G01N21/359 ,  G01N21/49 ,  G01N2021/4707 ,  G01N2021/4719 ,  G01N2201/1053 ,  G01N2201/1085

Abstract: A medical imager, primarily for use in oral and dental applications. The imager has a source for providing a plurality of collimated beams of non-ionising radiation, in particular near-infrared light, and a plurality of correlated detectors. Each detector is arranged to receive unscattered light from one or part of one of said collimated beams and scattered light from one or more other beams. The imager further comprises means for using both the unscattered and scattered light to form an image.

Abstract translation: 一种医用成像仪，主要用于口腔和牙科应用。 成像器具有用于提供多个非电离辐射的准直束，特别是近红外光的源和多个相关检测器的源。 每个检测器布置成从所述准直束中的一个或一部分接收未散射的光并且来自一个或多个其它光束的散射光。 成像器还包括使用未散射光和散射光两者来形成图像的装置。

公开(公告)号：US20100137722A1

公开(公告)日：2010-06-03

申请号：US12594095

申请日：2008-03-28

Applicant: John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

Inventor： John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

IPC: A61B6/14 ,  H01L27/146

CPC classification number: A61B5/0088 ,  A61B5/0082 ,  G01N21/359 ,  G01N21/49 ,  G01N2021/4707 ,  G01N2021/4719 ,  G01N2201/1053 ,  G01N2201/1085

Abstract: A medical imager, primarily for use in oral and dental applications. The imager has a source for providing a plurality of collimated beams of non-ionizing radiation, in particular near-infrared light, and a plurality of correlated detectors. Each detector is arranged to receive unscattered light from one or part of one of said collimated beams and scattered light from one or more other beams. The imager further comprises means for using both the unscattered and scattered light to form an image.

Abstract translation: 一种医用成像仪，主要用于口腔和牙科应用。 成像器具有用于提供多个非电离辐射的准直束，特别是近红外光的源和多个相关检测器的源。 每个检测器布置成从所述准直束中的一个或一部分接收未散射的光并且来自一个或多个其它光束的散射光。 成像器还包括用于使用未散射光和散射光两者来形成图像的装置。

公开(公告)号：US4943734A

公开(公告)日：1990-07-24

申请号：US373914

申请日：1989-06-30

Applicant: Carl E. A. Johnson ,  Jay L. Ormsby ,  Eric T. Chase ,  George S. Quackenbos ,  Sergey V. Broude ,  Abdu Bou dour

Inventor： Carl E. A. Johnson ,  Jay L. Ormsby ,  Eric T. Chase ,  George S. Quackenbos ,  Sergey V. Broude ,  Abdu Bou dour

IPC: G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G06T1/00

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

公开(公告)号：US4876455A

公开(公告)日：1989-10-24

申请号：US160562

申请日：1988-02-25

Applicant: Arthur C. Sanderson ,  Lee E. Weiss ,  Shree K. Nayar

Inventor： Arthur C. Sanderson ,  Lee E. Weiss ,  Shree K. Nayar

IPC: G01N21/956

CPC classification number: G01N21/95684 ,  G01N2021/8887 ,  G01N2021/95646 ,  G01N2201/102 ,  G01N2201/1085

Abstract: The invention is an automated solder joint inspection system for determining the quality of a specular soldered joint through examination of the shape of the joint surface using a series of point light sources and the associated highlight reflections from the joint surface. The light from the point light sources, which is directed toward the solder joint, is reflected in a pattern from the solder joint to an array of light responsive transducers, such as a camera, at a fixed location. Utilizing the intensity values from the light responsive transducer array, a binary grid map is generated for the reflections from each point light source. Using known surface features of solder joints along with curve fitting techniques, a series of grid maps may be mathematically interpreted to reconstruct the solder joint surface. A rule-based system, through comparison with acceptable solder joint surface features, evaluates and classifies the joint for an acceptability determination.

Abstract translation: 本发明是一种自动焊接检查系统，用于通过使用一系列点光源和从关节表面相关联的高光反射来检查接合表面的形状来确定镜面焊接接头的质量。 来自位于焊接点处的点光源的光以固定位置从焊料接头到诸如照相机的光响应传感器阵列的图案反射。 利用来自光响应换能器阵列的强度值，生成来自每个点光源的反射的二进制网格图。 使用焊接接头的已知表面特征以及曲线拟合技术，可以数学地解释一系列网格图以重建焊点表面。 基于规则的系统通过与可接受的焊点表面特征进行比较，评估和分类接头以进行可接受性测定。

公开(公告)号：US4541715A

公开(公告)日：1985-09-17

申请号：US456296

申请日：1983-01-06

Applicant: Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

Inventor： Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

IPC: G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G01N21/00

CPC classification number: G03F7/70866 ,  G01N21/94 ,  G03F7/70916 ,  G01N21/47 ,  G01N2201/1085

Abstract: An apparatus for detecting contaminants depositing on the reticle of a reduction projection mask aligner comprises a laser spot projector which conducts a laser beam to the light path upstream of the condenser lens of the aligner such that the laser beam is in the same direction as of the exposure light beam. The laser spot projector projects the laser beam from above the reticle through the condenser lens so as to form a laser spot on the upper surface of the reticle. A laser spot scanner which scans the entire area of the reticle by the laser spot projected on to the reticle by the laser spot projector, and a photoelectric detector which receives the scattered light emitted aslant on the reticle surface, whereby a contaminant on the reticle is detected in accordance with the signal produced by the detector.

Abstract translation: 用于检测沉积在掩模版上的污染物的还原投影掩模对准器的装置包括：激光点投影仪，其将激光束传导到对准器的聚光透镜上游的光路，使得激光束处于与 曝光光束。 激光点投影仪将激光束从光罩上方投射聚光透镜，以在掩模版的上表面上形成激光斑点。 一种激光点扫描器，其通过由激光点投影仪投射在掩模版上的激光光斑扫描掩模版的整个区域，以及光电检测器，其接收在光罩表面上倾斜发射的散射光，由此掩模版上的污染物为 根据由检测器产生的信号检测。

公开(公告)号：EP2212680A2

公开(公告)日：2010-08-04

申请号：EP09787463.0

申请日：2009-07-09

Applicant: Brightview Systems Ltd.

Inventor： FINAROV, Moshe

IPC: G01N21/95 ,  G01N21/31

CPC classification number: G01N21/8422 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.

公开(公告)号：EP0183974B1

公开(公告)日：1989-01-25

申请号：EP85113640.8

申请日：1985-10-26

Applicant: Meinan Machinery Works, Inc.

Inventor： Iwamoto, Yasuhiko c/o Meinan Machinery Works, Inc.

IPC: G01N21/88 ,  G01N21/89 ,  G01N33/46

CPC classification number: G01N21/8986 ,  G01N2201/1085

公开(公告)号：JP2006177956A

公开(公告)日：2006-07-06

申请号：JP2005364420

申请日：2005-12-19

Applicant: Palo Alto Research Center Inc ,  パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated

Inventor： CURRY DOUGLAS N ,  BRUCE RICHARD H

IPC: G01N21/64 ,  G01N21/78

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

Abstract: PROBLEM TO BE SOLVED: To solve the problem that is produced by the mutual overlapping of a plurality of radiation beams to be used, or corresponding to the induced radiation light signals in a manner of the wavelength region.
SOLUTION: The specimen 12, which is supported on the imager stage of a specimen imaging scanning type imager and in which a plurality of kinds of probes are inserted, are scanned in a time division multiplexed manner by a rotating polygon scanner set 160 or the like, by using the radiation beams from a plurality of the radiation sources 62' and 62" arranged in a predetermined positional relation, based on the incident side opening of an optical path 154. The light signal, which is produced by the action of the radiation beams on the specimen 12 and time-multiplexed scanning, while excluding interference, is transmitted to a photosensor system by the optical path 154. The light signal due to a photosensor 98 is received and detected corresponding to the group of the radiation sources, and the light signal sensed by the photosensor 98 is processed by a control unit 80 that is a processor.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了解决由多个待使用的辐射束的相互重叠产生的问题，或者以波长区域的方式对应于感应的辐射光信号。 解决方案：通过旋转多边形扫描仪组160以时分复用的方式扫描支撑在样本成像扫描型成像器的成像器台上并且插入有多种探针的样本12 通过使用来自以预定位置关系布置的多个辐射源62'和62“的辐射束，基于光路154的入射侧开口。通过动作产生的光信号 的样本12上的辐射束和时间复用扫描，同时排除干扰，通过光路154传输到光电传感器系统。由光传感器98引起的光信号被接收并对应于辐射源组 ，并且由光传感器98感测的光信号由作为处理器的控制单元80进行处理。版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005321319A

公开(公告)日：2005-11-17

申请号：JP2004140290

申请日：2004-05-10

Applicant: Fujitsu Ltd ,  富士通株式会社

Inventor： ANDO MORITOSHI ,  SAKAI SATORU

IPC: G01B11/30 ,  G01N21/86 ,  G01N21/88 ,  G01N21/89 ,  G01N21/896 ,  G01N21/95

CPC classification number: G01N21/896 ,  G01N2021/9513 ,  G01N2201/1085

Abstract: PROBLEM TO BE SOLVED: To provide a surface inspection apparatus and a surface inspection method capable of detecting the state of defects in the surface of matter in detail.
SOLUTION: In the surface inspection apparatus and the surface inspection method for inspecting a surface to be inspected 40 on the basis of the intensity of reflected light when irradiating light irradiated to the surface to be inspected 40 is reflected, an optical fiber 41 and a diffusing plate 42 irradiate the surface to be inspected 40 with the irradiating light having a light intensity distribution more intense to the side of the surface to be inspected 40, and a CCD sensor 44 detects the intensity of reflected light when the irradiating light is reflected by the surface to be inspected 40.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供能够详细检测物质表面的缺陷状态的表面检查装置和表面检查方法。 解决方案：在照射照射到待检测表面40的光的反射光的反射光强度的基础上，在表面检查装置和检查表面40的表面检查方法中，反射光纤41 并且扩散板42用对被检测表面侧的光强度分布更强的照射光40照射待检查的表面40，CCD传感器44检测当照射光为 反映在被检查面的40个。版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006177955A

公开(公告)日：2006-07-06

申请号：JP2005364417

申请日：2005-12-19

Applicant: Palo Alto Research Center Inc ,  パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated

Inventor： CURRY DOUGLAS N ,  BRUCE RICHARD H ,  KRIVACIC ROBERT T

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: PROBLEM TO BE SOLVED: To more accurately detect cells, while suppressing the occurrence number of false images or ghosts by enhancing the throughput, reliability (accuracy) and the scanning speed.
SOLUTION: The sweep irradiation with a radiation beam 64' is applied to a specimen 12', which is supported on the stage 20' of an imager 10', from an orthogonal direction by a scanning-type radiation source 110 so that preferably almost circular irradiation spot due to the radiation beam 64' traverses the specimen 12'. Optical paths, for example, the incident side openings 124 and 126 of branch optical fiber bundles 120 and 122 orthogonally face and are arranged with respect to the specimen 12' so as to approach the locus of the irradiation spot. The light signal, emitted by the specimen 12' corresponding to irradiation with the radiation beam 64', is transmitted to the emission side opening 52' by the optical paths to be sensed in the emission side opening 52' by a photosensor 90' and is processed by a processor 80' to form an image the specimen 12'.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：通过提高吞吐量，可靠性（精度）和扫描速度，同时抑制伪像或重影的发生次数，从而更准确地检测单元。 解决方案：通过扫描型辐射源110将正向辐射束64'的扫描照射施加到由扫描型辐射源110从正交方向支撑在成像器10'的平台20'上的样本12'，使得 优选地，由于辐射束64'穿过样本12'，几乎圆形的照射斑点。 光路例如分支光纤束120和122的入射侧开口124和126正交地相对于样本12'布置，以便接近照射点的轨迹。 由与辐射束64'照射相对应的样本12'发射的光信号通过光传感器90'在发射侧开口52'中被感测的光路传输到发射侧开口52'，并且是 由处理器80'处理以形成样本12'的图像。 版权所有（C）2006，JPO＆NCIPI