Abstract:
An electron-emitting device utilizes an emitter electrode (12) shaped like a ladder in which a line of emitter openings (18) extend through the electrode. In fabricating the device, the emitter openings can be utilized to self-align certain edges, such as edges (38C) of a focusing system (37), to other edges, such as edges (28C) of control electrodes (28), to obtain desired lateral spacings. The self-alignment is typically achieved with the assistance of a backside photolithographic exposure operation. The ladder shape of the emitter electrode also facilitates the removal of short-circuit defects involving the electrode.
Abstract:
A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned with a first axis; a second electrode in the path between the first electrode and the detector, having a second aperture in the path and aligned with a second axis that is parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the electrodes. During operation, the potential generator applies potentials to the first, second and third electrodes so that the electrostatic lens directs a beam of charged particles from the source propagating along the first axis to propagate along the second axis.
Abstract:
A solid state sub-nanometer-scale electron beam emitter comprising a multi-layered structure having a nano-tip electron emitter and tunnel emission junction formed on substrate, an initial electron beam extraction electrode, a “nano-sandwich Einzel” electrode, and a topmost protective layer.
Abstract:
A compact electron gun includes a field emission cathode (12), a Pierce-like electrode (18), a gate layer (14), a focus lens layer (16), a focus lens (20), and a convergence cup (22).
Abstract:
A system includes an electrostatic lens positioned between a charged-particle source and a detector. The lens includes: a first electrode having a first aperture in the path and aligned with a first axis; a second electrode in the path between the first electrode and the charged-particle detector, the second electrode having a second aperture positioned in the path and aligned with a second axis parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the first, second, and third electrodes. During operation, the potential generator applies first, second, and third potentials to the first, second, and third electrodes, respectively, so that the electrostatic lens directs a beam of charged particles from the charged-particle source propagating along the first axis to propagate along the second axis.
Abstract:
An electrode (12 or 30) of an electron-emitting device has a plurality of openings (16 or 60) spaced laterally apart from one another. The openings can be used, as needed, in selectively separating one or more parts of the electrode from the remainder of the electrode during corrective test directed towards repairing any short-circuit defects that may exist between the electrode and other overlying or underlying electrodes. When the electrode with the openings is an emitter electrode (12), each opening (16) normally extends fully across an overlying control electrode (30). When the electrode with the openings is a control electrode (30), each opening (60) normally extends fully across an underlying emitter electrode (12). The short-circuit repair procedure typically entails directing light energy on appropriate portions of the electrode with the openings.
Abstract:
The invention relates to a module assembly for the application-specific construction of power factor correction systems, filter systems, and absorption circuit systems in selectively non-choked, choked, protective or thyristor-connected design, comprising a busbar system, fuse holders, switch components, at least one choke, and power capacitors. According to the invention, a first module unit is provided, comprising a first section for receiving busbars, standard fuse holders, fuses, a busbar cover as protection against accidental contact with the busbar and/or fuses, and a second, trough-like section for receiving switch components or switch means such that they can be mechanically fixed and electrically contacted. A second module unit is designed to receive one or more in particular switchable capacitor winding blocks, wherein the second module unit encloses the at least one winding block, insulating the same. The first and the second module unit each have a base region, wherein mechanical and/or electrical connections are led via apertures or openings in the respective base regions, such that either a back-to-back assembly with direct docking of the first and second module units can be effected, or a compact choke set with connecting elements can be mechanically received in an electrically insulated manner between the first and second module units using the apertures or openings in the respective base region of the first or second module unit, and can be electrically connected.