公开(公告)号：US09490098B1

公开(公告)日：2016-11-08

申请号：US14992870

申请日：2016-01-11

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US07250727B2

公开(公告)日：2007-07-31

申请号：US11143417

申请日：2005-06-02

Applicant: John W. Lewellen ,  John Noonan

Inventor： John W. Lewellen ,  John Noonan

IPC: H01J7/24

CPC classification number: H01J37/065 ,  H01J3/021 ,  H01J37/073 ,  H01J37/305 ,  H01J2201/317 ,  H01J2237/303 ,  H01J2237/3104 ,  H01J2237/3132

Abstract: Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.

Abstract translation: 包括电子束焊接和用于薄膜沉积的电子束蒸发的光束处理方法是用新的大功率长焦点电子源来实现的。 大功率长焦点电子源产生电子束。 电子束通过一系列转向磁铁传送以转向光束。 提供至少一个重新聚焦磁体以重新聚焦电子束。 最终的转向磁铁将电子束弯曲成对准目标，例如焊接接头或沉积靶。

公开(公告)号：US20060061285A1

公开(公告)日：2006-03-23

申请号：US11143417

申请日：2005-06-02

Applicant: John Lewellen ,  John Noonan

Inventor： John Lewellen ,  John Noonan

IPC: H01J23/08

CPC classification number: H01J37/065 ,  H01J3/021 ,  H01J37/073 ,  H01J37/305 ,  H01J2201/317 ,  H01J2237/303 ,  H01J2237/3104 ,  H01J2237/3132

Abstract: Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.

Abstract translation: 包括电子束焊接和用于薄膜沉积的电子束蒸发的光束处理方法是用新的大功率长焦点电子源来实现的。 大功率长焦点电子源产生电子束。 电子束通过一系列转向磁铁传送以转向光束。 提供至少一个重新聚焦磁体以重新聚焦电子束。 最终的转向磁铁将电子束弯曲成对准目标，例如焊接接头或沉积靶。

公开(公告)号：US20030178583A1

公开(公告)日：2003-09-25

申请号：US10392228

申请日：2003-03-18

Inventor： Bert Jan Kampherbeek ,  Marco Jan-Jaco Wieland ,  Pieter Kruit

IPC: G21G005/00 ,  H01L029/06 ,  H01L029/12 ,  G21K005/04 ,  G03F007/20

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F7/70375 ,  H01J1/304 ,  H01J1/34 ,  H01J37/073 ,  H01J37/3175 ,  H01J2201/317 ,  H01J2237/06333 ,  H01J2237/31779

Abstract: The present invention relates to the use of an electron source in a lithography system for producing a plurality of electron beams directed towards an object to be processed, said electron source comprising a plurality of field emitters, characterized in that said electron source comprises a semiconductor layer with a plurality of tips, said use including the steps of: producing a plurality of light spots on said electron source, producing one light spot on one field emitter; exciting electrons to a conduction band (Ec) by light from a light spot within said field emitter by a photo-electric effect; accelerating said electrons in said conduction band (Ec) towards said tips and tunnelling them outside tips in order to generate electrons for said plurality of electron beams, causing tips to generate electrons for said electron beam having a spot smaller than 100 nm on an object to be processed, each spot of light triggering an electron beam from one tip.

Abstract translation: 本发明涉及在光刻系统中使用电子源来制造指向待处理物体的多个电子束，所述电子源包括多个场致发射体，其特征在于，所述电子源包括半导体层 具有多个尖端，所述用途包括以下步骤：在所述电子源上产生多个光点，在一个场发射器上产生一个光斑; 通过光电效应使来自所述场发射器内的光点的光激发电子到导带（Ec）; 将所述导带（Ec）中的所述电子加速朝向所述尖端并将其隧穿到外部尖端，以便为所述多个电子束产生电子，从而使得针对具有小于100nm的点的所述电子束产生电子， 被处理，每个光点从一个尖端触发电子束。

公开(公告)号：US6153872A

公开(公告)日：2000-11-28

申请号：US122965

申请日：1998-07-27

Applicant: Mark J. Hagmann ,  Manuel Brugat

Inventor： Mark J. Hagmann ,  Manuel Brugat

IPC: H01J1/304 ,  H01J1/34 ,  H01J3/02 ,  H01S3/00 ,  H01J40/14

CPC classification number: H01J1/304 ,  H01J1/34 ,  H01J3/021 ,  H01J2201/317

Abstract: An apparatus for high speed gating of electric current based on the resonant interaction of tunneling electrons with optical fields is disclosed. The present invention biases an electron-emitting tip with a DC voltage source and focuses an output from a laser on the electron-emitting tip to stimulate electron emission from the tip. The electron emission creates an electrical signal that is coupled to circuitry for further processing. In accordance with the present invention, various methods of coupling the electrical signal from the electron-emitting tip are disclosed, as are various methods of reducing the magnitude of the laser output needed to stimulate electron emission, and methods of enhancing the static current density.

Abstract translation: 公开了一种基于隧道电子与光场的谐振相互作用的电流高速选通装置。 本发明利用直流电压源偏置电子发射尖端，并且将来自激光器的输出聚焦在电子发射尖端上以刺激来自尖端的电子发射。 电子发射产生电信号，该电信号被耦合到用于进一步处理的电路。 根据本发明，公开了耦合来自电子发射尖端的电信号的各种方法，减少刺激电子发射所需的激光输出的幅度的各种方法以及提高静态电流密度的方法也是如此。

公开(公告)号：WO2003017309A1

公开(公告)日：2003-02-27

申请号：PCT/US2002/023660

申请日：2002-07-25

Applicant: MOTOROLA, INC.

Inventor： TALIN, Albert, Alec ,  JASKIE, James, E. ,  COLL, Bernard, F.

IPC: H01J1/304

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J2201/30469 ,  H01J2201/317 ,  Y10S977/939

Abstract: A vacuum microelectronic device (10, 40) emits electrons (37) from surfaces of nanotube emitters (17, 18). Extracting electrons from the surface of each nanotube emitter (17) results is a small voltage variation between each emitter utilized in the device (10, 40). Consequently, the vacuum microelectronic device (10,40) has a more controllable turn-on voltage and a consistent current density from each nanotube emitter (17, 18).

Abstract translation: 真空微电子器件（10,40）从纳米管发射器（17,18）的表面发射电子（37）。 从每个纳米管发射器（17）的表面提取电子的结果是在器件（10,40）中使用的每个发射极之间的电压变化很小。 因此，真空微电子器件（10,40）具有来自每个纳米管发射极（17,18）的更可控的导通电压和一致的电流密度。

公开(公告)号：WO99035659A1

公开(公告)日：1999-07-15

申请号：PCT/US1998/025072

申请日：1998-11-24

IPC: H01J1/304 ,  H01J1/34 ,  H01J3/02 ,  H01S3/00 ,  H01J1/30

CPC classification number: H01J1/304 ,  H01J1/34 ,  H01J3/021 ,  H01J2201/317

Abstract: An apparatus for high speed gating of electric current based on the resonant interaction of tunnelling electron with optical fields is disclosed. The present invention biases an electron-emitting tip with a DC voltage source and focuses an output from a laser on the electron-emitting tip to stimulate electron emission from the tip said tip having a coating for enhancing the effect of the optical field of the impinging laser. The electron emission creates an electrical signal that is coupled to circuitry for further processing. In accordance with the present invention, various methods of coupling the electrical signal from the electron-emitting tip are disclosed, as are various methods of reducing the magnitude of the laser output needed to stimulate electron emission, and methods of enhancing the static current density.

Abstract translation: 公开了一种基于隧道电子与光场共振相互作用的电流高速选通装置。 本发明利用直流电压源偏置电子发射尖端，并且将来自激光器的输出聚焦在电子发射尖端上以刺激来自尖端的电子发射，所述尖端具有用于增强撞击光场的影响的涂层 激光。 电子发射产生电信号，其被耦合到用于进一步处理的电路。 根据本发明，公开了耦合来自电子发射尖端的电信号的各种方法，以及减少刺激电子发射所需的激光输出的幅度的各种方法以及增强静态电流密度的方法。

公开(公告)号：EP1046179A1

公开(公告)日：2000-10-25

申请号：EP98962828.4

申请日：1998-11-24

Applicant: Florida International University

Inventor： HAGMANN, Mark, J. ,  BRUGAT, Manuel

IPC: H01J1/34 ,  H01J3/02 ,  H01J1/30

CPC classification number: H01J1/304 ,  H01J1/34 ,  H01J3/021 ,  H01J2201/317

Abstract: An apparatus for high speed gating of electric current based on the resonant interaction of tunnelling electron with optical fields is disclosed. The present invention biases an electron-emitting tip with a DC voltage source and focuses an output from a laser on the electron-emitting tip to stimulate electron emission from the tip said tip having a coating for enhancing the effect of the optical field of the impinging laser. The electron emission creates an electrical signal that is coupled to circuitry for further processing. In accordance with the present invention, various methods of coupling the electrical signal from the electron-emitting tip are disclosed, as are various methods of reducing the magnitude of the laser output needed to stimulate electron emission, and methods of enhancing the static current density.

公开(公告)号：EP0696043A1

公开(公告)日：1996-02-07

申请号：EP95112077.3

申请日：1995-08-01

Applicant: HITACHI, LTD.

Inventor： Shinada, Hiroyuki ,  Kimura, Shingo ,  Kuroda, Katsuhiro ,  Fukuhara, Satoru ,  Ohshima, Takashi

IPC: H01J1/30

CPC classification number: H01J1/304 ,  H01J2201/317 ,  H01J2237/06316

Abstract: A Schottky emission cathode has a filament, a needle-shaped piece of single crystal refractory metal which is attached to the filament and has a flat crystal surface at a tip thereof, and an adsorbed layer including at least one kind of a metal other than the single crystal refractory metal on the flat crystal surface.
The piece of single crystal refractory metal is heated by passing a current through the filament and electrons are extracted by an electric field applied on a tip of the needle-shaped piece of single crystal refractory metal. The tip of the needle-shaped piece of single crystal refractory metal has a radius of curvature of a value to produce an energy width among electrons extracted from the tip not exceeding a predetermined value when the electric field is sufficient to prevent the flat crystal surface from collapsing during operation of the cathode.

Abstract translation: 肖特基发射阴极具有长丝，单晶耐火金属针形片，其附着于灯丝，并且在其顶端具有平坦的晶体表面，以及包含至少一种不同于 单晶难熔金属在平面晶面上。 通过使电流通过灯丝来加热单晶难熔金属片，并通过施加在针状单晶耐火金属片的尖端上的电场来提取电子。 针状单晶耐火金属片的尖端具有一个值的曲率半径，以在电场足以防止平坦的晶体表面时产生从尖端提取的电子之间的能量宽度不超过预定值 在阴极运行期间塌陷。 $$

公开(公告)号：EP0370196A2

公开(公告)日：1990-05-30

申请号：EP89117574.7

申请日：1989-09-22

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Inventor： Feuerbaum, Hans-Peter, Dr. ,  Frosien, Jürgen, Dr.

IPC: H01J37/073 ,  G01R31/28

CPC classification number: H01J37/073 ,  H01J2201/317

Abstract: In modernen Elektronenstrahlmeßgeräten wird die thermische La/B6 bzw. Feldemissionsquelle durch einen mit einem gepulsten Laserstrahl beaufschlagte Photokathode ersetzt. Da die Breite der Photoelektronenimpulse etwa der Breite der Laserimpulse ent­spricht, sind diese Geräte insbesondere für stroboskopische Messungen in schnellen Gallium-Arsenid-Schaltungen geeignet. Der apparative Aufwand zur Erzeugung der Photoelektronenimpulse ist allerdings beträchtlich, da Mittel zur Verdoppelung der Frequenz des primären Laserlichtes erforderlich sind. Es wird deshalb vorgeschlagen, die Kathode des Elektronenstrahlmeßgerätes mit Photonen der Energie E Ph

Abstract translation: 在现代热Elektronenstrahlmeßgeräten的La / B6或场发射源被替换为装入脉冲激光束的光电阴极。 由于光电子脉冲的宽度大致对应于激光脉冲的宽度，这些设备特别适合于在快速砷化镓电路频闪测量。 用于制造光电子脉冲的装置费用，然而，显着地因为需要一次激光的倍频的手段。 因此，建议的是，电子束测量光子能量的阴极EPH